Chunshing Chen

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Chang Hua Hsien, TW

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Patents Grantslast 30 patents

Information Patent Grant
Method for forming bottom anti-reflective coating (BARC)
- Patent number 6,300,240
- Issue date Oct 9, 2001
- Worldwide Semiconductor Manufacturing Corp.
- Kung Linliu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...