Number | Date | Country | Kind |
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88112558 | Jul 1999 | TW |
Number | Name | Date | Kind |
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6083572 | Theil et al. | Jul 2000 |
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(1) Yurika Suda et al., A New Anti-reflective Layer for Deep UV Lithography, SPIE vol. 1674 Optical/laser Microlithography, pp. 350-361, (1992). |