Claude Montcalm

Person

Livermore, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Correction of localized shape errors on optical surfaces by alterin...
- Patent number 6,844,272
- Issue date Jan 18, 2005
- EUV Limited Liability Corporation
- John S. Taylor
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and system using power modulation and velocity modulation pr...
- Patent number 6,668,207
- Issue date Dec 23, 2003
- The United States of America
- Claude Montcalm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low-cost method for producing extreme ultraviolet lithography optics
- Patent number 6,634,760
- Issue date Oct 21, 2003
- The Regents of the University of California
- James A. Folta
- G02 - OPTICS
Information Patent Grant
Method and system for producing sputtered thin films with sub-angst...
- Patent number 6,524,449
- Issue date Feb 25, 2003
- James A. Folta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system using power modulation for maskless vapor deposit...
- Patent number 6,425,988
- Issue date Jul 30, 2002
- Claude Montcalm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for fabricating high reflectance-low stress Mo—Si m...
- Patent number 6,309,705
- Issue date Oct 30, 2001
- The Regents of the University of California
- Claude Montcalm
- G02 - OPTICS
Information Patent Grant
Method to adjust multilayer film stress induced deformation of optics
- Patent number 6,134,049
- Issue date Oct 17, 2000
- The Regents of the University of California
- Eberhard A. Spiller
- G02 - OPTICS
Information Patent Grant
High reflectance-low stress Mo-Si multilayer reflective coatings
- Patent number 6,110,607
- Issue date Aug 29, 2000
- The Regents of the University of California
- Claude Montcalm
- G02 - OPTICS
Information Patent Grant
Method to adjust multilayer film stress induced deformation of optics
- Patent number 6,011,646
- Issue date Jan 4, 2000
- The Regents of the Unviersity of California
- Paul B. Mirkarimi
- G02 - OPTICS
Information Patent Grant
Passivating overcoat bilayer for multilayer reflective coatings for...
- Patent number 5,958,605
- Issue date Sep 28, 1999
- Regents of the University of California
- Claude Montcalm
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Correction of localized shape errors on optical surfaces by alterin...
- Publication number 20030164949
- Publication date Sep 4, 2003
- The Regents of the University of California.
- John S. Taylor
- B82 - NANO-TECHNOLOGY
Information Patent Application
Low-cost method for producing extreme ultraviolet lithography optics
- Publication number 20030043483
- Publication date Mar 6, 2003
- The Regents of the University of California.
- James A. Folta
- G02 - OPTICS

Claude Montcalm

Person

Patents Grantslast 30 patents

Correction of localized shape errors on optical surfaces by alterin...

Method and system using power modulation and velocity modulation pr...

Low-cost method for producing extreme ultraviolet lithography optics

Method and system for producing sputtered thin films with sub-angst...

Method and system using power modulation for maskless vapor deposit...

Process for fabricating high reflectance-low stress Mo&#x02014;Si m...

Method to adjust multilayer film stress induced deformation of optics

High reflectance-low stress Mo-Si multilayer reflective coatings

Method to adjust multilayer film stress induced deformation of optics

Passivating overcoat bilayer for multilayer reflective coatings for...

Patents Applicationslast 30 patents

Correction of localized shape errors on optical surfaces by alterin...

Low-cost method for producing extreme ultraviolet lithography optics

Process for fabricating high reflectance-low stress Mo—Si m...