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Daniel Byun
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Newark, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Ring for an anti-rotation process kit for a substrate processing ch...
Patent number
D1049067
Issue date
Oct 29, 2024
Applied Materials, Inc.
Rohan Vijay Rane
D13 - Equipment for production, distribution, or transformation of energy
Information
Patent Grant
Sensors and system for in-situ edge ring erosion monitor
Patent number
12,009,236
Issue date
Jun 11, 2024
Applied Materials, Inc.
Yaoling Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sheath and temperature control of process kit
Patent number
11,894,255
Issue date
Feb 6, 2024
Applied Materials, Inc.
Jaeyong Cho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing using pulsed-voltage and radio-frequency power
Patent number
11,848,176
Issue date
Dec 19, 2023
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing assembly using pulsed-voltage and radio-frequency...
Patent number
11,776,789
Issue date
Oct 3, 2023
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Adjustable thermal break in a substrate support
Patent number
11,764,041
Issue date
Sep 19, 2023
Applied Materials, Inc.
Alvaro Garcia De Gorordo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing assembly using pulsed-voltage and radio-frequency...
Patent number
11,462,388
Issue date
Oct 4, 2022
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pulsed-voltage hardware assembly for use in a plasma processing system
Patent number
11,462,389
Issue date
Oct 4, 2022
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma resistant coating of porous body by atomic layer deposition
Patent number
10,975,469
Issue date
Apr 13, 2021
Applied Materials, Inc.
Vahid Firouzdor
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma resistant coating of porous body by atomic layer deposition
Patent number
10,745,805
Issue date
Aug 18, 2020
Applied Materials, Inc.
Vahid Firouzdor
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and arrangement for plasma dechuck optimization based on co...
Patent number
8,797,705
Issue date
Aug 5, 2014
Lam Research Corporation
John C. Valcore
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
MULTI-SHAPE VOLTAGE PULSE TRAINS FOR UNIFORMITY AND ETCH PROFILE TU...
Publication number
20240153741
Publication date
May 9, 2024
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK ASSEMBLY
Publication number
20240145220
Publication date
May 2, 2024
Applied Materials, Inc.
Jaeyong CHO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING ASSEMBLY USING PULSED-VOLTAGE AND RADIO-FREQUENCY...
Publication number
20240030002
Publication date
Jan 25, 2024
Applied Materials, Inc.
Leonid DORF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING ASSEMBLY USING PULSED-VOLTAGE AND RADIO-FREQUENCY...
Publication number
20230030927
Publication date
Feb 2, 2023
Applied Materials, Inc.
Leonid DORF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PULSED-VOLTAGE HARDWARE ASSEMBLY FOR USE IN A PLASMA PROCESSING SYSTEM
Publication number
20220037120
Publication date
Feb 3, 2022
Applied Materials, Inc.
Leonid DORF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING ASSEMBLY USING PULSED-VOLTAGE AND RADIO-FREQUENCY...
Publication number
20220037119
Publication date
Feb 3, 2022
Applied Materials, Inc.
Leonid DORF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING USING PULSED-VOLTAGE AND RADIO-FREQUENCY POWER
Publication number
20220037121
Publication date
Feb 3, 2022
Applied Materials, Inc.
Leonid DORF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RF FREQUENCY CONTROL AND GROUND PATH RETURN IN SEMICONDUCTOR PROCES...
Publication number
20210391146
Publication date
Dec 16, 2021
Applied Materials, Inc.
Timothy Joseph FRANKLIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR TUNING SEMICONDUCTOR PROCESSES
Publication number
20210287881
Publication date
Sep 16, 2021
Applied Materials, Inc.
Timothy Joseph FRANKLIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR CONDUCTANCE LINERS IN SEMICONDUCTOR PROCE...
Publication number
20210285101
Publication date
Sep 16, 2021
Applied Materials, Inc.
TIMOTHY JOSEPH FRANKLIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SHEATH AND TEMPERATURE CONTROL OF PROCESS KIT
Publication number
20210035844
Publication date
Feb 4, 2021
Applied Materials, Inc.
Jaeyong CHO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ADJUSTABLE THERMAL BREAK IN A SUBSTRATE SUPPORT
Publication number
20200395197
Publication date
Dec 17, 2020
Applied Materials, Inc.
Alvaro GARCIA DE GORORDO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SENSORS AND SYSTEM FOR IN-SITU EDGE RING EROSION MONITOR
Publication number
20200335368
Publication date
Oct 22, 2020
Applied Materials, Inc.
Yaoling PAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EROSION RESISTANT ATOMIC LAYER DEPOSITION COATINGS
Publication number
20180337026
Publication date
Nov 22, 2018
Applied Materials, Inc.
Vahid Firouzdor
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA RESISTANT COATING OF POROUS BODY BY ATOMIC LAYER DEPOSITION
Publication number
20180265973
Publication date
Sep 20, 2018
Applied Materials, Inc.
Vahid Firouzdor
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA RESISTANT COATING OF POROUS BODY BY ATOMIC LAYER DEPOSITION
Publication number
20180265972
Publication date
Sep 20, 2018
Applied Materials, Inc.
Vahid Firouzdor
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND ARRANGEMENT FOR PLASMA DECHUCK OPTIMIZATION BASED ON CO...
Publication number
20110058302
Publication date
Mar 10, 2011
John C. Valcore, JR.
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIGHT-UP PREVENTION IN ELECTROSTATIC CHUCKS
Publication number
20110024049
Publication date
Feb 3, 2011
LAM RESEARCH CORPORATION
Tom Stevenson
H01 - BASIC ELECTRIC ELEMENTS