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David A. Setton
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Alameda, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Door systems for low contamination, high throughput handling of wor...
Patent number
6,647,665
Issue date
Nov 18, 2003
Mattson Technology, Inc.
Farzad Tabrizi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for low contamination, high throughput handling...
Patent number
6,568,552
Issue date
May 27, 2003
Mattson Technology, Inc.
Farzad Tabrizi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for robotic transfer of workpieces between a st...
Patent number
6,315,512
Issue date
Nov 13, 2001
Mattson Technology, Inc.
Farzad Tabrizi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Methods for transporting wafers for vacuum processing
Publication number
20040091349
Publication date
May 13, 2004
Farzad Tabrizi
H01 - BASIC ELECTRIC ELEMENTS