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Patents Grants
last 30 patents
Information
Patent Grant
Planarization process
Patent number
10,068,803
Issue date
Sep 4, 2018
Institute of Microelectronics, Chinese Academy of Sciences
Huilong Zhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing fin structure
Patent number
9,691,624
Issue date
Jun 27, 2017
Institute of Microelectronics, Chinese Academy of Sciences
Huilong Zhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing dummy gate in gate-last process and dummy...
Patent number
9,419,095
Issue date
Aug 16, 2016
Institute of Microelectronics, Chinese Academy of Sciences
Chunlong Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing fin structure
Patent number
9,419,112
Issue date
Aug 16, 2016
Institute of Microelectronics, Chinese Academy of Sciences
Huilong Zhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Planarization process
Patent number
9,406,549
Issue date
Aug 2, 2016
Institute of Microelectronics, Chinese Academy of Sciences
Huilong Zhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for making HKMG dummy gate structure with amorphous/ONO mask...
Patent number
9,331,172
Issue date
May 3, 2016
Institute of Microelectronics, Chinese Academy of Sciences
Chunlong Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method for manufacturing the same
Patent number
9,306,003
Issue date
Apr 5, 2016
Institute of Microelectronics, Chinese Academy of Sciences
Jing Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing dummy gate in gate-last process and dummy...
Patent number
9,202,890
Issue date
Dec 1, 2015
Institute of Microelectronics, Chinese Academy of Sciences
Chunlong Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing dummy gate in gate-last process and dummy...
Patent number
9,111,863
Issue date
Aug 18, 2015
Institute of Microelectronics, Chinese Academy of Sciences
Chunlong Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heating method for maintaining a stable thermal budget
Patent number
8,926,321
Issue date
Jan 6, 2015
Institute of Microelectronics, Chinese Academy of Sciences
Chunlong Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer transfer apparatus and wafer transfer method
Patent number
8,834,155
Issue date
Sep 16, 2014
Institute of Microelectronics, Chinese Academy of Sciences
Chunlong Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method of manufacturing the same
Patent number
8,779,475
Issue date
Jul 15, 2014
Guilei Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing a semiconductor device
Patent number
8,703,567
Issue date
Apr 22, 2014
The Institute Of Microelectronics Chinese Academy of Science
Guilei Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing semiconductor device
Patent number
8,247,278
Issue date
Aug 21, 2012
Institute of Microelectronics, Chinese Academy of Sciences
Huilong Zhu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20160293695
Publication date
Oct 6, 2016
Institute of Microelectronics, Chinese Academy of Sciences
Jing Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20160020274
Publication date
Jan 21, 2016
Institute of Microelectronics, Chinese Academy of Sciences
Jing Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLANARIZATION PROCESS
Publication number
20150325452
Publication date
Nov 12, 2015
Institute of Microelectronics, Chinese Academy of Sciences
Huilong Zhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING FIN STRUCTURE
Publication number
20150303274
Publication date
Oct 22, 2015
Institute of Microelectronics, Chinese Academy of Sciences
Huilong ZHU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING FIN STRUCTURE
Publication number
20150294879
Publication date
Oct 15, 2015
Institute of Microelectronics, Chinese Academy of Sciences
Huilong Zhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLANARIZATION PROCESS
Publication number
20150262883
Publication date
Sep 17, 2015
Institute of Microelectronics, Chinese Academy of Sciences
Huilong Zhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20150214332
Publication date
Jul 30, 2015
Institute of Microelectronics, Chinese Academy of Sciences
Chunlong Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Manufacturing Dummy Gate in Gate-Last Process and Dummy...
Publication number
20150035087
Publication date
Feb 5, 2015
Chunlong Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Manufacturing Dummy Gate in Gate-Last Process and Dummy...
Publication number
20140332958
Publication date
Nov 13, 2014
Chunlong Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Manufacturing Dummy Gate in Gate-Last Process and Dummy...
Publication number
20140273426
Publication date
Sep 18, 2014
Chunlong Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
Publication number
20130105859
Publication date
May 2, 2013
Guilei Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
Publication number
20120319215
Publication date
Dec 20, 2012
Guilei Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEATING METHOD FOR MAINTAINING A STABLE THERMAL BUDGET
Publication number
20120270165
Publication date
Oct 25, 2012
Chunlong Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR FABRICATION METHOD
Publication number
20120252225
Publication date
Oct 4, 2012
Chunlong Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER TRANSFER APPARATUS AND WAFER TRANSFER METHOD
Publication number
20120247723
Publication date
Oct 4, 2012
Chunlong Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20120171833
Publication date
Jul 5, 2012
Huilong Zhu
H01 - BASIC ELECTRIC ELEMENTS