David Hemker

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Additively manufactured gas distribution manifold
- Patent number 10,794,519
- Issue date Oct 6, 2020
- Lam Research Corporation
- Christopher William Burkhart
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Additively manufactured gas distribution manifold
- Patent number 10,215,317
- Issue date Feb 26, 2019
- Lam Research Corporation
- Christopher William Burkhart
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Social network service for semiconductor manufacturing equipment an...
- Patent number 9,871,759
- Issue date Jan 16, 2018
- Lam Research Corporation
- Chung Ho Huang
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Isotropic atomic layer etch for silicon and germanium oxides
- Patent number 9,431,268
- Issue date Aug 30, 2016
- Lam Research Corporation
- Thorsten Lill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Controlled ambient system for interface engineering
- Patent number 9,117,860
- Issue date Aug 25, 2015
- Lam Research Corporation
- John Boyd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process integration scheme to lower overall dielectric constant in...
- Patent number 9,076,844
- Issue date Jul 7, 2015
- Lam Research Corporation
- Nicolas Bright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum plasma processor having a chamber with electrodes and a coil...
- Patent number 8,114,246
- Issue date Feb 14, 2012
- Lam Research Corporation
- Tuqiang Ni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for providing a confined liquid for immersion lithography
- Patent number 7,749,689
- Issue date Jul 6, 2010
- Lam Research Corporation
- David Hemker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for developing photoresist and method for operating the same
- Patent number 7,520,284
- Issue date Apr 21, 2009
- Lam Research Corporation
- John M. Boyd
- B08 - CLEANING
Information Patent Grant
Process integration scheme to lower overall dielectric constant in...
- Patent number 7,521,358
- Issue date Apr 21, 2009
- Lam Research Corporation
- Nicolas Bright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for making dual-damascene dielectric structures
- Patent number 7,501,339
- Issue date Mar 10, 2009
- Lam Research Corporation
- Jay E. Uglow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for providing a confined liquid for immersion...
- Patent number 7,367,345
- Issue date May 6, 2008
- Lam Research Corporation
- David Hemker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Plug and play sensor integration for a process module
- Patent number 7,356,580
- Issue date Apr 8, 2008
- Lam Research Corporation
- Chung-Ho Huang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for real time metal film thickness measurement
- Patent number 7,309,618
- Issue date Dec 18, 2007
- Lam Research Corporation
- Yehiel Gotkis
- B24 - GRINDING POLISHING
Information Patent Grant
Integration of sensor based metrology into semiconductor processing...
- Patent number 7,128,803
- Issue date Oct 31, 2006
- Lam Research Corporation
- Aleksander Owczarz
- B24 - GRINDING POLISHING
Information Patent Grant
Vacuum plasma processor having a chamber with electrodes and a coil...
- Patent number 7,105,102
- Issue date Sep 12, 2006
- Lam Research Corporation
- Tuqiang Ni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enhancement of eddy current based measurement capabilities
- Patent number 7,084,621
- Issue date Aug 1, 2006
- Lam Research Corporation
- Yehiel Gotkis
- G01 - MEASURING TESTING
Information Patent Grant
Methods for making dual-damascene dielectric structures
- Patent number 7,060,605
- Issue date Jun 13, 2006
- Lam Research Corporation
- Jay E. Uglow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for performing site-specific backside particle and contamina...
- Patent number 7,045,019
- Issue date May 16, 2006
- Lam Research Corporation
- David J. Hemker
- B08 - CLEANING
Information Patent Grant
Apparatus for controlling wafer temperature in chemical mechanical...
- Patent number 7,029,368
- Issue date Apr 18, 2006
- Lam Research Corporation
- Nicolas Bright
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for slope to threshold conversion for process...
- Patent number 7,010,468
- Issue date Mar 7, 2006
- Lam Research Corporation
- Yehiel Gotkis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus methods for controlling wafer temperature in chemical mec...
- Patent number 6,984,162
- Issue date Jan 10, 2006
- Lam Research Corporation
- Nicolas Bright
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus of arrayed sensors for metrological control
- Patent number 6,951,624
- Issue date Oct 4, 2005
- Lam Research Corporation
- Yehiel Gotkis
- G01 - MEASURING TESTING
Information Patent Grant
System, method and apparatus for improved global dual-damascene pla...
- Patent number 6,939,796
- Issue date Sep 6, 2005
- Lam Research Corporation
- Shrikant P. Lohokare
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for detecting transitions of wafer surface pr...
- Patent number 6,937,915
- Issue date Aug 30, 2005
- Lam Research Corporation
- Rodney Kistler
- B24 - GRINDING POLISHING
Information Patent Grant
System and method for metal residue detection and mapping within a...
- Patent number 6,929,531
- Issue date Aug 16, 2005
- Lam Research Corporation
- Yehiel Gotkis
- B24 - GRINDING POLISHING
Information Patent Grant
Methods for detecting transitions of wafer surface properties in ch...
- Patent number 6,925,348
- Issue date Aug 2, 2005
- Lam Research Corporation
- Rodney Kistler
- B24 - GRINDING POLISHING
Information Patent Grant
Complementary sensors metrological process and method and apparatus...
- Patent number 6,922,053
- Issue date Jul 26, 2005
- Lam Research Corporation
- Yehiel Gotkis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual-damascene dielectric structures
- Patent number 6,909,190
- Issue date Jun 21, 2005
- Lam Research Corporation
- Jay E. Uglow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for metrological process control implementing...
- Patent number 6,894,491
- Issue date May 17, 2005
- Lam Research Corporation
- Yehiel Gotkis
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ADDITIVELY MANUFACTURED GAS DISTRIBUTION MANIFOLD
- Publication number 20190211955
- Publication date Jul 11, 2019
- LAM RESEARCH CORPORATION
- Christopher William Burkhart
- B22 - CASTING POWDER METALLURGY
Information Patent Application
ADDITIVELY MANUFACTURED GAS DISTRIBUTION MANIFOLD
- Publication number 20170203511
- Publication date Jul 20, 2017
- LAM RESEARCH CORPORATION
- Christopher William Burkhart
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Application
Social Network Service for Semiconductor Manufacturing Equipment an...
- Publication number 20170078238
- Publication date Mar 16, 2017
- LAM RESEARCH CORPORATION
- Chung Ho Huang
- G01 - MEASURING TESTING
Information Patent Application
ISOTROPIC ATOMIC LAYER ETCH FOR SILICON AND GERMANIUM OXIDES
- Publication number 20160196984
- Publication date Jul 7, 2016
- LAM RESEARCH CORPORATION
- Thorsten Lill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing System with Multiple Processing Devices Deploy...
- Publication number 20150079795
- Publication date Mar 19, 2015
- LAM RESEARCH CORPORATION
- David J. Hemker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing System with Multiple Processing Devices Deploy...
- Publication number 20120088370
- Publication date Apr 12, 2012
- LAM RESEARCH CORPORATION
- David J. Hemker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS INTEGRATION SCHEME TO LOWER OVERALL DIELECTRIC CONSTANT IN...
- Publication number 20090134520
- Publication date May 28, 2009
- Lam Research Corporation
- Nicolas Bright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for Providing a Confined Liquid for Immersion Lithography
- Publication number 20080171292
- Publication date Jul 17, 2008
- Lam Research Corp.
- David Hemker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Process integration scheme to lower overall dielectric constant in...
- Publication number 20080150138
- Publication date Jun 26, 2008
- Lam Research Corporation
- Nicolas Bright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Controlled ambient system for interface engineering
- Publication number 20080057221
- Publication date Mar 6, 2008
- LAM RESEARCH CORPORATION
- John Boyd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR GAP FILL IN CONTROLLED AMBIENT SYSTEM
- Publication number 20080057182
- Publication date Mar 6, 2008
- John Boyd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PLASMA PROCESSOR HAVING A CHAMBER WITH ELECTRODES AND A COIL...
- Publication number 20070044915
- Publication date Mar 1, 2007
- LAM RESEARCH CORPORATION
- Tuqiang Ni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for developing photoresist and method for operating the same
- Publication number 20060269877
- Publication date Nov 30, 2006
- LAM RESEARCH CORPORATION
- John M. Boyd
- B08 - CLEANING
Information Patent Application
Methods for making dual-damascene dielectric structures
- Publication number 20060166485
- Publication date Jul 27, 2006
- LAM RESEARCH CORPORATION, AND NOVELLUS SYSTEMS, INC.
- Jay E. Uglow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Materials and gas chemistries for processing systems
- Publication number 20060011583
- Publication date Jan 19, 2006
- Andrew D. Bailey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for slope to threshold conversion for process...
- Publication number 20050125202
- Publication date Jun 9, 2005
- Lam Research Corporation
- Yehiel Gotkis
- G05 - CONTROLLING REGULATING
Information Patent Application
Integration of sensor based metrology into semiconductor processing...
- Publication number 20050072528
- Publication date Apr 7, 2005
- Lam Research Corporation
- Aleksander Owczarz
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for wafer mechanical stress monitoring and waf...
- Publication number 20050066739
- Publication date Mar 31, 2005
- Lam Research Corporation
- Yehiel Gotkis
- B24 - GRINDING POLISHING
Information Patent Application
Methods for detecting transitions of wafer surface properties in ch...
- Publication number 20050054268
- Publication date Mar 10, 2005
- Lam Research Corporation
- Rodney Kistler
- B24 - GRINDING POLISHING
Information Patent Application
Complementary sensors metrological process and method and apparatus...
- Publication number 20050007107
- Publication date Jan 13, 2005
- Lam Research Corp.
- Yehiel Gotkis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus of arrayed sensors for metrological control
- Publication number 20050000653
- Publication date Jan 6, 2005
- Lam Research Corporation
- Yehiel Gotkis
- G01 - MEASURING TESTING
Information Patent Application
System, method and apparatus for improved global dual-damascene pla...
- Publication number 20040248408
- Publication date Dec 9, 2004
- LAM RESEARCH CORPORATION
- Shrikant P. Lohokare
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus methods for controlling wafer temperature in chemical mec...
- Publication number 20040242124
- Publication date Dec 2, 2004
- Lam Research Corporation
- Nicolas Bright
- B24 - GRINDING POLISHING
Information Patent Application
System, method and apparatus for improved local dual-damascene plan...
- Publication number 20040180545
- Publication date Sep 16, 2004
- LAM RESEARCH CORPORATION
- Shrikant P. Lohokare
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vacuum plasma processor having a chamber with electrodes and a coil...
- Publication number 20040154747
- Publication date Aug 12, 2004
- Lam Research Corporation
- Tuqiang Ni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR REDUCING CONTAMINATION OF SEMICONDUCTOR SUBSTRATES
- Publication number 20040137741
- Publication date Jul 15, 2004
- Robert Chebi
- B08 - CLEANING
Information Patent Application
METHOD AND APPARATUS FOR METROLOGICAL PROCESS CONTROL IMPLEMENTING...
- Publication number 20040119468
- Publication date Jun 24, 2004
- Lam Research Corp.
- Yehiel Gotkis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for slope to threshold conversion for process...
- Publication number 20040117054
- Publication date Jun 17, 2004
- Lam Research Corporation
- Yehiel Gotkis
- G05 - CONTROLLING REGULATING
Information Patent Application
Apparatus methods for controlling wafer temperature in chemical mec...
- Publication number 20040108065
- Publication date Jun 10, 2004
- Lam Research Corporation
- Nicolas Bright
- B24 - GRINDING POLISHING
Information Patent Application
Enhancement of eddy current based measurement capabilities
- Publication number 20040058545
- Publication date Mar 25, 2004
- Lam Research Corporation
- Yehiel Gotkis
- G01 - MEASURING TESTING

David Hemker

Person

Patents Grantslast 30 patents

Additively manufactured gas distribution manifold

Additively manufactured gas distribution manifold

Social network service for semiconductor manufacturing equipment an...

Isotropic atomic layer etch for silicon and germanium oxides

Controlled ambient system for interface engineering

Process integration scheme to lower overall dielectric constant in...

Vacuum plasma processor having a chamber with electrodes and a coil...

Methods for providing a confined liquid for immersion lithography

Apparatus for developing photoresist and method for operating the same

Process integration scheme to lower overall dielectric constant in...

Methods for making dual-damascene dielectric structures

Apparatus and method for providing a confined liquid for immersion...

Plug and play sensor integration for a process module

Method and apparatus for real time metal film thickness measurement

Integration of sensor based metrology into semiconductor processing...

Vacuum plasma processor having a chamber with electrodes and a coil...

Enhancement of eddy current based measurement capabilities

Methods for making dual-damascene dielectric structures

Method for performing site-specific backside particle and contamina...

Apparatus for controlling wafer temperature in chemical mechanical...

Method and apparatus for slope to threshold conversion for process...

Apparatus methods for controlling wafer temperature in chemical mec...

Method and apparatus of arrayed sensors for metrological control

System, method and apparatus for improved global dual-damascene pla...

Apparatus and methods for detecting transitions of wafer surface pr...

System and method for metal residue detection and mapping within a...

Methods for detecting transitions of wafer surface properties in ch...

Complementary sensors metrological process and method and apparatus...

Dual-damascene dielectric structures

Method and apparatus for metrological process control implementing...

Patents Applicationslast 30 patents

ADDITIVELY MANUFACTURED GAS DISTRIBUTION MANIFOLD

ADDITIVELY MANUFACTURED GAS DISTRIBUTION MANIFOLD

Social Network Service for Semiconductor Manufacturing Equipment an...

ISOTROPIC ATOMIC LAYER ETCH FOR SILICON AND GERMANIUM OXIDES

Substrate Processing System with Multiple Processing Devices Deploy...

Substrate Processing System with Multiple Processing Devices Deploy...

PROCESS INTEGRATION SCHEME TO LOWER OVERALL DIELECTRIC CONSTANT IN...

Methods for Providing a Confined Liquid for Immersion Lithography

Process integration scheme to lower overall dielectric constant in...

Controlled ambient system for interface engineering

METHOD FOR GAP FILL IN CONTROLLED AMBIENT SYSTEM

VACUUM PLASMA PROCESSOR HAVING A CHAMBER WITH ELECTRODES AND A COIL...

Apparatus for developing photoresist and method for operating the same

Methods for making dual-damascene dielectric structures

Materials and gas chemistries for processing systems

Method and apparatus for slope to threshold conversion for process...

Integration of sensor based metrology into semiconductor processing...

Method and apparatus for wafer mechanical stress monitoring and waf...

Methods for detecting transitions of wafer surface properties in ch...

Complementary sensors metrological process and method and apparatus...

Method and apparatus of arrayed sensors for metrological control

System, method and apparatus for improved global dual-damascene pla...

Apparatus methods for controlling wafer temperature in chemical mec...

System, method and apparatus for improved local dual-damascene plan...

Vacuum plasma processor having a chamber with electrodes and a coil...

METHODS FOR REDUCING CONTAMINATION OF SEMICONDUCTOR SUBSTRATES

METHOD AND APPARATUS FOR METROLOGICAL PROCESS CONTROL IMPLEMENTING...

Method and apparatus for slope to threshold conversion for process...

Apparatus methods for controlling wafer temperature in chemical mec...

Enhancement of eddy current based measurement capabilities