David Matthew Burtner

Person

Fort Collins, CO, US

People

Patents Grantslast 30 patents

Information Patent Grant
Particle trap for a plasma source
- Patent number 7,914,603
- Issue date Mar 29, 2011
- MKS Instruments, Inc.
- Ali Shajii
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Adaptive controller for ion source
- Patent number 7,853,364
- Issue date Dec 14, 2010
- Veeco Instruments, Inc.
- James D. Deakins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sputtered contamination shielding for an ion source
- Patent number 7,718,983
- Issue date May 18, 2010
- Veeco Instruments, Inc.
- David Matthew Burtner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal transfer sheet for ion source
- Patent number 7,566,883
- Issue date Jul 28, 2009
- Veeco Instruments, Inc.
- David M. Burtner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas distributor for ion source
- Patent number 7,476,869
- Issue date Jan 13, 2009
- Veeco Instruments, Inc.
- David M. Burtner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source with removable anode assembly
- Patent number 7,439,521
- Issue date Oct 21, 2008
- Veeco Instruments, Inc.
- David M. Burtner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular ion source
- Patent number 7,425,709
- Issue date Sep 16, 2008
- Veeco Instruments, Inc.
- Daniel E. Siegfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal control plate for ion source
- Patent number 7,425,711
- Issue date Sep 16, 2008
- Veeco Instruments, Inc.
- David M. Burtner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluid-cooled ion source
- Patent number 7,342,236
- Issue date Mar 11, 2008
- Veeco Instruments, Inc.
- David Matthew Burtner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Longitudinal cathode expansion in an ion source
- Patent number 6,984,942
- Issue date Jan 10, 2006
- Veeco Instruments, Inc.
- Daniel E. Siegfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular uniform gas distribution system in an ion source
- Patent number 6,919,690
- Issue date Jul 19, 2005
- Veeco Instruments, Inc.
- Daniel E. Siegfried
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PARTICLE TRAP FOR A PLASMA SOURCE
- Publication number 20090320677
- Publication date Dec 31, 2009
- MKS Instruments, Inc.
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADAPTIVE CONTROLLER FOR ION SOURCE
- Publication number 20080129209
- Publication date Jun 5, 2008
- Veeco Instruments, Inc.
- James D. Deakins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal Control Plate for Ion Source
- Publication number 20070273288
- Publication date Nov 29, 2007
- Veeco Instruments, Inc.
- David M. Burtner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas Distributor for Ion Source
- Publication number 20070273289
- Publication date Nov 29, 2007
- Veeco Instruments, Inc.
- David M. Burtner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Source with Removable Anode Assembly
- Publication number 20070166599
- Publication date Jul 19, 2007
- Veeco Instruments, Inc.
- David M. Burtner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal Transfer Sheet for Ion Source
- Publication number 20070125966
- Publication date Jun 7, 2007
- Veeco Instruments, Inc.
- David M. Burtner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Fluid-cooled ion source
- Publication number 20050248284
- Publication date Nov 10, 2005
- David Matthew Burtner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Modular ion source
- Publication number 20050057167
- Publication date Mar 17, 2005
- Daniel E. Siegfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Longitudinal cathode expansion in an ion source
- Publication number 20050057166
- Publication date Mar 17, 2005
- Daniel E. Siegfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Modular uniform gas distribution system in an ion source
- Publication number 20050045035
- Publication date Mar 3, 2005
- Daniel E. Siegfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sputtered contamination shielding for an ion source
- Publication number 20050040031
- Publication date Feb 24, 2005
- David Matthew Burtner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

David Matthew Burtner

Person

Patents Grantslast 30 patents

Particle trap for a plasma source

Adaptive controller for ion source

Sputtered contamination shielding for an ion source

Thermal transfer sheet for ion source

Gas distributor for ion source

Ion source with removable anode assembly

Modular ion source

Thermal control plate for ion source

Fluid-cooled ion source

Longitudinal cathode expansion in an ion source

Modular uniform gas distribution system in an ion source

Patents Applicationslast 30 patents

PARTICLE TRAP FOR A PLASMA SOURCE

ADAPTIVE CONTROLLER FOR ION SOURCE

Thermal Control Plate for Ion Source

Gas Distributor for Ion Source

Ion Source with Removable Anode Assembly

Thermal Transfer Sheet for Ion Source

Fluid-cooled ion source

Modular ion source

Longitudinal cathode expansion in an ion source

Modular uniform gas distribution system in an ion source

Sputtered contamination shielding for an ion source