Darrell Ehrlich

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Chuck for plasma processing chamber
- Patent number 12,131,890
- Issue date Oct 29, 2024
- Lam Research Corporation
- Ann Erickson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck with ceramic monolithic body
- Patent number 11,967,517
- Issue date Apr 23, 2024
- Lam Research Corporation
- Feng Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Replaceable and/or collapsible edge ring assemblies for plasma shea...
- Patent number 11,798,789
- Issue date Oct 24, 2023
- Lam Research Corporation
- Alejandro Sanchez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi zone gas injection upper electrode system
- Patent number 11,594,400
- Issue date Feb 28, 2023
- Lam Research Corporation
- Ryan Bise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holder having integrated temperature measurement electric...
- Patent number 10,978,323
- Issue date Apr 13, 2021
- Lam Research Corporation
- Eric Pape
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laminated heater with different heater trace materials
- Patent number 10,764,966
- Issue date Sep 1, 2020
- Lam Research Corporation
- Yuma Ohkura
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Connections between laminated heater and heater voltage inputs
- Patent number 10,667,379
- Issue date May 26, 2020
- Lam Research Corporation
- Yuma Ohkura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi zone gas injection upper electrode system
- Patent number 10,622,195
- Issue date Apr 14, 2020
- Lam Research Corporation
- Ryan Bise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compression member for use in showerhead electrode assembly
- Patent number 10,332,729
- Issue date Jun 25, 2019
- Lam Research Corporation
- Darrell Ehrlich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate holder having integrated temperature measurement electric...
- Patent number 10,186,437
- Issue date Jan 22, 2019
- Lam Research Corporation
- Eric Pape
- G01 - MEASURING TESTING
Information Patent Grant
Compression member for use in showerhead electrode assembly
- Patent number 9,922,804
- Issue date Mar 20, 2018
- Lam Research Corporation
- Darrell Ehrlich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compression member for use in showerhead electrode assembly
- Patent number 9,058,960
- Issue date Jun 16, 2015
- Lam Research Corporation
- Darrell Ehrlich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEA...
- Publication number 20240038504
- Publication date Feb 1, 2024
- LAM RESEARCH CORPORATION
- Alejandro SANCHEZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANODIZATION FOR METAL MATRIX COMPOSITE SEMICONDUCTOR PROCESSING CHA...
- Publication number 20230343627
- Publication date Oct 26, 2023
- LAM RESEARCH CORPORATION
- Debanjan DAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORTS WITH MULTILAYER STRUCTURE INCLUDING COUPLED HEAT...
- Publication number 20230274954
- Publication date Aug 31, 2023
- LAM RESEARCH CORPORATION
- Harmeet SINGH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COOLANT CHANNEL WITH INTERNAL FINS FOR SUBSTRATE PROCESSING PEDESTALS
- Publication number 20230087913
- Publication date Mar 23, 2023
- LAM RESEARCH CORPORATION
- Feng WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPONENT WITH PROTECTIVE SURFACE FOR PROCESSING CHAMBER
- Publication number 20230081544
- Publication date Mar 16, 2023
- LAM RESEARCH CORPORATION
- Pylin SAROBOL
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ELECTROSTATIC EDGE RING MOUNTING SYSTEM FOR SUBSTRATE PROCESSING
- Publication number 20230075462
- Publication date Mar 9, 2023
- LAM RESEARCH CORPORATION
- Alexander MATYUSHKIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MIXED METAL BASEPLATES FOR IMPROVED THERMAL EXPANSION MATCHING WITH...
- Publication number 20230039670
- Publication date Feb 9, 2023
- LAM RESEARCH CORPORATION
- Eric SAMULON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOVEABLE EDGE RINGS WITH REDUCED CAPACITANCE VARIATION FOR SUBSTRAT...
- Publication number 20220270863
- Publication date Aug 25, 2022
- LAM RESEARCH CORPORATION
- Christopher Kimball
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOVEABLE EDGE RINGS WITH REDUCED CAPACITANCE VARIATION FOR SUBSTRAT...
- Publication number 20220254612
- Publication date Aug 11, 2022
- LAM RESEARCH CORPORATION
- Christopher KIMBALL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEALANT COATING FOR PLASMA PROCESSING CHAMBER COMPONENTS
- Publication number 20220246404
- Publication date Aug 4, 2022
- LAM RESEARCH CORPORATION
- Benjamin Philip HEINE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH POWER ELECTROSTATIC CHUCK WITH FEATURES PREVENTING HE HOLE LIG...
- Publication number 20220223387
- Publication date Jul 14, 2022
- Alexander MATYUSHKIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK WITH CERAMIC MONOLITHIC BODY
- Publication number 20220148903
- Publication date May 12, 2022
- LAM RESEARCH CORPORATION
- Feng WANG
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
CHUCK FOR PLASMA PROCESSING CHAMBER
- Publication number 20220139681
- Publication date May 5, 2022
- LAM RESEARCH CORPORATION
- Ann ERICKSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEA...
- Publication number 20200395195
- Publication date Dec 17, 2020
- LAM RESEARCH CORPORATION
- Alejandro SANCHEZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI ZONE GAS INJECTION UPPER ELECTRODE SYSTEM
- Publication number 20200243307
- Publication date Jul 30, 2020
- LAM RESEARCH CORPORATION
- Ryan Bise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Corrosion-Resistant Temperature Sensor Probe
- Publication number 20190187003
- Publication date Jun 20, 2019
- LAM RESEARCH CORPORATION
- Justin Brunnett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Holder Having Integrated Temperature Measurement Electric...
- Publication number 20190148190
- Publication date May 16, 2019
- LAM RESEARCH CORPORATION
- Eric Pape
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPRESSION MEMBER FOR USE IN SHOWERHEAD ELECTRODE ASSEMBLY
- Publication number 20180174804
- Publication date Jun 21, 2018
- LAM RESEARCH CORPORATION
- Darrell Ehrlich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LAMINATED HEATER WITH DIFFERENT HEATER TRACE MATERIALS
- Publication number 20170332480
- Publication date Nov 16, 2017
- LAM RESEARCH CORPORATION
- Yuma Ohkura
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
CONNECTIONS BETWEEN LAMINATED HEATER AND HEATER VOLTAGE INPUTS
- Publication number 20170332481
- Publication date Nov 16, 2017
- LAM RESEARCH CORPORATION
- Yuma Ohkura
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Substrate Holder Having Integrated Temperature Measurement Electric...
- Publication number 20170098564
- Publication date Apr 6, 2017
- LAM RESEARCH CORPORATION
- Eric Pape
- G01 - MEASURING TESTING
Information Patent Application
COMPRESSION MEMBER FOR USE IN SHOWERHEAD ELECTRODE ASSEMBLY
- Publication number 20150243487
- Publication date Aug 27, 2015
- LAM RESEARCH CORPORATION
- Darrell Ehrlich
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPRESSION MEMBER FOR USE IN SHOWERHEAD ELECTRODE ASSEMBLY
- Publication number 20130299605
- Publication date Nov 14, 2013
- LAM RESEARCH CORPORATION
- Darrell Ehrlich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multi Zone Gas Injection Upper Electrode System
- Publication number 20130126486
- Publication date May 23, 2013
- Ryan Bise
- H01 - BASIC ELECTRIC ELEMENTS

Darrell Ehrlich

Person

Patents Grantslast 30 patents

Chuck for plasma processing chamber

Electrostatic chuck with ceramic monolithic body

Replaceable and/or collapsible edge ring assemblies for plasma shea...

Multi zone gas injection upper electrode system

Substrate holder having integrated temperature measurement electric...

Laminated heater with different heater trace materials

Connections between laminated heater and heater voltage inputs

Multi zone gas injection upper electrode system

Compression member for use in showerhead electrode assembly

Substrate holder having integrated temperature measurement electric...

Compression member for use in showerhead electrode assembly

Compression member for use in showerhead electrode assembly

Patents Applicationslast 30 patents

REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEA...

ANODIZATION FOR METAL MATRIX COMPOSITE SEMICONDUCTOR PROCESSING CHA...

SUBSTRATE SUPPORTS WITH MULTILAYER STRUCTURE INCLUDING COUPLED HEAT...

COOLANT CHANNEL WITH INTERNAL FINS FOR SUBSTRATE PROCESSING PEDESTALS

COMPONENT WITH PROTECTIVE SURFACE FOR PROCESSING CHAMBER

ELECTROSTATIC EDGE RING MOUNTING SYSTEM FOR SUBSTRATE PROCESSING

MIXED METAL BASEPLATES FOR IMPROVED THERMAL EXPANSION MATCHING WITH...

MOVEABLE EDGE RINGS WITH REDUCED CAPACITANCE VARIATION FOR SUBSTRAT...

MOVEABLE EDGE RINGS WITH REDUCED CAPACITANCE VARIATION FOR SUBSTRAT...

SEALANT COATING FOR PLASMA PROCESSING CHAMBER COMPONENTS

HIGH POWER ELECTROSTATIC CHUCK WITH FEATURES PREVENTING HE HOLE LIG...

ELECTROSTATIC CHUCK WITH CERAMIC MONOLITHIC BODY

CHUCK FOR PLASMA PROCESSING CHAMBER

REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEA...

MULTI ZONE GAS INJECTION UPPER ELECTRODE SYSTEM

Corrosion-Resistant Temperature Sensor Probe

Substrate Holder Having Integrated Temperature Measurement Electric...

COMPRESSION MEMBER FOR USE IN SHOWERHEAD ELECTRODE ASSEMBLY

LAMINATED HEATER WITH DIFFERENT HEATER TRACE MATERIALS

CONNECTIONS BETWEEN LAMINATED HEATER AND HEATER VOLTAGE INPUTS

Substrate Holder Having Integrated Temperature Measurement Electric...

COMPRESSION MEMBER FOR USE IN SHOWERHEAD ELECTRODE ASSEMBLY

COMPRESSION MEMBER FOR USE IN SHOWERHEAD ELECTRODE ASSEMBLY

Multi Zone Gas Injection Upper Electrode System