Dan Vitkavage

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Tualatin, OR, US

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Patents Grantslast 30 patents

Information Patent Grant
Diffusion barrier and etch stop films
- Patent number 8,669,181
- Issue date Mar 11, 2014
- Novellus Systems, Inc.
- Yongsik Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Diffusion barrier and etch stop films
- Patent number 7,915,166
- Issue date Mar 29, 2011
- Novellus Systems, Inc.
- Yongsik Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
PECVD methods for producing ultra low-k dielectric films using UV t...
- Patent number 7,906,174
- Issue date Mar 15, 2011
- Novellus Systems, Inc.
- Qingguo Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...