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Taipei, TW
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last 30 patents
Information
Patent Grant
Method for etching silicon oxynitride and dielectric antireflection...
Patent number
6,537,918
Issue date
Mar 25, 2003
Applied Materials Inc.
Pavel Ionov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for etching silicon oxynitride and dielectric antireflection...
Patent number
6,291,356
Issue date
Sep 18, 2001
Applied Materials, Inc.
Pavel Ionov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for etching silicon oxynitride and inorganic antireflection...
Patent number
6,013,582
Issue date
Jan 11, 2000
Applied Materials, Inc.
Pavel Ionov
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Method for etching silicon oxynitride and dielectric antireflection...
Publication number
20020016078
Publication date
Feb 7, 2002
Pavel Ionov
H01 - BASIC ELECTRIC ELEMENTS