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David J. Cooperberg
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Mount Kisco, NY, US
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Patents Grants
last 30 patents
Information
Patent Grant
Tunable multi-zone gas injection system
Patent number
9,051,647
Issue date
Jun 9, 2015
Lam Research Corporation
David J. Cooperberg
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
High strip rate downstream chamber
Patent number
8,425,682
Issue date
Apr 23, 2013
Lam Research Corporation
Ing-Yann Wang
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
High strip rate downstream chamber
Patent number
8,298,336
Issue date
Oct 30, 2012
Lam Research Corporation
Ing-Yann Wang
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Edge gas injection for critical dimension uniformity improvement
Patent number
7,932,181
Issue date
Apr 26, 2011
Lam Research Corporation
Harmeet Singh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processor coil
Patent number
7,571,697
Issue date
Aug 11, 2009
Lam Research Corporation
Neil Benjamin
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus to calibrate a semi-empirical process simulator
Patent number
RE39534
Issue date
Mar 27, 2007
Lam Research Corporation
David Cooperberg
700 - Data processing: generic control systems or specific applications
Information
Patent Grant
Enhanced process and profile simulator algorithms
Patent number
7,139,632
Issue date
Nov 21, 2006
Lam Research Corporation
David Cooperberg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Enhanced process and profile simulator algorithms
Patent number
6,804,572
Issue date
Oct 12, 2004
Lam Research Corporation
David Cooperberg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Applications of a semi-empirical, physically based, profile simulator
Patent number
6,577,915
Issue date
Jun 10, 2003
Lam Research Corporation
David Cooperberg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Techniques for improving etch rate uniformity
Patent number
6,344,105
Issue date
Feb 5, 2002
Lam Research Corporation
John E. Daugherty
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus to calibrate a semi-empirical process simulator
Patent number
6,301,510
Issue date
Oct 9, 2001
Lam Research Corporation
David Cooperberg
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
TUNABLE MULTI-ZONE GAS INJECTION SYSTEM
Publication number
20150235811
Publication date
Aug 20, 2015
LAM RESEARCH CORPORATION
David J. Cooperberg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH STRIP RATE DOWNSTREAM CHAMBER
Publication number
20140261803
Publication date
Sep 18, 2014
Ing-Yann Wang
F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information
Patent Application
HIGH STRIP RATE DOWNSTREAM CHAMBER
Publication number
20130025693
Publication date
Jan 31, 2013
LAM RESEARCH CORPORATION
Ing-Yann Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TUNABLE MULTI-ZONE GAS INJECTION SYSTEM
Publication number
20100041238
Publication date
Feb 18, 2010
LAM RESEARCH CORPORATION
David J. Cooperberg
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Edge gas injection for critical dimension uniformity improvement
Publication number
20070293043
Publication date
Dec 20, 2007
LAM RESEARCH CORPORATION
Harmeet Singh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
High strip rate downstream chamber
Publication number
20060219361
Publication date
Oct 5, 2006
Lam Research Corporation
Ing-Yann Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Enhanced process and profile simulator algorithms
Publication number
20050278057
Publication date
Dec 15, 2005
David Cooperberg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Tunable multi-zone gas injection system
Publication number
20030070620
Publication date
Apr 17, 2003
David J. Cooperberg
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Plasma processor coil
Publication number
20030067273
Publication date
Apr 10, 2003
Neil Benjamin
H01 - BASIC ELECTRIC ELEMENTS