Daniel L. Birx late of

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Potomac, MD, US

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Patents Grantslast 30 patents

Information Patent Grant
Plasma focus light source with active and buffer gas control
- Patent number 6,586,757
- Issue date Jul 1, 2003
- Cymer, Inc.
- Stephan T. Melnychuk
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR