Daniel Boatright

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Estacada, OR, US

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Patents Grantslast 30 patents

Information Patent Grant
Etching metal-oxide and protecting chamber components
- Patent number 11,717,866
- Issue date Aug 8, 2023
- Lam Research Corporation
- Akhil N. Singhal
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
DRY PROCESS TOOL WITH ADJUSTABLE FLOW VALVE
- Publication number 20250003069
- Publication date Jan 2, 2025
- LAM RESEARCH CORPORATION
- Jon Garret JUDGE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING METAL-OXIDE AND PROTECTING CHAMBER COMPONENTS
- Publication number 20220258216
- Publication date Aug 18, 2022
- LAM RESEARCH CORPORATION
- Akhil N. Singhal
- B08 - CLEANING
Information Patent Application
ETCHING METAL-OXIDE AND PROTECTING CHAMBER COMPONENTS
- Publication number 20210308726
- Publication date Oct 7, 2021
- LAM RESEARCH CORPORATION
- Akhil N. Singhal
- B08 - CLEANING