Deh Ming Shyu

Person

Miaoli County, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Method and system for measuring a stacking overlay error by focusin...
- Patent number 9,182,681
- Issue date Nov 10, 2015
- Industrial Technology Research Institute
- Deh Ming Shyu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measurement systems and measurement methods
- Patent number 8,830,458
- Issue date Sep 9, 2014
- Industrial Technology Research Institute
- Deh Ming Shyu
- G01 - MEASURING TESTING
Information Patent Grant
Method for measuring via bottom profile
- Patent number 8,537,213
- Issue date Sep 17, 2013
- Industrial Technology Research Institute
- Deh-Ming Shyu
- G01 - MEASURING TESTING
Information Patent Grant
Scatterfield microscopical measuring method and apparatus
- Patent number 8,319,971
- Issue date Nov 27, 2012
- Industrial Technology Research Institute
- Deh-Ming Shyu
- G01 - MEASURING TESTING
Information Patent Grant
Method for designing two-dimensional array overlay targets and meth...
- Patent number 8,321,821
- Issue date Nov 27, 2012
- Industrial Technology Research Institute
- Yi Sha Ku
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for designing two-dimensional array overlay target sets and...
- Patent number 8,250,497
- Issue date Aug 21, 2012
- Industrial Technology Research Institute
- Wei Te Hsu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for via structure measurement
- Patent number 8,139,233
- Issue date Mar 20, 2012
- Industrial Technology Research Institute
- Yi Sha Ku
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for scatterfield microscopical measurement
- Patent number 7,872,741
- Issue date Jan 18, 2011
- Industrial Technology Research Institute
- Sen-Yih Chou
- G01 - MEASURING TESTING
Information Patent Grant
Reflective scatterometer
- Patent number 7,864,324
- Issue date Jan 4, 2011
- Industrial Technology Research Institute
- Deh-Ming Shyu
- G01 - MEASURING TESTING
Information Patent Grant
Method for designing gratings
- Patent number 7,800,824
- Issue date Sep 21, 2010
- Industrial Technology Research Institute
- Shih Chun Wang
- G02 - OPTICS
Information Patent Grant
Structure and method for overlay measurement
- Patent number 7,652,776
- Issue date Jan 26, 2010
- Industrial Technology Research Institute
- Deh-Ming Shyu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for correlating the line width roughness of gratings and met...
- Patent number 7,430,052
- Issue date Sep 30, 2008
- Industrial Technology Research Institute
- Deh Ming Shyu
- G01 - MEASURING TESTING
Information Patent Grant
Method for inspecting a grating biochip
- Patent number 7,355,713
- Issue date Apr 8, 2008
- Industrial Technology Research Institute
- Deh Ming Shyu
- G01 - MEASURING TESTING
Information Patent Grant
Dual-lens hybrid diffractive/refractive imaging system
- Patent number 6,724,532
- Issue date Apr 20, 2004
- Industrial Technologies Research Institute
- Chiun-Lern Fu
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
THICKNESS MEASURING SYSTEM AND METHOD FOR A BONDING LAYER
- Publication number 20140333936
- Publication date Nov 13, 2014
- Industrial Technology Research Institute
- Po-Yi CHANG
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR MEASURING A STACKING OVERLAY ERROR
- Publication number 20140118721
- Publication date May 1, 2014
- Industrial Technology Research Institute
- Deh Ming Shyu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEASUREMENT SYSTEMS AND MEASUREMENT METHODS
- Publication number 20140085640
- Publication date Mar 27, 2014
- Industrial Technology Research Institute
- Deh Ming Shyu
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MEASURING VIA BOTTOM PROFILE
- Publication number 20120147171
- Publication date Jun 14, 2012
- Industrial Technology Research Institute
- Deh-Ming Shyu
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR VIA STRUCTURE MEASUREMENT
- Publication number 20110172974
- Publication date Jul 14, 2011
- Industrial Technology Research Institute
- Yi Sha KU
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR DESIGNING TWO-DIMENSIONAL ARRAY OVERLAY TARGET SETS AND...
- Publication number 20110154272
- Publication date Jun 23, 2011
- Industrial Technology Research Institute
- Wei Te Hsu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MEASUREMENT DEVICE AND METHOD OF DOUBLE-SIDED OPTICAL FILMS
- Publication number 20110149063
- Publication date Jun 23, 2011
- Industrial Technology Research Institute
- SHU-PING DONG
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR DESIGNING TWO-DIMENSIONAL ARRAY OVERLAY TARGETS AND METH...
- Publication number 20110131538
- Publication date Jun 2, 2011
- Industrial Technology Research Institute
- Yi Sha KU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
REFLECTIVE SCATTEROMETER
- Publication number 20100053627
- Publication date Mar 4, 2010
- Industrial Technology Research Institute
- Deh-Ming SHYU
- G01 - MEASURING TESTING
Information Patent Application
SCATTERFIELD MICROSCOPICAL MEASURING METHOD AND APPARATUS
- Publication number 20100007881
- Publication date Jan 14, 2010
- Industrial Technology Research Institute
- Deh-Ming Shyu
- G02 - OPTICS
Information Patent Application
Structure and method for overlay measurement
- Publication number 20090116035
- Publication date May 7, 2009
- INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Deh-Ming Shyu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for scatterfield microscopical measurement
- Publication number 20090079969
- Publication date Mar 26, 2009
- INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Sen-Yih Chou
- G02 - OPTICS
Information Patent Application
METHOD FOR CORRELATING THE LINE WIDTH ROUGHNESS OF GRATINGS AND MET...
- Publication number 20080144050
- Publication date Jun 19, 2008
- Industrial Technology Research Institute
- Deh Ming Shyu
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR DESIGNING GRATINGS
- Publication number 20080013176
- Publication date Jan 17, 2008
- Industrial Technology Research Institute
- Shih Chun Wang
- G02 - OPTICS
Information Patent Application
Method for Inspecting a Grating Biochip
- Publication number 20070156349
- Publication date Jul 5, 2007
- Industrial Technology Research Institute
- Deh Ming Shyu
- G01 - MEASURING TESTING

Deh Ming Shyu

Person

Patents Grantslast 30 patents

Method and system for measuring a stacking overlay error by focusin...

Measurement systems and measurement methods

Method for measuring via bottom profile

Scatterfield microscopical measuring method and apparatus

Method for designing two-dimensional array overlay targets and meth...

Method for designing two-dimensional array overlay target sets and...

System and method for via structure measurement

Method and apparatus for scatterfield microscopical measurement

Reflective scatterometer

Method for designing gratings

Structure and method for overlay measurement

Method for correlating the line width roughness of gratings and met...

Method for inspecting a grating biochip

Dual-lens hybrid diffractive/refractive imaging system

Patents Applicationslast 30 patents

THICKNESS MEASURING SYSTEM AND METHOD FOR A BONDING LAYER

METHOD AND SYSTEM FOR MEASURING A STACKING OVERLAY ERROR

MEASUREMENT SYSTEMS AND MEASUREMENT METHODS

METHOD FOR MEASURING VIA BOTTOM PROFILE

SYSTEM AND METHOD FOR VIA STRUCTURE MEASUREMENT

METHOD FOR DESIGNING TWO-DIMENSIONAL ARRAY OVERLAY TARGET SETS AND...

MEASUREMENT DEVICE AND METHOD OF DOUBLE-SIDED OPTICAL FILMS

METHOD FOR DESIGNING TWO-DIMENSIONAL ARRAY OVERLAY TARGETS AND METH...

REFLECTIVE SCATTEROMETER

SCATTERFIELD MICROSCOPICAL MEASURING METHOD AND APPARATUS

Structure and method for overlay measurement

Method and apparatus for scatterfield microscopical measurement

METHOD FOR CORRELATING THE LINE WIDTH ROUGHNESS OF GRATINGS AND MET...

METHOD FOR DESIGNING GRATINGS

Method for Inspecting a Grating Biochip