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Craig Bercaw

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  • Boulder Creek, CA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    System and method for semiconductor processing
    • Patent number 7,867,905
    • Issue date Jan 11, 2011
    • Tegal Corporation
    • Tue Nguyen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Semiconductor processing system and method
    • Patent number 7,442,615
    • Issue date Oct 28, 2008
    • Tegal Corporation
    • Tue Nguyen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Assembly line processing method
    • Patent number 7,153,542
    • Issue date Dec 26, 2006
    • Tegal Corporation
    • Tue Nguyen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Removable lid and floating pivot
    • Patent number 7,074,278
    • Issue date Jul 11, 2006
    • Tegal Corporation
    • Tue Nguyen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Multi-thermal zone shielding apparatus
    • Patent number 7,049,549
    • Issue date May 23, 2006
    • Tegal Corporation
    • Tue Nguyen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method and system for sequential processing in a two-compartment ch...
    • Patent number 6,921,555
    • Issue date Jul 26, 2005
    • Tegal Corporation
    • Tue Nguyen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Two-compartment chamber for sequential processing
    • Patent number 6,858,085
    • Issue date Feb 22, 2005
    • Tegal Corporation
    • Tue Nguyen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Multi-thermal zone shielding apparatus
    • Patent number 6,844,527
    • Issue date Jan 18, 2005
    • Tegal Corporation
    • Tue Nguyen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Visual indicator cold trapping system
    • Patent number 6,800,254
    • Issue date Oct 5, 2004
    • Tegal Corporation
    • Tue Nguyen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Semiconductor processing system and method
    • Patent number 6,610,169
    • Issue date Aug 26, 2003
    • Simplus Systems Corporation
    • Tue Nguyen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Removable lid and floating pivot
    • Patent number 6,609,632
    • Issue date Aug 26, 2003
    • Simplus Systems Corporation
    • Tue Nguyen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Integrated precursor delivery system
    • Patent number 6,572,706
    • Issue date Jun 3, 2003
    • Simplus Systems Corporation
    • Tue Nguyen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Multi-thermal zone shielding apparatus
    • Patent number 6,221,166
    • Issue date Apr 24, 2001
    • Simplus Systems Corporation
    • Tue Nguyen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    Gas manifold valve cluster
    • Publication number 20070028838
    • Publication date Feb 8, 2007
    • Craig Bercaw
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Deposition apparatus for semiconductor processing
    • Publication number 20070022959
    • Publication date Feb 1, 2007
    • Craig Bercaw
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Semiconductor processing system and method
    • Publication number 20070020945
    • Publication date Jan 25, 2007
    • Tegal Corporation
    • Tue Nguyen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    System and method for semiconductor processing
    • Publication number 20070020898
    • Publication date Jan 25, 2007
    • Tegal Corporation
    • Tue Nguyen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Nitridation of high-k dielectrics
    • Publication number 20060051506
    • Publication date Mar 9, 2006
    • Yoshihide Senzaki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Semiconductor processing system and method
    • Publication number 20050037597
    • Publication date Feb 17, 2005
    • Tue Nguyen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Multi-thermal zone shielding apparatus
    • Publication number 20040261722
    • Publication date Dec 30, 2004
    • Tegal Corporation
    • Tue Nguyen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Assembly line processing system
    • Publication number 20040058293
    • Publication date Mar 25, 2004
    • Tue Nguyen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Two-compartment chamber for sequential processing method
    • Publication number 20040026371
    • Publication date Feb 12, 2004
    • Tue Nguyen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Assembly line processing method
    • Publication number 20040026374
    • Publication date Feb 12, 2004
    • Tue Nguyen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Integrated precursor delivery system
    • Publication number 20030196603
    • Publication date Oct 23, 2003
    • Tue Nguyen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Semiconductor processing system and method
    • Publication number 20020153101
    • Publication date Oct 24, 2002
    • Tue Nguyen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Removable lid and floating pivot
    • Publication number 20020092144
    • Publication date Jul 18, 2002
    • Tue Nguyen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Apparatus and method for multi-layer deposition
    • Publication number 20020062789
    • Publication date May 30, 2002
    • Tue Nguyen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Multi-thermal zone shielding apparatus
    • Publication number 20020000203
    • Publication date Jan 3, 2002
    • Tue Nguyen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...