Daniel Goodman

Person

Brookline, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Batch processing system with vacuum isolation
- Patent number 11,174,544
- Issue date Nov 16, 2021
- ASM NEXX, INC.
- Arthur Keigler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Workpiece loader for a wet processing system
- Patent number 10,074,554
- Issue date Sep 11, 2018
- Tel Nexx, Inc.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Electrochemical deposition apparatus and methods for controlling th...
- Patent number 9,988,735
- Issue date Jun 5, 2018
- Tel Nexx, Inc.
- Demetrius Papapanayiotou
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Seed layer deposition in microscale features
- Patent number 9,714,474
- Issue date Jul 25, 2017
- Tel Nexx, Inc.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Electrochemical deposition apparatus and methods for controlling th...
- Patent number 9,637,836
- Issue date May 2, 2017
- Tel Nexx, Inc.
- Demetrius Papapanayiotou
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Parallel single substrate marangoni module
- Patent number 9,508,582
- Issue date Nov 29, 2016
- Tel Nexx, Inc.
- Arthur Keigler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Parallel single substrate processing system
- Patent number 9,449,862
- Issue date Sep 20, 2016
- Tel Nexx, Inc.
- Arthur Keigler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holder
- Patent number 9,421,617
- Issue date Aug 23, 2016
- Tel Nexx, Inc.
- Daniel Goodman
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Parallel single substrate processing system
- Patent number 9,293,356
- Issue date Mar 22, 2016
- Tel Nexx, Inc.
- Arthur Keigler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing pallet with cooling
- Patent number 9,147,588
- Issue date Sep 29, 2015
- Tel Nexx, Inc.
- Daniel Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate loader and unloader having an air bearing support
- Patent number 9,117,856
- Issue date Aug 25, 2015
- Tel Nexx, Inc.
- Daniel Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate loader and unloader
- Patent number 8,967,935
- Issue date Mar 3, 2015
- Tel Nexx, Inc.
- Daniel Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge bevel removal apparatus and method
- Patent number 8,858,755
- Issue date Oct 14, 2014
- Tel Nexx, Inc.
- Daniel Goodman
- B44 - DECORATIVE ARTS
Information Patent Grant
Radio frequency power delivery system
- Patent number 8,633,782
- Issue date Jan 21, 2014
- MKS Instruments, Inc.
- Siddharth P. Nagarkatti
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Substrate loader and unloader having a Bernoulli support
- Patent number 8,613,474
- Issue date Dec 24, 2013
- Tel Nexx, Inc.
- Daniel Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for thermal processing with micro-environment
- Patent number 8,420,981
- Issue date Apr 16, 2013
- Tel Nexx, Inc.
- Daniel Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Radio frequency power delivery system
- Patent number 7,764,140
- Issue date Jul 27, 2010
- MKS Instruments, Inc.
- Siddharth P. Nagarkatti
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Methods and apparatus for calibration and metrology for an integrat...
- Patent number 7,122,965
- Issue date Oct 17, 2006
- MKS Instruments, Inc.
- Daniel Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF power supply with integrated matching network
- Patent number 6,887,339
- Issue date May 3, 2005
- Applied Science and Technology, Inc.
- Daniel Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for calibration and metrology for an integrat...
- Patent number 6,781,317
- Issue date Aug 24, 2004
- Applied Science and Technology, Inc.
- Daniel Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for selective electron beam irradiation
- Patent number 6,110,318
- Issue date Aug 29, 2000
- Science Research Laboratory
- Daniel L. Goodman
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Phase-separated dual-cure elastomeric adhesive formulations and met...
- Patent number 5,997,682
- Issue date Dec 7, 1999
- Science Research Laboratory
- Daniel L. Goodman
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Method of making fiber reinforced composites and coatings
- Patent number 5,891,292
- Issue date Apr 6, 1999
- Science Research Laboratory, Inc.
- Daniel L. Goodman
- B32 - LAYERED PRODUCTS
Information Patent Grant
System for extracting a high power beam comprising air dynamic and...
- Patent number 5,659,223
- Issue date Aug 19, 1997
- Science Research Laboratory, Inc.
- Daniel Goodman
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ADAPTIVE FOCUSING AND TRANSPORT SYSTEM FOR ELECTROPLATING
- Publication number 20220148891
- Publication date May 12, 2022
- ASM NEXX, INC.
- Arthur KEIGLER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BATCH PROCESSING SYSTEM WITH VACUUM ISOLATION
- Publication number 20200087774
- Publication date Mar 19, 2020
- ASM NEXX, INC.
- Arthur KEIGLER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CERAMIC LINER WITH INTEGRATED FARADAY SHIELDING
- Publication number 20190341230
- Publication date Nov 7, 2019
- ASM NEXX, INC.
- Daniel GOODMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORKPIECE LOADER FOR A WET PROCESSING SYSTEM
- Publication number 20170372938
- Publication date Dec 28, 2017
- TEL NEXX, Inc.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD AND APPARATUS FOR FORMING EMI SHIELDING LAYERS ON SEMICONDUC...
- Publication number 20160365317
- Publication date Dec 15, 2016
- TEL NEXX, Inc.
- Arthur Keigler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR REMOVAL OF PHOTORESIST USING IMPROVED CHEM...
- Publication number 20150047674
- Publication date Feb 19, 2015
- TEL NEXX, Inc.
- Daniel L. Goodman
- B08 - CLEANING
Information Patent Application
ELECTROCHEMICAL DEPOSITION APPARATUS AND METHODS FOR CONTROLLING TH...
- Publication number 20150008133
- Publication date Jan 8, 2015
- TEL NEXX, Inc.
- Demetrius Papapanayiotou
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ELECTROCHEMICAL DEPOSITION APPARATUS AND METHODS FOR CONTROLLING TH...
- Publication number 20150008134
- Publication date Jan 8, 2015
- TEL NEXX, Inc.
- Demetrius Papapanayiotou
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ELECTROCHEMICAL DEPOSITION APPARATUS AND METHODS FOR CONTROLLING TH...
- Publication number 20150008119
- Publication date Jan 8, 2015
- TEL NEXX, Inc.
- Demetrius Papapanayiotou
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
EDGE BEVEL REMOVAL APPARATUS AND METHOD
- Publication number 20130048610
- Publication date Feb 28, 2013
- TEL NEXX, Inc.
- Daniel GOODMAN
- B44 - DECORATIVE ARTS
Information Patent Application
SUBSTRATE LOADER AND UNLOADER HAVING AN AIR BEARING SUPPORT
- Publication number 20130009415
- Publication date Jan 10, 2013
- Nexx Systems, Inc.
- Daniel Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LOADER AND UNLOADER
- Publication number 20130011222
- Publication date Jan 10, 2013
- Nexx Systems, Inc.
- Daniel Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LOADER AND UNLOADER HAVING A BERNOULLI SUPPORT
- Publication number 20130011225
- Publication date Jan 10, 2013
- NEXX System, Inc.
- Daniel Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDER
- Publication number 20120325275
- Publication date Dec 27, 2012
- Nexx Systems, Inc.
- Daniel Goodman
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PARALLEL SINGLE SUBSTRATE PROCESSING SYSTEM
- Publication number 20120306137
- Publication date Dec 6, 2012
- Arthur Keigler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARALLEL SINGLE SUBSTRATE PROCESSING FLUID JET MODULE
- Publication number 20120305192
- Publication date Dec 6, 2012
- ARTHUR KEIGLER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARALLEL SINGLE SUBSTRATE MARANGONI MODULE
- Publication number 20120305033
- Publication date Dec 6, 2012
- Arthur Keigler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARALLEL SINGLE SUBSTRATE PROCESSING SYSTEM
- Publication number 20120308345
- Publication date Dec 6, 2012
- ARTHUR KEIGLER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARALLEL SINGLE SUBSTRATE PROCESSING AGITATION MODULE
- Publication number 20120305193
- Publication date Dec 6, 2012
- ARTHUR KEIGLER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEED LAYER DEPOSITION IN MICROSCALE FEATURES
- Publication number 20120152752
- Publication date Jun 21, 2012
- Nexx Systems, Inc.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SEED LAYER DEPOSITION IN MICROSCALE FEATURES
- Publication number 20110240481
- Publication date Oct 6, 2011
- Nexx Systems, Inc.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Apparatus for thermal processing with micro-environment
- Publication number 20110114623
- Publication date May 19, 2011
- Nexx Systems, Inc.
- Daniel Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING PALLET WITH COOLING
- Publication number 20110024964
- Publication date Feb 3, 2011
- Nexx Systems, Inc.
- Daniel Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Radio Frequency Power Delivery System
- Publication number 20100231296
- Publication date Sep 16, 2010
- MKS Instruments, Inc.
- Siddharth P. Nagarkatti
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Substrate processing pallet with cooling
- Publication number 20080220622
- Publication date Sep 11, 2008
- Daniel Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Radio Frequency Power Delivery System
- Publication number 20070139122
- Publication date Jun 21, 2007
- MKS Instruments, Inc.
- Siddharth P. Nagarkatti
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Stabilization of electronegative plasmas with feedback control of R...
- Publication number 20050103439
- Publication date May 19, 2005
- Applied Science & Technology, Inc.
- Daniel Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and apparatus for calibration and metrology for an integrat...
- Publication number 20050057165
- Publication date Mar 17, 2005
- Applied Science & Technology, Inc.
- Daniel Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Stabilization of electronegative plasmas with feedback control of R...
- Publication number 20030213559
- Publication date Nov 20, 2003
- Applied Science & Technology, Inc.
- Daniel Goodman
- H01 - BASIC ELECTRIC ELEMENTS

Daniel Goodman

Person

Patents Grantslast 30 patents

Batch processing system with vacuum isolation

Workpiece loader for a wet processing system

Electrochemical deposition apparatus and methods for controlling th...

Seed layer deposition in microscale features

Electrochemical deposition apparatus and methods for controlling th...

Parallel single substrate marangoni module

Parallel single substrate processing system

Substrate holder

Parallel single substrate processing system

Substrate processing pallet with cooling

Substrate loader and unloader having an air bearing support

Substrate loader and unloader

Edge bevel removal apparatus and method

Radio frequency power delivery system

Substrate loader and unloader having a Bernoulli support

Apparatus for thermal processing with micro-environment

Radio frequency power delivery system

Methods and apparatus for calibration and metrology for an integrat...

RF power supply with integrated matching network

Methods and apparatus for calibration and metrology for an integrat...

System for selective electron beam irradiation

Phase-separated dual-cure elastomeric adhesive formulations and met...

Method of making fiber reinforced composites and coatings

System for extracting a high power beam comprising air dynamic and...

Patents Applicationslast 30 patents

ADAPTIVE FOCUSING AND TRANSPORT SYSTEM FOR ELECTROPLATING

BATCH PROCESSING SYSTEM WITH VACUUM ISOLATION

CERAMIC LINER WITH INTEGRATED FARADAY SHIELDING

WORKPIECE LOADER FOR A WET PROCESSING SYSTEM

METHOD AND APPARATUS FOR FORMING EMI SHIELDING LAYERS ON SEMICONDUC...

METHOD AND APPARATUS FOR REMOVAL OF PHOTORESIST USING IMPROVED CHEM...

ELECTROCHEMICAL DEPOSITION APPARATUS AND METHODS FOR CONTROLLING TH...

ELECTROCHEMICAL DEPOSITION APPARATUS AND METHODS FOR CONTROLLING TH...

ELECTROCHEMICAL DEPOSITION APPARATUS AND METHODS FOR CONTROLLING TH...

EDGE BEVEL REMOVAL APPARATUS AND METHOD

SUBSTRATE LOADER AND UNLOADER HAVING AN AIR BEARING SUPPORT

SUBSTRATE LOADER AND UNLOADER

SUBSTRATE LOADER AND UNLOADER HAVING A BERNOULLI SUPPORT

SUBSTRATE HOLDER

PARALLEL SINGLE SUBSTRATE PROCESSING SYSTEM

PARALLEL SINGLE SUBSTRATE PROCESSING FLUID JET MODULE

PARALLEL SINGLE SUBSTRATE MARANGONI MODULE

PARALLEL SINGLE SUBSTRATE PROCESSING SYSTEM

PARALLEL SINGLE SUBSTRATE PROCESSING AGITATION MODULE

SEED LAYER DEPOSITION IN MICROSCALE FEATURES

SEED LAYER DEPOSITION IN MICROSCALE FEATURES

Apparatus for thermal processing with micro-environment

SUBSTRATE PROCESSING PALLET WITH COOLING

Radio Frequency Power Delivery System

Substrate processing pallet with cooling

Radio Frequency Power Delivery System

Stabilization of electronegative plasmas with feedback control of R...

Methods and apparatus for calibration and metrology for an integrat...

Stabilization of electronegative plasmas with feedback control of R...