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Photoresists for visible light imaging
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Patent number 7,807,340
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Issue date Oct 5, 2010
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International Business Machines Corporation
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Gregory Breyta
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Photoresists for visible light imaging
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Patent number 7,354,692
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Issue date Apr 8, 2008
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International Business Machines Corporation
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Gregory Breyta
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Antireflective polymer and method of use
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Patent number 6,251,562
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Issue date Jun 26, 2001
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International Business Machines Corporation
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Gregory Breyta
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C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
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Process for making polyamic esters
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Patent number 5,420,232
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Issue date May 30, 1995
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International Business Machines Corporation
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Daniel J. Dawson
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C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
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Spin on oxygen reactive ion etch barrier
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Patent number 5,270,151
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Issue date Dec 14, 1993
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International Business Machines Corporation
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Peter A. Agostino
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Preparing N-vinylformamide
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Patent number 4,578,515
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Issue date Mar 25, 1986
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Air Products and Chemicals, Inc.
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Daniel J. Dawson
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C07 - ORGANIC CHEMISTRY
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