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DAVID RICHARD ZYWOTKO
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BOULDER, CO, US
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Patents Grants
last 30 patents
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Patent Grant
Enhancement of thermal atomic layer etching
Patent number
10,787,744
Issue date
Sep 29, 2020
The Regents of the University of Colorado, a Body Corporate
Steven McClellan George
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
REMOVAL OF STRAY RUTHENIUM METAL NUCLEI FOR SELECTIVE RUTHENIUM MET...
Publication number
20220254683
Publication date
Aug 11, 2022
TOKYO ELECTRON LIMITED
Omid Zandi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR USING ULTRA-THIN ETCH STOP LAYERS IN SELECTIVE ATOMIC LA...
Publication number
20210242031
Publication date
Aug 5, 2021
TOKYO ELECTRON LIMITED
Omid Zandi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Enhancement of Thermal Atomic Layer Etching
Publication number
20190055654
Publication date
Feb 21, 2019
The Regents of the University of Colorado, a Body Corporate
STEVEN MCCLELLAN GEORGE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...