Dai KITAGAWA

Person

Kurokawa-gun, Miyagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Heater power feeding mechanism
- Patent number 11,756,806
- Issue date Sep 12, 2023
- Tokyo Electron Limited
- Dai Kitagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Power feeding mechanism and method for controlling temperature of a...
- Patent number 11,756,807
- Issue date Sep 12, 2023
- Tokyo Electron Limited
- Dai Kitagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Placing table and plasma processing apparatus
- Patent number 11,743,973
- Issue date Aug 29, 2023
- Tokyo Electron Limited
- Dai Kitagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support and plasma processing apparatus
- Patent number 11,705,302
- Issue date Jul 18, 2023
- Tokyo Electron Limited
- Dai Kitagawa
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Placing table and plasma treatment apparatus
- Patent number 11,373,884
- Issue date Jun 28, 2022
- Tokyo Electron Limited
- Dai Kitagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Power feeding mechanism and method for controlling temperature of a...
- Patent number 11,121,009
- Issue date Sep 14, 2021
- Tokyo Electron Limited
- Dai Kitagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Placing table and plasma treatment apparatus
- Patent number 10,679,869
- Issue date Jun 9, 2020
- Tokyo Electron Limited
- Dai Kitagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck, placing table and plasma processing apparatus
- Patent number 10,593,522
- Issue date Mar 17, 2020
- Tokyo Electron Limited
- Katsuyuki Koizumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mounting table and substrate processing apparatus
- Patent number 10,512,125
- Issue date Dec 17, 2019
- Tokyo Electron Limited
- Dai Kitagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Feeder-cover structure and semiconductor production apparatus
- Patent number 10,374,358
- Issue date Aug 6, 2019
- Tokyo Electron Limited
- Ryota Sakane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature control mechanism, temperature control method and subst...
- Patent number 10,199,246
- Issue date Feb 5, 2019
- Tokyo Electron Limited
- Katsuyuki Koizumi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20230141911
- Publication date May 11, 2023
- TOKYO ELECTRON LIMITED
- Dai KITAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND MAINTENANCE METHOD FOR SUBSTRATE...
- Publication number 20230071478
- Publication date Mar 9, 2023
- TOKYO ELECTRON LIMITED
- Hiroki Endo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POWER FEEDING MECHANISM AND METHOD FOR CONTROLLING TEMPERATURE OF A...
- Publication number 20210375648
- Publication date Dec 2, 2021
- TOKYO ELECTRON LIMITED
- Dai KITAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATER POWER FEEDING MECHANISM
- Publication number 20210366741
- Publication date Nov 25, 2021
- TOKYO ELECTRON LIMITED
- Dai KITAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS
- Publication number 20210098224
- Publication date Apr 1, 2021
- TOKYO ELECTRON LIMITED
- Dai KITAGAWA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PLACING TABLE AND PLASMA PROCESSING APPARATUS
- Publication number 20210051772
- Publication date Feb 18, 2021
- TOKYO ELECTRON LIMITED
- Dai KITAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLACING TABLE AND PLASMA TREATMENT APPARATUS
- Publication number 20200266081
- Publication date Aug 20, 2020
- TOKYO ELECTRON LIMITED
- Dai KITAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLACING UNIT AND PLASMA PROCESSING APPARATUS
- Publication number 20180144945
- Publication date May 24, 2018
- TOKYO ELECTRON LIMITED
- Tomoyuki TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLACING TABLE AND PLASMA TREATMENT APPARATUS
- Publication number 20170140954
- Publication date May 18, 2017
- TOKYO ELECTRON LIMITED
- Dai KITAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POWER FEEDING MECHANISM AND METHOD FOR CONTROLLING TEMPERATURE OF A...
- Publication number 20170140957
- Publication date May 18, 2017
- TOKYO ELECTRON LIMITED
- Dai KITAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATER POWER FEEDING MECHANISM
- Publication number 20170140958
- Publication date May 18, 2017
- TOKYO ELECTRON LIMITED
- Dai KITAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL MECHANISM, TEMPERATURE CONTROL METHOD AND SUBST...
- Publication number 20160225645
- Publication date Aug 4, 2016
- Tokyo Electron Limited
- Katsuyuki KOIZUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOUNTING TABLE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20160198528
- Publication date Jul 7, 2016
- TOKYO ELECTRON LIMITED
- Dai KITAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLACING TABLE AND PLASMA PROCESSING APPARATUS
- Publication number 20150373783
- Publication date Dec 24, 2015
- TOKYO ELECTRON LIMITED
- Dai KITAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK, PLACING TABLE AND PLASMA PROCESSING APPARATUS
- Publication number 20150311106
- Publication date Oct 29, 2015
- TOKYO ELECTRON LIMITED
- Katsuyuki KOIZUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FEEDER-COVER STRUCTURE AND SEMICONDUCTOR PRODUCTION APPARATUS
- Publication number 20150214653
- Publication date Jul 30, 2015
- TOKYO ELECTRON LIMITED
- Ryota SAKANE
- H01 - BASIC ELECTRIC ELEMENTS

Dai KITAGAWA

Person

Patents Grantslast 30 patents

Heater power feeding mechanism

Power feeding mechanism and method for controlling temperature of a...

Placing table and plasma processing apparatus

Substrate support and plasma processing apparatus

Placing table and plasma treatment apparatus

Power feeding mechanism and method for controlling temperature of a...

Placing table and plasma treatment apparatus

Electrostatic chuck, placing table and plasma processing apparatus

Mounting table and substrate processing apparatus

Feeder-cover structure and semiconductor production apparatus

Temperature control mechanism, temperature control method and subst...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEM

SUBSTRATE PROCESSING APPARATUS AND MAINTENANCE METHOD FOR SUBSTRATE...

POWER FEEDING MECHANISM AND METHOD FOR CONTROLLING TEMPERATURE OF A...

HEATER POWER FEEDING MECHANISM

SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS

PLACING TABLE AND PLASMA PROCESSING APPARATUS

PLACING TABLE AND PLASMA TREATMENT APPARATUS

PLACING UNIT AND PLASMA PROCESSING APPARATUS

PLACING TABLE AND PLASMA TREATMENT APPARATUS

POWER FEEDING MECHANISM AND METHOD FOR CONTROLLING TEMPERATURE OF A...

HEATER POWER FEEDING MECHANISM

TEMPERATURE CONTROL MECHANISM, TEMPERATURE CONTROL METHOD AND SUBST...

MOUNTING TABLE AND SUBSTRATE PROCESSING APPARATUS

PLACING TABLE AND PLASMA PROCESSING APPARATUS

ELECTROSTATIC CHUCK, PLACING TABLE AND PLASMA PROCESSING APPARATUS

FEEDER-COVER STRUCTURE AND SEMICONDUCTOR PRODUCTION APPARATUS