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Dana Scranton
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Kalispell, MT, US
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Patents Grants
last 30 patents
Information
Patent Grant
Sonic energy process chamber
Patent number
7,337,663
Issue date
Mar 4, 2008
Semitool, Inc.
Paul Z. Wirth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-process system
Patent number
7,005,010
Issue date
Feb 28, 2006
Semitool, Inc.
Eric Bergman
B08 - CLEANING
Information
Patent Grant
Single workpiece processing system
Patent number
6,900,132
Issue date
May 31, 2005
Semitool, Inc.
Raymon F. Thompson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Side-specific cleaning method and apparatus
Patent number
6,875,284
Issue date
Apr 5, 2005
Semitool, Inc.
Dana Scranton
B08 - CLEANING
Information
Patent Grant
Methods for removing metallic contamination from wafer containers
Patent number
6,869,486
Issue date
Mar 22, 2005
Semitool, Inc.
Ronald G. Breese
B08 - CLEANING
Information
Patent Grant
Multi-process system with pivoting process chamber
Patent number
6,691,720
Issue date
Feb 17, 2004
Semitool, Inc.
Eric Bergman
B08 - CLEANING
Information
Patent Grant
Substrate drying method for use with a surface tension effect dryer...
Patent number
6,681,499
Issue date
Jan 27, 2004
Semitool, Inc.
Dana Scranton
B08 - CLEANING
Information
Patent Grant
Systems and methods for processing workpieces
Patent number
6,668,844
Issue date
Dec 30, 2003
Semitool, Inc.
Eric Lund
B08 - CLEANING
Information
Patent Grant
Surface tension effect dryer with porous vessel walls
Patent number
6,502,591
Issue date
Jan 7, 2003
Semitool, Inc.
Dana Scranton
B08 - CLEANING
Information
Patent Grant
Systems and methods for processing workpieces
Patent number
6,427,359
Issue date
Aug 6, 2002
Semitool, Inc.
Dana Scranton
B08 - CLEANING
Information
Patent Grant
Single semiconductor wafer processor
Patent number
6,395,101
Issue date
May 28, 2002
Semitool, Inc.
Dana Scranton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Single semiconductor wafer processor
Patent number
6,374,837
Issue date
Apr 23, 2002
Semitool, Inc.
Dana Scranton
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR WAFER CLEANING WITH DILUTE ACIDS
Publication number
20100024847
Publication date
Feb 4, 2010
Ronald G. Breese
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING SYSTEM WITH IN-SITU CHEMICAL SOLUTION GENERATION
Publication number
20080202564
Publication date
Aug 28, 2008
Dana Scranton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POST ETCH RESIDUE REMOVAL FROM SUBSTRATES
Publication number
20080083427
Publication date
Apr 10, 2008
Semitool, Inc.
Joy Block
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
WORKPIECE PROCESSING WITH PREHEAT
Publication number
20080060676
Publication date
Mar 13, 2008
Dana Scranton
B08 - CLEANING
Information
Patent Application
SINGLE SIDE WORKPIECE PROCESSING
Publication number
20070110895
Publication date
May 17, 2007
Jason Rye
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Cleaning with electrically charged aerosols
Publication number
20060118132
Publication date
Jun 8, 2006
Eric J. Bergman
B08 - CLEANING
Information
Patent Application
Side-specific cleaning apparatus
Publication number
20050199277
Publication date
Sep 15, 2005
Dana Scranton
B08 - CLEANING
Information
Patent Application
Single workpiece processing system
Publication number
20040112738
Publication date
Jun 17, 2004
Raymon F. Thompson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Single wafer cleaning with ozone
Publication number
20040103919
Publication date
Jun 3, 2004
Michael Kenny
B08 - CLEANING
Information
Patent Application
Apparatus and methods for removing metallic contamination from wafe...
Publication number
20040079393
Publication date
Apr 29, 2004
Ronald G. Breese
B08 - CLEANING
Information
Patent Application
Workpiece processing system
Publication number
20040040583
Publication date
Mar 4, 2004
Semitool, Inc.
Ronald G. Breese
B08 - CLEANING
Information
Patent Application
Multi-process system
Publication number
20040040573
Publication date
Mar 4, 2004
Semitool, Inc.
Eric Bergman
B08 - CLEANING
Information
Patent Application
Vapor cleaning and liquid rinsing process vessel
Publication number
20030136429
Publication date
Jul 24, 2003
Semitool, Inc.
Dana Scranton
B08 - CLEANING
Information
Patent Application
Method and apparatus for cleaning of microelectronic workpieces aft...
Publication number
20030136431
Publication date
Jul 24, 2003
Semitool, Inc.
Dana Scranton
B08 - CLEANING
Information
Patent Application
Side-specific cleaning method and apparatus
Publication number
20030136422
Publication date
Jul 24, 2003
Semitool, Inc.
Dana Scranton
B08 - CLEANING
Information
Patent Application
Surface tension effect dryer with porous vessel walls
Publication number
20030101616
Publication date
Jun 5, 2003
Semitool, Inc.
Dana Scranton
B08 - CLEANING
Information
Patent Application
Apparatus and methods for removing metallic contamination from wafe...
Publication number
20030062069
Publication date
Apr 3, 2003
Semitool, Inc.
Ronald G. Breese
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and methods for removing metallic contamination from wafe...
Publication number
20030051743
Publication date
Mar 20, 2003
Semitool, Inc.
Ronald G. Breese
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multi-process system
Publication number
20030010352
Publication date
Jan 16, 2003
Semitool, Inc.
Eric Bergman
B08 - CLEANING
Information
Patent Application
Systems and methods for processing workpieces
Publication number
20030010362
Publication date
Jan 16, 2003
Semitool, Inc.
Dana Scranton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Process and apparatus for treating a workpiece such as a semiconduc...
Publication number
20020157686
Publication date
Oct 31, 2002
Semitool, Inc.
Michael Kenny
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vertical process reactor
Publication number
20020139400
Publication date
Oct 3, 2002
Semitool, Inc.
Dana Scranton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Single semiconductor wafer processor
Publication number
20010020482
Publication date
Sep 13, 2001
Semitool, Inc.
Dana Scranton
H01 - BASIC ELECTRIC ELEMENTS