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Derek C. Stoll
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Hopewell Junction, NY, US
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last 30 patents
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Patent Grant
Providing a dynamic sampling plan for integrated metrology
Patent number
7,577,537
Issue date
Aug 18, 2009
International Business Machines Corporation
Gary W. Behm
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Method and system for reducing the variation in film thickness on a...
Patent number
7,509,186
Issue date
Mar 24, 2009
International Business Machines Corporation
Yue Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system of providing a dynamic sampling plan for integrat...
Patent number
7,398,172
Issue date
Jul 8, 2008
International Business Machines Corporation
Gary W. Behm
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Patents Applications
last 30 patents
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Patent Application
PROVIDING A DYNAMIC SAMPLING PLAN FOR INTEGRATED METROLOGY
Publication number
20080167830
Publication date
Jul 10, 2008
International Business Machines Corporation
Gary W. Behm
G05 - CONTROLLING REGULATING
Information
Patent Application
METHOD AND SYSTEM FOR REDUCING THE VARIATION IN FILM THICKNESS ON A...
Publication number
20080124818
Publication date
May 29, 2008
International Business Machines Corporation
Yue Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM OF PROVIDING A DYNAMIC SAMPLING PLAN FOR INTEGRAT...
Publication number
20070282549
Publication date
Dec 6, 2007
International Business Machines Corporation
Gary W. Behm
G05 - CONTROLLING REGULATING