Chunhai Ji

Person

Portland, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Carrier ring wall for reduction of back-diffusion of reactive speci...
- Patent number 10,475,627
- Issue date Nov 12, 2019
- Lam Research Corporation
- Chengzhu Qi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Image reversal with AHM gap fill for multiple patterning
- Patent number 10,192,759
- Issue date Jan 29, 2019
- Lam Research Corporation
- Nader Shamma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for using electrical asymmetry effect to contro...
- Patent number 9,941,113
- Issue date Apr 10, 2018
- Lam Research Corporation
- Douglas Keil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for using electrical asymmetry effect to contro...
- Patent number 9,644,271
- Issue date May 9, 2017
- Lam Research Corporation
- Douglas Keil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High selectivity and low stress carbon hardmask by pulsed low frequ...
- Patent number 9,589,799
- Issue date Mar 7, 2017
- Lam Research Corporation
- Sirish K. Reddy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming a mask by etching conformal film on patterned as...
- Patent number 9,362,133
- Issue date Jun 7, 2016
- Lam Research Corporation
- Nader Shamma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carbon deposition-etch-ash gap fill process
- Patent number 9,023,731
- Issue date May 5, 2015
- Novellus Systems, Inc.
- Chunhai Ji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CHAMBER-ACCUMULATION EXTENSION VIA IN-SITU PASSIVATION
- Publication number 20220267900
- Publication date Aug 25, 2022
- ZhiYuan Fang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for Using Electrical Asymmetry Effect to Contro...
- Publication number 20170330744
- Publication date Nov 16, 2017
- LAM RESEARCH CORPORATION
- Douglas Keil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARRIER RING WALL FOR REDUCTION OF BACK-DIFFUSION OF REACTIVE SPECI...
- Publication number 20170278681
- Publication date Sep 28, 2017
- LAM RESEARCH CORPORATION
- Chengzhu Qi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMAGE REVERSAL WITH AHM GAP FILL FOR MULTIPLE PATTERNING
- Publication number 20160254171
- Publication date Sep 1, 2016
- Lam Research Corporation
- Nader Shamma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH SELECTIVITY AND LOW STRESS CARBON HARDMASK BY PULSED LOW FREQU...
- Publication number 20150093908
- Publication date Apr 2, 2015
- LAM RESEARCH CORPORATION
- Sirish K. Reddy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMAGE REVERSAL WITH AHM GAP FILL FOR MULTIPLE PATTERNING
- Publication number 20140170853
- Publication date Jun 19, 2014
- Nader Shamma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARBON DEPOSITION-ETCH-ASH GAP FILL PROCESS
- Publication number 20140094035
- Publication date Apr 3, 2014
- Novellus Systems, Inc.
- Chunhai Ji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INCREASING ETCH SELECTIVITY OF CARBON FILMS WITH LOWER ABSORPTION C...
- Publication number 20120258261
- Publication date Oct 11, 2012
- Novellus Systems, Inc.
- Sirish Reddy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Carrier ring wall for reduction of back-diffusion of reactive speci...

Image reversal with AHM gap fill for multiple patterning

Systems and methods for using electrical asymmetry effect to contro...

Systems and methods for using electrical asymmetry effect to contro...

High selectivity and low stress carbon hardmask by pulsed low frequ...

Method for forming a mask by etching conformal film on patterned as...

Carbon deposition-etch-ash gap fill process

Patents Applicationslast 30 patents

CHAMBER-ACCUMULATION EXTENSION VIA IN-SITU PASSIVATION

Systems and Methods for Using Electrical Asymmetry Effect to Contro...

CARRIER RING WALL FOR REDUCTION OF BACK-DIFFUSION OF REACTIVE SPECI...

IMAGE REVERSAL WITH AHM GAP FILL FOR MULTIPLE PATTERNING

HIGH SELECTIVITY AND LOW STRESS CARBON HARDMASK BY PULSED LOW FREQU...

IMAGE REVERSAL WITH AHM GAP FILL FOR MULTIPLE PATTERNING

CARBON DEPOSITION-ETCH-ASH GAP FILL PROCESS

INCREASING ETCH SELECTIVITY OF CARBON FILMS WITH LOWER ABSORPTION C...