BRIEF DESCRIPTION OF THE DRAWINGS
The objectives and advantages of the present invention will become apparent upon reading the following description and upon reference to the accompanying drawings in which:
FIG. 1 shows a conventional prism coupled surface plasma resonance inspection;
FIG. 2 illustrates a biochip according to one embodiment of the present invention;
FIG. 3(
a) illustrates a biochip inspection system according to one embodiment of the present invention;
FIG. 3(
b) illustrates a signature obtained by inspecting a biochip sample using the inspection system shown in FIG. 3(a);
FIG. 4 illustrates a diffraction light spectrum of the angular scatterometer as the variation of the sample refractive index is 0.01;
FIG. 5 illustrates a diffraction light spectrum of the prism coupled surface plasma resonance as the variation of the sample refractive index is 0.01;
FIG. 6 illustrates a flow chart showing an optimization method for the biochip according to one embodiment of the present invention;
FIG. 7 illustrates a sensitivity distribution diagram of each subordinate parameter combination obtained by RCWA at fixed primary parameters;
FIG. 8 illustrates a distribution diagram of the sensitivity corresponding to the primary parameter obtained by integrating multiple sensitivity distribution diagrams; and
FIG. 9 illustrates a comparison result for measurements of the biochip sample by the angular scatterometer and the prism coupled surface resonance.
Patent Application
20070156349
