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Daisuke Kuroiwa
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Clifton Park, NY, US
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last 30 patents
Information
Patent Grant
Film precursor tray for use in a film precursor evaporation system...
Patent number
7,708,835
Issue date
May 4, 2010
Tokyo Electron Limited
Kenji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multi-tray film precursor evaporation system and thin film depositi...
Patent number
7,638,002
Issue date
Dec 29, 2009
Tokyo Electron Limited
Kenji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for preparing solid precursor tray for use in solid precurso...
Patent number
7,488,512
Issue date
Feb 10, 2009
Tokyo Electron Limited
Kenji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Replaceable precursor tray for use in a multi-tray solid precursor...
Patent number
7,484,315
Issue date
Feb 3, 2009
Tokyo Electron Limited
Kenji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for thin film deposition using multi-tray film precursor eva...
Patent number
7,459,396
Issue date
Dec 2, 2008
Tokyo Electron Limited
Kenji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
METHOD FOR THIN FILM DEPOSITION USING MULTI-TRAY FILM PRECURSOR EVA...
Publication number
20070032079
Publication date
Feb 8, 2007
TOKYO ELECTRON LIMITED
Kenji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film precursor evaporation system and method of using
Publication number
20060185597
Publication date
Aug 24, 2006
Kenji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Multi-tray film precursor evaporation system and thin film depositi...
Publication number
20060112882
Publication date
Jun 1, 2006
TOKYO ELECTRON LIMITED
Kenji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Replaceable precursor tray for use in a multi-tray solid precursor...
Publication number
20060112883
Publication date
Jun 1, 2006
Kenji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for preparing solid precursor tray for use in solid precurso...
Publication number
20060115593
Publication date
Jun 1, 2006
Kenji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...