Daniel R. Trojan

Person

Phoenix, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Temperature controlled substrate carrier and polishing components
- Patent number 12,217,979
- Issue date Feb 4, 2025
- Axus Technology, LLC
- Daniel Ray Trojan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atmospheric plasma in wafer processing system optimization
- Patent number 12,198,935
- Issue date Jan 14, 2025
- Axus Technology, LLC
- Daniel Ray Trojan
- B24 - GRINDING POLISHING
Information Patent Grant
Containment and exhaust system for substrate polishing components
- Patent number 12,145,236
- Issue date Nov 19, 2024
- Axus Technology, LLC
- Daniel Ray Trojan
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate carrier head and processing system
- Patent number 12,023,778
- Issue date Jul 2, 2024
- Axus Technology, LLC
- Daniel Ray Trojan
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for insitu adjustment of wafer slip detection...
- Patent number 11,904,431
- Issue date Feb 20, 2024
- Axus Technology, LLC
- Daniel Ray Trojan
- B24 - GRINDING POLISHING
Information Patent Grant
Planarized membrane and methods for substrate processing systems
- Patent number 11,685,012
- Issue date Jun 27, 2023
- Axus Technology, LLC
- Daniel Ray Trojan
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical planarization carrier system
- Patent number 11,376,705
- Issue date Jul 5, 2022
- AXUS TECHNOLOGY LLC
- Daniel R. Trojan
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical planarization carrier system
- Patent number 10,315,286
- Issue date Jun 11, 2019
- AXUS TECHNOLOGI, LLC
- Daniel R. Trojan
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for wafer backgrinding and edge trimming on on...
- Patent number 9,390,903
- Issue date Jul 12, 2016
- Axus Technology, LLC
- Daniel R. Trojan
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus and method for surface grinding and edge trimming workpieces
- Patent number 8,944,887
- Issue date Feb 3, 2015
- Axus Technology, LLC
- Daniel R. Trojan
- B24 - GRINDING POLISHING
Information Patent Grant
System for adjusting an end effector relative to a workpiece
- Patent number 7,540,799
- Issue date Jun 2, 2009
- Daniel R. Trojan
- B24 - GRINDING POLISHING
Information Patent Grant
Multizone carrier with process monitoring system for chemical-mecha...
- Patent number 6,923,711
- Issue date Aug 2, 2005
- SpeedFam-IPEC Corporation
- Thomas Laursen
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer cleaning apparatus and associated wafer processing methods
- Patent number 6,368,183
- Issue date Apr 9, 2002
- SpeedFam-IPEC Corporation
- Daniel Trojan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Post-CMP wet-HF cleaning station
- Patent number 6,125,861
- Issue date Oct 3, 2000
- SpeedFam-IPEC Corporation
- Anand Gupta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adjustable low profile gimbal system for chemical mechanical polishing
- Patent number 6,116,990
- Issue date Sep 12, 2000
- Applied Materials, Inc.
- James Sinclair
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical polishing apparatus and method
- Patent number 6,045,716
- Issue date Apr 4, 2000
- Strasbaugh
- Thomas Walsh
- B24 - GRINDING POLISHING
Information Patent Grant
Low profile, low hysteresis force feedback gimbal system for chemic...
- Patent number 5,899,798
- Issue date May 4, 1999
- Obsidian Inc.
- Daniel R. Trojan
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
CONTAINMENT AND EXHAUST SYSTEM FOR SUBSTRATE POLISHING COMPONENTS
- Publication number 20250065473
- Publication date Feb 27, 2025
- AXUS TECHNOLOGY, LLC
- Daniel Ray Trojan
- B24 - GRINDING POLISHING
Information Patent Application
METHOD AND APPARATUS FOR INSITU ADJUSTMENT OF WAFER SLIP DETECTION...
- Publication number 20240399535
- Publication date Dec 5, 2024
- AXUS TECHNOLOGY, LLC
- Daniel Ray Trojan
- B24 - GRINDING POLISHING
Information Patent Application
PLANARIZED MEMBRANE AND METHODS FOR SUBSTRATE PROCESSING SYSTEMS
- Publication number 20240227116
- Publication date Jul 11, 2024
- AXUS TECHNOLOGY, LLC
- Daniel Ray Trojan
- B24 - GRINDING POLISHING
Information Patent Application
PLANARIZED MEMBRANE AND METHODS FOR SUBSTRATE PROCESSING SYSTEMS
- Publication number 20240131652
- Publication date Apr 25, 2024
- AXUS TECHNOLOGY, LLC
- Daniel Ray Trojan
- B24 - GRINDING POLISHING
Information Patent Application
METHOD AND APPARATUS FOR IN-SITU MONITORING OF CHEMICAL MECHANICAL...
- Publication number 20220395956
- Publication date Dec 15, 2022
- AXUS TECHNOLOGY, LLC
- Daniel Ray Trojan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTAINMENT AND EXHAUST SYSTEM FOR SUBSTRATE POLISHING COMPONENTS
- Publication number 20220305618
- Publication date Sep 29, 2022
- AXUS TECHNOLOGY, LLC
- Daniel Ray Trojan
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE CARRIER HEAD AND PROCESSING SYSTEM
- Publication number 20220126419
- Publication date Apr 28, 2022
- AXUS TECHNOLOGY, LLC
- Daniel Ray Trojan
- B24 - GRINDING POLISHING
Information Patent Application
CMP MACHINE WITH IMPROVED THROUGHPUT AND PROCESS FLEXIBILITY
- Publication number 20220088744
- Publication date Mar 24, 2022
- AXUS TECHNOLOGY, LLC
- Daniel Ray Trojan
- B24 - GRINDING POLISHING
Information Patent Application
PLANARIZED MEMBRANE AND METHODS FOR SUBSTRATE PROCESSING SYSTEMS
- Publication number 20210178548
- Publication date Jun 17, 2021
- AXUS TECHNOLOGY, LLC
- Daniel Ray Trojan
- B24 - GRINDING POLISHING
Information Patent Application
METHOD AND APPARATUS FOR INSITU ADJUSTMENT OF WAFER SLIP DETECTION...
- Publication number 20210031331
- Publication date Feb 4, 2021
- AXUS TECHNOLOGY, LLC
- Daniel Ray Trojan
- B24 - GRINDING POLISHING
Information Patent Application
TEMPERATURE CONTROLLED SUBSTRATE CARRIER AND POLISHING COMPONENTS
- Publication number 20210005479
- Publication date Jan 7, 2021
- AXUS TECHNOLOGY, LLC
- Daniel Ray Trojan
- B24 - GRINDING POLISHING
Information Patent Application
ATMOSPHERIC PLASMA IN WAFER PROCESSING SYSTEM OPTIMIZATION
- Publication number 20200381262
- Publication date Dec 3, 2020
- AXUS TECHNOLOGY, LLC
- Daniel Ray Trojan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL MECHANICAL PLANARIZATION CARRIER SYSTEM
- Publication number 20190291237
- Publication date Sep 26, 2019
- AXUS TECHNOLOGY, LLC
- Daniel R. Trojan
- B24 - GRINDING POLISHING
Information Patent Application
CMP MACHINE WITH IMPROVED THROUGHPUT AND PROCESS FLEXIBILITY
- Publication number 20180311784
- Publication date Nov 1, 2018
- AXUS TECHNOLOGY, LLC
- Daniel Ray Trojan
- B24 - GRINDING POLISHING
Information Patent Application
CHEMICAL MECHANICAL PLANARIZATION CARRIER SYSTEM
- Publication number 20170355062
- Publication date Dec 14, 2017
- AXUS TECHNOLOGY, LLC
- Daniel R. Trojan
- B24 - GRINDING POLISHING
Information Patent Application
METHOD AND APPARATUS FOR WAFER BACKGRINDING AND EDGE TRIMMING ON ON...
- Publication number 20140073223
- Publication date Mar 13, 2014
- AXUS TECHNOLOGY, LLC
- Daniel R. Trojan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR SURFACE GRINDING AND EDGE TRIMMING WORKPIECES
- Publication number 20120202406
- Publication date Aug 9, 2012
- AXUS TECHNOLOGY, LLC
- Daniel R. Trojan
- B24 - GRINDING POLISHING
Information Patent Application
Multizone carrier with process monitoring system for chemical-mecha...
- Publication number 20020098777
- Publication date Jul 25, 2002
- Thomas Laursen
- B24 - GRINDING POLISHING

Daniel R. Trojan

Person

Patents Grantslast 30 patents

Temperature controlled substrate carrier and polishing components

Atmospheric plasma in wafer processing system optimization

Containment and exhaust system for substrate polishing components

Substrate carrier head and processing system

Method and apparatus for insitu adjustment of wafer slip detection...

Planarized membrane and methods for substrate processing systems

Chemical mechanical planarization carrier system

Chemical mechanical planarization carrier system

Method and apparatus for wafer backgrinding and edge trimming on on...

Apparatus and method for surface grinding and edge trimming workpieces

System for adjusting an end effector relative to a workpiece

Multizone carrier with process monitoring system for chemical-mecha...

Wafer cleaning apparatus and associated wafer processing methods

Post-CMP wet-HF cleaning station

Adjustable low profile gimbal system for chemical mechanical polishing

Chemical mechanical polishing apparatus and method

Low profile, low hysteresis force feedback gimbal system for chemic...

Patents Applicationslast 30 patents

CONTAINMENT AND EXHAUST SYSTEM FOR SUBSTRATE POLISHING COMPONENTS

METHOD AND APPARATUS FOR INSITU ADJUSTMENT OF WAFER SLIP DETECTION...

PLANARIZED MEMBRANE AND METHODS FOR SUBSTRATE PROCESSING SYSTEMS

PLANARIZED MEMBRANE AND METHODS FOR SUBSTRATE PROCESSING SYSTEMS

METHOD AND APPARATUS FOR IN-SITU MONITORING OF CHEMICAL MECHANICAL...

CONTAINMENT AND EXHAUST SYSTEM FOR SUBSTRATE POLISHING COMPONENTS

SUBSTRATE CARRIER HEAD AND PROCESSING SYSTEM

CMP MACHINE WITH IMPROVED THROUGHPUT AND PROCESS FLEXIBILITY

PLANARIZED MEMBRANE AND METHODS FOR SUBSTRATE PROCESSING SYSTEMS

METHOD AND APPARATUS FOR INSITU ADJUSTMENT OF WAFER SLIP DETECTION...

TEMPERATURE CONTROLLED SUBSTRATE CARRIER AND POLISHING COMPONENTS

ATMOSPHERIC PLASMA IN WAFER PROCESSING SYSTEM OPTIMIZATION

CHEMICAL MECHANICAL PLANARIZATION CARRIER SYSTEM

CMP MACHINE WITH IMPROVED THROUGHPUT AND PROCESS FLEXIBILITY

CHEMICAL MECHANICAL PLANARIZATION CARRIER SYSTEM

METHOD AND APPARATUS FOR WAFER BACKGRINDING AND EDGE TRIMMING ON ON...

APPARATUS AND METHOD FOR SURFACE GRINDING AND EDGE TRIMMING WORKPIECES

Multizone carrier with process monitoring system for chemical-mecha...