Daniel John Rader

Person

Albuquerque, NM, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for use with extreme ultraviolet light having...
- Patent number 9,389,180
- Issue date Jul 12, 2016
- KLA-Tencor Corporation
- Francis C. Chilese
- G01 - MEASURING TESTING
Information Patent Grant
Particle control near reticle and optics using showerhead
- Patent number 9,244,368
- Issue date Jan 26, 2016
- KLA-Tencor Corporation
- Gildardo R. Delgado
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Adhesive particle shielding
- Patent number 7,473,301
- Issue date Jan 6, 2009
- EUV LLC
- Leonard Elliott Klebanoff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for debris mitigation for an electrical discha...
- Patent number 6,989,629
- Issue date Jan 24, 2006
- EUV LLC
- Leonard E. Klebanoff
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for debris mitigation for an electrical discha...
- Patent number 6,888,297
- Issue date May 3, 2005
- EUV LLC
- Leonard E. Klebanoff
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus to collect, classify, concentrate, and characterize gas-b...
- Patent number 6,664,550
- Issue date Dec 16, 2003
- Sandia National Laboratories
- Daniel J. Rader
- G01 - MEASURING TESTING
Information Patent Grant
Removable pellicle for lithographic mask protection and handling
- Patent number 6,492,067
- Issue date Dec 10, 2002
- EUV LLC
- Leonard E. Klebanoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus to collect, classify, concentrate, and characterize gas-b...
- Patent number 6,386,015
- Issue date May 14, 2002
- Sandia Corporation
- Daniel J. Rader
- G01 - MEASURING TESTING
Information Patent Grant
Method for protection of lithographic components from particle cont...
- Patent number 6,253,464
- Issue date Jul 3, 2001
- EUV LLC
- Leonard E. Klebanoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Thermophoretic vacuum wand
- Patent number 6,232,578
- Issue date May 15, 2001
- BUV LLC
- Leonard Elliott Klebanoff
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Opposed-flow virtual cyclone for particle concentration
- Patent number 6,156,212
- Issue date Dec 5, 2000
- Sandia Corporation
- Daniel J. Rader
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Protection of lithographic components from particle contamination
- Patent number 6,153,044
- Issue date Nov 28, 2000
- EUV LLC
- Leonard E. Klebanoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reduction of particle deposition on substrates using temperature gr...
- Patent number 6,110,844
- Issue date Aug 29, 2000
- Sandia Corporation
- Daniel J. Rader
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermophoretic vacuum wand
- Patent number 6,072,157
- Issue date Jun 6, 2000
- EUV LLC
- Leonard Elliott Klebanoff
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Apparatus for measuring particle properties
- Patent number 5,793,478
- Issue date Aug 11, 1998
- Sandia Corporation
- Daniel J. Rader
- G01 - MEASURING TESTING
Information Patent Grant
Particle dispersing system and method for testing semiconductor man...
- Patent number 5,777,245
- Issue date Jul 7, 1998
- Applied Materials, Inc.
- Madhavi Chandrachood
- G01 - MEASURING TESTING
Information Patent Grant
Particle-free microchip processing
- Patent number 5,522,933
- Issue date Jun 4, 1996
- Anthony S. Geller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND APPARATUS FOR USE WITH EXTREME ULTRAVIOLET LIGHT HAVING...
- Publication number 20140231659
- Publication date Aug 21, 2014
- Frank Chilese
- G01 - MEASURING TESTING
Information Patent Application
PARTICLE CONTROL NEAR RETICLE AND OPTICS USING SHOWERHEAD
- Publication number 20140085618
- Publication date Mar 27, 2014
- Gildardo R. Delgado
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for debris mitigation for an electrical discha...
- Publication number 20040119394
- Publication date Jun 24, 2004
- Leonard E. Klebanoff
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Adhesive particle shielding
- Publication number 20040050317
- Publication date Mar 18, 2004
- Leonard Elliott Klebanoff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus to collect, classify, concentrate, and characterize gas-b...
- Publication number 20030052281
- Publication date Mar 20, 2003
- Daniel J. Rader
- G01 - MEASURING TESTING

Daniel John Rader

Person

Patents Grantslast 30 patents

Methods and apparatus for use with extreme ultraviolet light having...

Particle control near reticle and optics using showerhead

Adhesive particle shielding

Method and apparatus for debris mitigation for an electrical discha...

Method and apparatus for debris mitigation for an electrical discha...

Apparatus to collect, classify, concentrate, and characterize gas-b...

Removable pellicle for lithographic mask protection and handling

Apparatus to collect, classify, concentrate, and characterize gas-b...

Method for protection of lithographic components from particle cont...

Thermophoretic vacuum wand

Opposed-flow virtual cyclone for particle concentration

Protection of lithographic components from particle contamination

Reduction of particle deposition on substrates using temperature gr...

Thermophoretic vacuum wand

Apparatus for measuring particle properties

Particle dispersing system and method for testing semiconductor man...

Particle-free microchip processing

Patents Applicationslast 30 patents

METHODS AND APPARATUS FOR USE WITH EXTREME ULTRAVIOLET LIGHT HAVING...

PARTICLE CONTROL NEAR RETICLE AND OPTICS USING SHOWERHEAD

Method and apparatus for debris mitigation for an electrical discha...

Adhesive particle shielding

Apparatus to collect, classify, concentrate, and characterize gas-b...