David R. Atwell

Person

Boise, ID, US

People

Patents Grantslast 30 patents

Information Patent Grant
Chemical vaporizer for material deposition systems and associated m...
- Patent number 8,551,564
- Issue date Oct 8, 2013
- Micron Technology, Inc.
- Eugene P. Marsh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vaporizer for material deposition systems and associated m...
- Patent number 8,225,745
- Issue date Jul 24, 2012
- Micron Technology, Inc.
- Eugene P. Marsh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vaporizer for material deposition systems and associated m...
- Patent number 7,883,745
- Issue date Feb 8, 2011
- Micron Technology, Inc.
- Eugene P. Marsh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for recirculating fluid supply for an injector fo...
- Patent number 7,789,319
- Issue date Sep 7, 2010
- Micron Technology, Inc.
- Eugene P. Marsh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for vaporizing liquid precursors and system fo...
- Patent number 6,402,126
- Issue date Jun 11, 2002
- Micron Technology, Inc.
- Brian A. Vaartstra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic method and apparatus for vaporizing precursors and sy...
- Patent number 6,280,793
- Issue date Aug 28, 2001
- Micron Technology, Inc.
- David R. Atwell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for vaporizing liquid precursors and system fo...
- Patent number 6,244,575
- Issue date Jun 12, 2001
- Micron Technology, Inc.
- Brian A. Vaartstra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor wafer processor, semiconductor processor gas filterin...
- Patent number 6,206,970
- Issue date Mar 27, 2001
- Micron Technology, Inc.
- David R. Atwell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solid precursor injector apparatus
- Patent number 6,072,939
- Issue date Jun 6, 2000
- Micron Technology, Inc.
- David R. Atwell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solid precursor injector apparatus and method
- Patent number 5,943,471
- Issue date Aug 24, 1999
- Micron Technology, Inc.
- David R. Atwell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of reducing carbon incorporation into films produced by chem...
- Patent number 5,902,651
- Issue date May 11, 1999
- Micron Technology, Inc.
- Donald L. Westmoreland
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solid precursor injector apparatus and method
- Patent number 5,764,849
- Issue date Jun 9, 1998
- Micron Technology, Inc.
- David R. Atwell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of reducing carbon incorporation into films produced by chem...
- Patent number 5,693,377
- Issue date Dec 2, 1997
- Micron Technology, Inc.
- Donald L. Westmoreland
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor delivery system for solid precursors and method regarding same
- Patent number 5,674,574
- Issue date Oct 7, 1997
- Micron Technology, Inc.
- David R. Atwell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CHEMICAL VAPORIZER FOR MATERIAL DEPOSITION SYSTEMS AND ASSOCIATED M...
- Publication number 20140026925
- Publication date Jan 30, 2014
- Micron Technology, Inc.
- Eugene P. Marsh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPORIZER FOR MATERIAL DEPOSITION SYSTEMS AND ASSOCIATED M...
- Publication number 20120289059
- Publication date Nov 15, 2012
- Micron Technology, Inc.
- Eugene P. Marsh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPORIZER FOR MATERIAL DEPOSITION SYSTEMS AND ASSOCIATED M...
- Publication number 20110124201
- Publication date May 26, 2011
- Micron Technology, Inc.
- Eugene P. Marsh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPORIZER FOR MATERIAL DEPOSITION SYSTEMS AND ASSOCIATED M...
- Publication number 20090035465
- Publication date Feb 5, 2009
- Micron Technology, Inc.
- Eugene P. Marsh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR RECIRCULATING FLUID SUPPLY FOR AN INJECTOR FO...
- Publication number 20070266941
- Publication date Nov 22, 2007
- Eugene P. Marsh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for vaporizing liquid precursors and system fo...
- Publication number 20010020448
- Publication date Sep 13, 2001
- Micron Technology, Inc.
- Brian A. Vaartstra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

David R. Atwell

Person

Patents Grantslast 30 patents

Chemical vaporizer for material deposition systems and associated m...

Chemical vaporizer for material deposition systems and associated m...

Chemical vaporizer for material deposition systems and associated m...

System and method for recirculating fluid supply for an injector fo...

Method and apparatus for vaporizing liquid precursors and system fo...

Electrostatic method and apparatus for vaporizing precursors and sy...

Method and apparatus for vaporizing liquid precursors and system fo...

Semiconductor wafer processor, semiconductor processor gas filterin...

Solid precursor injector apparatus

Solid precursor injector apparatus and method

Method of reducing carbon incorporation into films produced by chem...

Solid precursor injector apparatus and method

Method of reducing carbon incorporation into films produced by chem...

Vapor delivery system for solid precursors and method regarding same

Patents Applicationslast 30 patents

CHEMICAL VAPORIZER FOR MATERIAL DEPOSITION SYSTEMS AND ASSOCIATED M...

CHEMICAL VAPORIZER FOR MATERIAL DEPOSITION SYSTEMS AND ASSOCIATED M...

CHEMICAL VAPORIZER FOR MATERIAL DEPOSITION SYSTEMS AND ASSOCIATED M...

CHEMICAL VAPORIZER FOR MATERIAL DEPOSITION SYSTEMS AND ASSOCIATED M...

SYSTEM AND METHOD FOR RECIRCULATING FLUID SUPPLY FOR AN INJECTOR FO...

Method and apparatus for vaporizing liquid precursors and system fo...