Daniel Claire Baker

Person

Milpitas, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Photoresist dispense arrangement by compensation for substrate refl...
- Patent number 6,818,064
- Issue date Nov 16, 2004
- Koninklijke Philips Electronics N.V.
- Daniel C. Baker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of illumination uniformity in photolithographic systems
- Patent number 6,433,854
- Issue date Aug 13, 2002
- Koninklijke Philips Electronics N.V.
- Daniel C. Baker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Modified optics for imaging of lens limited subresolution features
- Patent number 6,411,367
- Issue date Jun 25, 2002
- VLSI Technology, Inc.
- Daniel C. Baker
- G02 - OPTICS
Information Patent Grant
Photoresist dispense method by compensation for substrate reflectivity
- Patent number 6,319,735
- Issue date Nov 20, 2001
- Philips Semiconductor, Inc.
- Daniel C. Baker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for detecting edges under an opaque layer
- Patent number 6,313,542
- Issue date Nov 6, 2001
- VLSI Technology, Inc.
- Dipankar Pramanik
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor wafer, a chemical-mechanical alignment mark, and an a...
- Patent number 6,274,940
- Issue date Aug 14, 2001
- VLSI Technology, Inc.
- Daniel Claire Baker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for the improvement of illumination uniformity...
- Patent number 6,262,795
- Issue date Jul 17, 2001
- Philip Semiconductors, Inc.
- Daniel C. Baker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for substantially preventing footings in chemically amplifie...
- Patent number 6,162,586
- Issue date Dec 19, 2000
- Philips Electronics North America Corp.
- Samit S. Sengupta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for alignment using multiple wavelengths of light
- Patent number 5,952,135
- Issue date Sep 14, 1999
- VLSI Technology
- Kouros Ghandehari
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for improving alignment for metal masking in c...
- Patent number 5,952,241
- Issue date Sep 14, 1999
- VLSI Technology, Inc.
- Daniel Claire Baker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for detecting edges under an opaque layer
- Patent number 5,852,497
- Issue date Dec 22, 1998
- VLSI Technology, Inc.
- Dipankar Pramanik
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Photoresist dispense arrangement by compensation for substrate refl...
- Publication number 20020029744
- Publication date Mar 14, 2002
- VLSI Technology, Inc. (Koninklijke Philips Electronics N.V.).
- Daniel C. Baker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of illumination uniformity in photolithographic systems
- Publication number 20010026360
- Publication date Oct 4, 2001
- Philips Semiconductors, Inc.
- Daniel C. Baker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus for improving alignment for metal masking
- Publication number 20010012674
- Publication date Aug 9, 2001
- Daniel Claire Baker
- H01 - BASIC ELECTRIC ELEMENTS

Daniel Claire Baker

Person

Patents Grantslast 30 patents

Photoresist dispense arrangement by compensation for substrate refl...

Method of illumination uniformity in photolithographic systems

Modified optics for imaging of lens limited subresolution features

Photoresist dispense method by compensation for substrate reflectivity

Method and apparatus for detecting edges under an opaque layer

Semiconductor wafer, a chemical-mechanical alignment mark, and an a...

Apparatus and method for the improvement of illumination uniformity...

Method for substantially preventing footings in chemically amplifie...

Method for alignment using multiple wavelengths of light

Method and apparatus for improving alignment for metal masking in c...

Method and apparatus for detecting edges under an opaque layer

Patents Applicationslast 30 patents

Photoresist dispense arrangement by compensation for substrate refl...

Method of illumination uniformity in photolithographic systems

Apparatus for improving alignment for metal masking