Dale K. Stone

Person

Haverhill, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for non line-of-sight doping
- Patent number 11,631,588
- Issue date Apr 18, 2023
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced substrate temperature measurement apparatus, system and me...
- Patent number 11,473,978
- Issue date Oct 18, 2022
- Applied Materials, Inc.
- Dawei Sun
- G01 - MEASURING TESTING
Information Patent Grant
Platen for reducing particle contamination on a substrate and a met...
- Patent number 10,658,207
- Issue date May 19, 2020
- Varian Semiconductor Equipment Associates, Inc.
- David E. Suuronen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for non line-of-sight doping
- Patent number 10,541,137
- Issue date Jan 21, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Diffusion resistant electrostatic clamp
- Patent number 10,385,454
- Issue date Aug 20, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Dale K. Stone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal shield for electrostatic chuck
- Patent number 10,157,764
- Issue date Dec 18, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Dale K. Stone
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Platen for reducing particle contamination on a substrate and a met...
- Patent number 9,953,849
- Issue date Apr 24, 2018
- Varian Semiconductor Equipment Associates, Inc.
- David E. Suuronen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High conductivity electrostatic chuck
- Patent number 9,692,325
- Issue date Jun 27, 2017
- Entegris, Inc.
- David Suuronen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Diffusion resistant electrostatic clamp
- Patent number 9,644,269
- Issue date May 9, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Dale K. Stone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for improving temperature uniformity of a workpiece
- Patent number 9,633,875
- Issue date Apr 25, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Dawei Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Triboelectric charge controlled electrostatic clamp
- Patent number 9,082,804
- Issue date Jul 14, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Julian Blake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High surface resistivity electrostatic chuck
- Patent number 9,025,305
- Issue date May 5, 2015
- Entegris, Inc.
- Richard A. Cooke
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Platen ground pin for connecting substrate to ground
- Patent number 8,681,472
- Issue date Mar 25, 2014
- Varian Semiconductor Equipment Associates, Inc.
- David E. Suuronen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cooling textured workpieces with an electrostatic chuck
- Patent number 8,672,311
- Issue date Mar 18, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Dale K. Stone
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for junction avoidance on edge of workpieces
- Patent number 8,598,021
- Issue date Dec 3, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Julian Blake
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Removal of charge between a substrate and an electrostatic clamp
- Patent number 8,531,814
- Issue date Sep 10, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Dale K. Stone
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Sliding wafer release gripper/wafer peeling gripper
- Patent number 7,751,172
- Issue date Jul 6, 2010
- Axcelis Technologies, Inc.
- Ashwin M. Purohit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck with separated electrodes
- Patent number 7,715,170
- Issue date May 11, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Julian G. Blake
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Load lock control
- Patent number 7,381,969
- Issue date Jun 3, 2008
- Axcelis Technologies, Inc.
- Tariq Fasheh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bellows liner for an ion beam implanter
- Patent number 7,205,556
- Issue date Apr 17, 2007
- Axcelis Technologies, Inc.
- Lyudmila Stone
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Removing byproducts of physical and chemical reactions in an ion im...
- Patent number 7,173,260
- Issue date Feb 6, 2007
- Axcelis Technologies, Inc.
- Maria J. Anc
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-performance electrostatic clamp comprising a resistive layer,...
- Patent number 7,151,658
- Issue date Dec 19, 2006
- Axcelis Technologies, Inc.
- Peter L. Kellerman
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Apparatus for the backside gas cooling of a wafer in a batch ion im...
- Patent number 6,583,428
- Issue date Jun 24, 2003
- Axcelis Technologies, Inc.
- David J. Chipman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for capturing and removing contaminant particles from an int...
- Patent number 5,670,217
- Issue date Sep 23, 1997
- Eaton Corporation
- Julian G. Blake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for capturing and removing contaminant particles from an...
- Patent number 5,656,092
- Issue date Aug 12, 1997
- Eaton Corporation
- Julian G. Blake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer sensing and clamping monitor
- Patent number 5,436,790
- Issue date Jul 25, 1995
- Eaton Corporation
- Julian G. Blake
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND APPARATUS FOR ENHANCED SUBSTRATE HEATING AND RAPID SUBST...
- Publication number 20200381271
- Publication date Dec 3, 2020
- Applied Materials, Inc.
- Dawei Sun
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ENHANCED SUBSTRATE TEMPERATURE MEASUREMENT APPARATUS, SYSTEM AND ME...
- Publication number 20200378837
- Publication date Dec 3, 2020
- Applied Materials, Inc.
- Dawei Sun
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR NON LINE-OF-SIGHT DOPING
- Publication number 20200152466
- Publication date May 14, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR NON LINE-OF-SIGHT DOPING
- Publication number 20190371608
- Publication date Dec 5, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA RESISTANT ELECTROSTATIC CLAMP
- Publication number 20190252230
- Publication date Aug 15, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Dale K. Stone
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Platen For Reducing Particle Contamination On A Substrate and a Met...
- Publication number 20180233386
- Publication date Aug 16, 2018
- Varian Semiconductor Equipment Associates, Inc.
- David E. Suuronen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIFFUSION RESISTANT ELECTROSTATIC CLAMP
- Publication number 20170335460
- Publication date Nov 23, 2017
- Dale K. Stone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Thermal Shield For Electrostatic Chuck
- Publication number 20160379861
- Publication date Dec 29, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Dale K. Stone
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
Apparatus For Improving Temperature Uniformity Of A Workpiece
- Publication number 20160268150
- Publication date Sep 15, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Dawei Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Platen For Reducing Particle Contamination On A Substrate And A Met...
- Publication number 20150279704
- Publication date Oct 1, 2015
- David E. Suuronen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA RESISTANT ELECTROSTATIC CLAMP
- Publication number 20150228524
- Publication date Aug 13, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Dale K. Stone
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIFFUSION RESISTANT ELECTROSTATIC CLAMP
- Publication number 20150214087
- Publication date Jul 30, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Dale K. Stone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW EMISSIVITY ELECTROSTATIC CHUCK
- Publication number 20140318455
- Publication date Oct 30, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Julian G. Blake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Conductivity Electrostatic Chuck
- Publication number 20130155569
- Publication date Jun 20, 2013
- Varian Semiconductor Equipment Associates, Inc.
- David Suuronen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
JUNCTION AVOIDANCE ON EDGES OF WORKPIECES
- Publication number 20130084694
- Publication date Apr 4, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Julian Blake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Surface Resistivity Electrostatic Chuck
- Publication number 20130070384
- Publication date Mar 21, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Richard A. Cooke
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
TRIBOELECTRIC CHARGE CONTROLLED ELECTROSTATIC CLAMP
- Publication number 20120200980
- Publication date Aug 9, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Julian Blake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLATEN CLEANING
- Publication number 20120017938
- Publication date Jan 26, 2012
- Varian Semiconductor Equipment Associates, Inc.
- William T. Weaver
- B08 - CLEANING
Information Patent Application
METHOD OF COOLING TEXTURED WORKPIECES WITH AN ELECTROSTATIC CHUCK
- Publication number 20110291344
- Publication date Dec 1, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Dale K. Stone
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLATEN TO CONTROL CHARGE ACCUMULATION
- Publication number 20110036990
- Publication date Feb 17, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Dale K. Stone
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REMOVAL OF CHARGE BETWEEN A SUBSTRATE AND AN ELECTROSTATIC CLAMP
- Publication number 20100265631
- Publication date Oct 21, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Dale K. Stone
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATED GRAPHITE LINERS
- Publication number 20100140508
- Publication date Jun 10, 2010
- Julian G. Blake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLATEN FOR REDUCING PARTICLE CONTAMINATION ON A SUBSTRATE AND A MET...
- Publication number 20090317964
- Publication date Dec 24, 2009
- Varian Semiconductor Equipment Associates, Inc.
- David E. SUURONEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-VACUUM PROTECTIVE LINERS
- Publication number 20090179158
- Publication date Jul 16, 2009
- VARIAN SEMICONDUCTOR EQUPIMENT ASSOCIATE, INC.
- Lyudmila Stone
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EMBOSSED ELECTROSTATIC CHUCK
- Publication number 20090122458
- Publication date May 14, 2009
- VARIAN SEMICONDUCTOR EPUIPMENT ASSOCIATED, INC.
- D. Jeffrey Lischer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR HANDLING SUBSTRATES
- Publication number 20090003979
- Publication date Jan 1, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Dale K. Stone
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK WITH SEPARATED ELECTRODES
- Publication number 20080239614
- Publication date Oct 2, 2008
- Julian G. Blake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sliding wafer release gripper / wafer peeling gripper
- Publication number 20080100983
- Publication date May 1, 2008
- Axcelis Technologies, Inc.
- Ashwin M. Purohit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Load lock control
- Publication number 20070246658
- Publication date Oct 25, 2007
- Axcelis Technologies, Inc.
- Tariq Fasheh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Removing byproducts of physical and chemical reactions in an ion im...
- Publication number 20060131514
- Publication date Jun 22, 2006
- Axcelis Technologies, Inc.
- Maria J. Anc
- H01 - BASIC ELECTRIC ELEMENTS

Dale K. Stone

Person

Patents Grantslast 30 patents

Method and apparatus for non line-of-sight doping

Enhanced substrate temperature measurement apparatus, system and me...

Platen for reducing particle contamination on a substrate and a met...

Method and apparatus for non line-of-sight doping

Diffusion resistant electrostatic clamp

Thermal shield for electrostatic chuck

Platen for reducing particle contamination on a substrate and a met...

High conductivity electrostatic chuck

Diffusion resistant electrostatic clamp

Apparatus for improving temperature uniformity of a workpiece

Triboelectric charge controlled electrostatic clamp

High surface resistivity electrostatic chuck

Platen ground pin for connecting substrate to ground

Method of cooling textured workpieces with an electrostatic chuck

Method for junction avoidance on edge of workpieces

Removal of charge between a substrate and an electrostatic clamp

Sliding wafer release gripper/wafer peeling gripper

Electrostatic chuck with separated electrodes

Load lock control

Bellows liner for an ion beam implanter

Removing byproducts of physical and chemical reactions in an ion im...

High-performance electrostatic clamp comprising a resistive layer,...

Apparatus for the backside gas cooling of a wafer in a batch ion im...

Method for capturing and removing contaminant particles from an int...

Apparatus for capturing and removing contaminant particles from an...

Wafer sensing and clamping monitor

Patents Applicationslast 30 patents

SYSTEM AND APPARATUS FOR ENHANCED SUBSTRATE HEATING AND RAPID SUBST...

ENHANCED SUBSTRATE TEMPERATURE MEASUREMENT APPARATUS, SYSTEM AND ME...

METHOD AND APPARATUS FOR NON LINE-OF-SIGHT DOPING

METHOD AND APPARATUS FOR NON LINE-OF-SIGHT DOPING

PLASMA RESISTANT ELECTROSTATIC CLAMP

Platen For Reducing Particle Contamination On A Substrate and a Met...

DIFFUSION RESISTANT ELECTROSTATIC CLAMP

Thermal Shield For Electrostatic Chuck

Apparatus For Improving Temperature Uniformity Of A Workpiece

Platen For Reducing Particle Contamination On A Substrate And A Met...

PLASMA RESISTANT ELECTROSTATIC CLAMP

DIFFUSION RESISTANT ELECTROSTATIC CLAMP

LOW EMISSIVITY ELECTROSTATIC CHUCK

High Conductivity Electrostatic Chuck

JUNCTION AVOIDANCE ON EDGES OF WORKPIECES

High Surface Resistivity Electrostatic Chuck

TRIBOELECTRIC CHARGE CONTROLLED ELECTROSTATIC CLAMP

PLATEN CLEANING

METHOD OF COOLING TEXTURED WORKPIECES WITH AN ELECTROSTATIC CHUCK

PLATEN TO CONTROL CHARGE ACCUMULATION

REMOVAL OF CHARGE BETWEEN A SUBSTRATE AND AN ELECTROSTATIC CLAMP

COATED GRAPHITE LINERS

PLATEN FOR REDUCING PARTICLE CONTAMINATION ON A SUBSTRATE AND A MET...

IN-VACUUM PROTECTIVE LINERS

EMBOSSED ELECTROSTATIC CHUCK

TECHNIQUES FOR HANDLING SUBSTRATES

ELECTROSTATIC CHUCK WITH SEPARATED ELECTRODES

Sliding wafer release gripper / wafer peeling gripper

Load lock control

Removing byproducts of physical and chemical reactions in an ion im...