Damien Slevin

Person

Salem, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
High temperature RF connection with integral thermal choke
- Patent number 11,469,084
- Issue date Oct 11, 2022
- Lam Research Corporation
- Timothy S. Thomas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cooling plate for a semiconductor processing apparatus
- Patent number D956705
- Issue date Jul 5, 2022
- Lam Research Corporation
- Bin Luo
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Electrostatic chuck filter box and mounting bracket
- Patent number 10,944,374
- Issue date Mar 9, 2021
- Lam Research Corporation
- Miguel Benjamin Vasquez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cluster tool system with step ladder assembly
- Patent number 10,774,588
- Issue date Sep 15, 2020
- Lam Research Corporation
- Miguel Benjamin Vasquez
- E06 - DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL LADDERS
Information Patent Grant
Showerhead tilt mechanism
- Patent number 10,760,160
- Issue date Sep 1, 2020
- Lam Research Corporation
- Bin Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck filter box and mounting bracket
- Patent number 10,693,433
- Issue date Jun 23, 2020
- Lam Research Corporation
- Miguel Benjamin Vasquez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Step ladder with component rack system for fabrication facility
- Patent number 10,378,279
- Issue date Aug 13, 2019
- Lam Research Corporation
- Miguel Benjamin Vasquez
- E06 - DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL LADDERS
Information Patent Grant
Showerhead assembly
- Patent number 10,358,722
- Issue date Jul 23, 2019
- Lam Research Corporation
- John Wiltse
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead tilt mechanism
- Patent number 10,190,216
- Issue date Jan 29, 2019
- Lam Research Corporation
- Bin Luo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for supplying vaporized precursor
- Patent number 9,637,821
- Issue date May 2, 2017
- Lam Research Corporation
- Damien Slevin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sequential precursor dosing in an ALD multi-station/batch reactor
- Patent number 9,236,244
- Issue date Jan 12, 2016
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Point of use valve manifold for semiconductor fabrication equipment
- Patent number 8,985,152
- Issue date Mar 24, 2015
- Novellus Systems, Inc.
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sequential precursor dosing in an ALD multi-station/batch reactor
- Patent number 8,940,646
- Issue date Jan 27, 2015
- Lam Research Corporation
- Ramesh Chandrasekharan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precursor vapor generation and delivery system with filters and fil...
- Patent number 8,628,618
- Issue date Jan 14, 2014
- Novellus Systems Inc.
- Damien Slevin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
APPARATUSES FOR MEASURING GAP BETWEEN A SUBSTRATE SUPPORT PLANE AND...
- Publication number 20240213060
- Publication date Jun 27, 2024
- LAM RESEARCH CORPORATION
- Adriana Vintila
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH TEMPERATURE RF CONNECTION WITH INTEGRAL THERMAL CHOKE
- Publication number 20220415620
- Publication date Dec 29, 2022
- LAM RESEARCH CORPORATION
- Timothy S. THOMAS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH TEMPERATURE HEATING OF A SUBSTRATE IN A PROCESSING CHAMBER
- Publication number 20220199379
- Publication date Jun 23, 2022
- LAM RESEARCH CORPORATION
- James F. LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MECHANICAL INDEXER FOR MULTI-STATION PROCESS MODULE
- Publication number 20210320029
- Publication date Oct 14, 2021
- LAM RESEARCH CORPORATION
- Michael NORDIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK FILTER BOX AND MOUNTING BRACKET
- Publication number 20200321934
- Publication date Oct 8, 2020
- LAM RESEARCH CORPORATION
- Miguel Benjamin VASQUEZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHEMICAL VAPOR DEPOSITION SHOWER HEAD FOR UNIFORM GAS DISTRIBUTION
- Publication number 20190376184
- Publication date Dec 12, 2019
- LAM RESEARCH CORPORATION
- Michael John SELEP
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK FILTER BOX AND MOUNTING BRACKET
- Publication number 20190356295
- Publication date Nov 21, 2019
- LAM RESEARCH CORPORATION
- Miguel Benjamin VASQUEZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLUSTER TOOL SYSTEM WITH STEP LADDER ASSEMBLY
- Publication number 20190345766
- Publication date Nov 14, 2019
- LAM RESEARCH CORPORATION
- Miguel Benjamin Vasquez
- E06 - DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL LADDERS
Information Patent Application
SHOWERHEAD TILT MECHANISM
- Publication number 20190153601
- Publication date May 23, 2019
- LAM RESEARCH CORPORATION
- Bin Luo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH TEMPERATURE RF CONNECTION WITH INTEGRAL THERMAL CHOKE
- Publication number 20190071778
- Publication date Mar 7, 2019
- LAM RESEARCH CORPORATION
- Timothy S. Thomas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD TILT MECHANISM
- Publication number 20190032214
- Publication date Jan 31, 2019
- LAM RESEARCH CORPORATION
- Bin Luo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STEP LADDER WITH COMPONENT RACK SYSTEM FOR FABRICATION FACILITY
- Publication number 20190017323
- Publication date Jan 17, 2019
- LAM RESEARCH CORPORATION
- Miguel Benjamin Vasquez
- E06 - DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL LADDERS
Information Patent Application
SHOWERHEAD ASSEMBLY
- Publication number 20170167024
- Publication date Jun 15, 2017
- LAM RESEARCH CORPORATION
- John Wiltse
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEQUENTIAL PRECURSOR DOSING IN AN ALD MULTI-STATION/BATCH REACTOR
- Publication number 20150099372
- Publication date Apr 9, 2015
- LAM RESEARCH CORPORATION
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEQUENTIAL PRECURSOR DOSING IN AN ALD MULTI-STATION/BATCH REACTOR
- Publication number 20150017812
- Publication date Jan 15, 2015
- LAM RESEARCH CORPORATION
- Ramesh Chandrasekharan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR SUPPLYING VAPORIZED PRECURSOR
- Publication number 20140096834
- Publication date Apr 10, 2014
- LAM RESEARCH CORPORATION
- Damien Slevin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POINT OF USE VALVE MANIFOLD FOR SEMICONDUCTOR FABRICATION EQUIPMENT
- Publication number 20130333768
- Publication date Dec 19, 2013
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSOR VAPOR GENERATION AND DELIVERY SYSTEM WITH FILTERS AND FIL...
- Publication number 20110111136
- Publication date May 12, 2011
- NOVELLUS SYSTEMS INC.
- Damien Slevin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Damien Slevin

Person

Patents Grantslast 30 patents

High temperature RF connection with integral thermal choke

Cooling plate for a semiconductor processing apparatus

Electrostatic chuck filter box and mounting bracket

Cluster tool system with step ladder assembly

Showerhead tilt mechanism

Electrostatic chuck filter box and mounting bracket

Step ladder with component rack system for fabrication facility

Showerhead assembly

Showerhead tilt mechanism

Method for supplying vaporized precursor

Sequential precursor dosing in an ALD multi-station/batch reactor

Point of use valve manifold for semiconductor fabrication equipment

Sequential precursor dosing in an ALD multi-station/batch reactor

Precursor vapor generation and delivery system with filters and fil...

Patents Applicationslast 30 patents

APPARATUSES FOR MEASURING GAP BETWEEN A SUBSTRATE SUPPORT PLANE AND...

HIGH TEMPERATURE RF CONNECTION WITH INTEGRAL THERMAL CHOKE

HIGH TEMPERATURE HEATING OF A SUBSTRATE IN A PROCESSING CHAMBER

MECHANICAL INDEXER FOR MULTI-STATION PROCESS MODULE

ELECTROSTATIC CHUCK FILTER BOX AND MOUNTING BRACKET

CHEMICAL VAPOR DEPOSITION SHOWER HEAD FOR UNIFORM GAS DISTRIBUTION

ELECTROSTATIC CHUCK FILTER BOX AND MOUNTING BRACKET

CLUSTER TOOL SYSTEM WITH STEP LADDER ASSEMBLY

SHOWERHEAD TILT MECHANISM

HIGH TEMPERATURE RF CONNECTION WITH INTEGRAL THERMAL CHOKE

SHOWERHEAD TILT MECHANISM

STEP LADDER WITH COMPONENT RACK SYSTEM FOR FABRICATION FACILITY

SHOWERHEAD ASSEMBLY

SEQUENTIAL PRECURSOR DOSING IN AN ALD MULTI-STATION/BATCH REACTOR

SEQUENTIAL PRECURSOR DOSING IN AN ALD MULTI-STATION/BATCH REACTOR

METHOD FOR SUPPLYING VAPORIZED PRECURSOR

POINT OF USE VALVE MANIFOLD FOR SEMICONDUCTOR FABRICATION EQUIPMENT

PRECURSOR VAPOR GENERATION AND DELIVERY SYSTEM WITH FILTERS AND FIL...