Dennis Smith

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
MEMS-based Coriolis mass flow controller
- Patent number 11,860,016
- Issue date Jan 2, 2024
- Lam Research Corporation
- Dennis Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MEMS coriolis gas flow controller
- Patent number 11,662,237
- Issue date May 30, 2023
- Lam Research Corporation
- Iqbal A. Shareef
- G01 - MEASURING TESTING
Information Patent Grant
Manufacture of an orifice plate for use in gas calibration
- Patent number 10,737,359
- Issue date Aug 11, 2020
- Lam Research Corporation
- Dennis Smith
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Turbomolecular pump deposition control and particle management
- Patent number 10,655,638
- Issue date May 19, 2020
- Lam Research Corporation
- Dennis Smith
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Mass flow controller for substrate processing
- Patent number 10,591,934
- Issue date Mar 17, 2020
- Lam Research Corporation
- Sudhakar Gopalakrishnan
- G01 - MEASURING TESTING
Information Patent Grant
Processing apparatus having integrated pumping system
- Patent number 7,077,159
- Issue date Jul 18, 2006
- Applied Materials, Inc.
- Peter Reimer
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Processing apparatus having integrated pumping system
- Patent number 7,051,759
- Issue date May 30, 2006
- Applied Materials, Inc.
- Paul Reimer
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Processing apparatus having integrated pumping system
- Patent number 6,817,377
- Issue date Nov 16, 2004
- Applied Materials, Inc.
- Paul Reimer
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Turbo-molecular pump having enhanced pumping capacity
- Patent number 6,503,050
- Issue date Jan 7, 2003
- Applied Materials Inc.
- Peter Reimer
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Apparatus and method for regulating a pressure in a chamber
- Patent number 5,944,049
- Issue date Aug 31, 1999
- Applied Materials, Inc.
- Christian Beyer
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
COMPONENT WITH PROTECTIVE SURFACE FOR PROCESSING CHAMBER
- Publication number 20230081544
- Publication date Mar 16, 2023
- LAM RESEARCH CORPORATION
- Pylin SAROBOL
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEMICONDUCTOR EQUIPMENT MODULE FABRICATION WITH ADDITIVE MANUFACTURING
- Publication number 20220384145
- Publication date Dec 1, 2022
- LAM RESEARCH CORPORATION
- Seyedalireza Torbatisarraf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMS CORIOLIS GAS FLOW CONTROLLER
- Publication number 20210140807
- Publication date May 13, 2021
- LAM RESEARCH CORPORATION
- Iqbal A. SHAREEF
- G01 - MEASURING TESTING
Information Patent Application
MEMS-BASED CORIOLIS MASS FLOW CONTROLLER
- Publication number 20210096011
- Publication date Apr 1, 2021
- LAM RESEARCH CORPORATION
- Dennis SMITH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURE OF AN ORIFICE PLATE FOR USE IN GAS CALIBRATION
- Publication number 20190308286
- Publication date Oct 10, 2019
- LAM RESEARCH CORPORATION
- Dennis Smith
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
TURBOMOLECULAR PUMP DEPOSITION CONTROL AND PARTICLE MANAGEMENT
- Publication number 20190285090
- Publication date Sep 19, 2019
- LAM RESEARCH CORPORATION
- Dennis Smith
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
Mass Flow Controller for Substrate Processing
- Publication number 20190279888
- Publication date Sep 12, 2019
- LAM RESEARCH CORPORATION
- Sudhakar Gopalakrishnan
- G05 - CONTROLLING REGULATING
Information Patent Application
Processing apparatus having integrated pumping system
- Publication number 20050034767
- Publication date Feb 17, 2005
- Peter Reimer
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
Turbo-molecular pump having enhanced pumping capacity
- Publication number 20020076317
- Publication date Jun 20, 2002
- APPLIED MATERIALS, INC.
- Peter Reimer
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...

Dennis Smith

Person

Patents Grantslast 30 patents

MEMS-based Coriolis mass flow controller

MEMS coriolis gas flow controller

Manufacture of an orifice plate for use in gas calibration

Turbomolecular pump deposition control and particle management

Mass flow controller for substrate processing

Processing apparatus having integrated pumping system

Processing apparatus having integrated pumping system

Processing apparatus having integrated pumping system

Turbo-molecular pump having enhanced pumping capacity

Apparatus and method for regulating a pressure in a chamber

Patents Applicationslast 30 patents

COMPONENT WITH PROTECTIVE SURFACE FOR PROCESSING CHAMBER

SEMICONDUCTOR EQUIPMENT MODULE FABRICATION WITH ADDITIVE MANUFACTURING

MEMS CORIOLIS GAS FLOW CONTROLLER

MEMS-BASED CORIOLIS MASS FLOW CONTROLLER

MANUFACTURE OF AN ORIFICE PLATE FOR USE IN GAS CALIBRATION

TURBOMOLECULAR PUMP DEPOSITION CONTROL AND PARTICLE MANAGEMENT

Mass Flow Controller for Substrate Processing

Processing apparatus having integrated pumping system

Turbo-molecular pump having enhanced pumping capacity