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Derrick W. Foster

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  • Scottsdale, AZ, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    In situ growth of oxide and silicon layers
    • Patent number 8,317,921
    • Issue date Nov 27, 2012
    • ASM America, Inc.
    • Armand Ferro
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer support system
    • Patent number 7,655,093
    • Issue date Feb 2, 2010
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer support system
    • Patent number 7,186,298
    • Issue date Mar 6, 2007
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    In situ growth of oxide and silicon layers
    • Patent number 7,112,538
    • Issue date Sep 26, 2006
    • ASM America, Inc.
    • Armand Ferro
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    In situ growth of oxide and silicon layers
    • Patent number 7,105,055
    • Issue date Sep 12, 2006
    • ASM America, Inc.
    • Armand Ferro
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    In situ growth of oxide and silicon layers
    • Patent number 6,749,687
    • Issue date Jun 15, 2004
    • ASM America, Inc.
    • Armand Ferro
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer support system
    • Patent number 6,692,576
    • Issue date Feb 17, 2004
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Process chamber with rectangular temperature compensation ring
    • Patent number 6,608,287
    • Issue date Aug 19, 2003
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer support system
    • Patent number 6,491,757
    • Issue date Dec 10, 2002
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Process chamber with downstream getter plate
    • Patent number 6,464,792
    • Issue date Oct 15, 2002
    • ASM America, Inc.
    • John F. Wengert
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer support system
    • Patent number 6,454,866
    • Issue date Sep 24, 2002
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer support system
    • Patent number 6,343,183
    • Issue date Jan 29, 2002
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer support system
    • Patent number 6,203,622
    • Issue date Mar 20, 2001
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer support system
    • Patent number 6,113,702
    • Issue date Sep 5, 2000
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Process chamber with inner support
    • Patent number 6,093,252
    • Issue date Jul 25, 2000
    • ASM America, Inc.
    • John F. Wengert
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Low-mass susceptor
    • Patent number 6,086,680
    • Issue date Jul 11, 2000
    • ASM America, Inc.
    • Derrick W. Foster
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer support system
    • Patent number 6,053,982
    • Issue date Apr 25, 2000
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    OXIDE-CONTAINING FILM FORMED FROM SILICON
    • Publication number 20100117203
    • Publication date May 13, 2010
    • AVIZA TECHNOLOGY, INC.
    • Robert Jeffrey Bailey
    • C30 - CRYSTAL GROWTH
  • Information Patent Application

    WAFER SUPPORT SYSTEM
    • Publication number 20070131173
    • Publication date Jun 14, 2007
    • ASM AMERICA, INC
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    In situ growth of oxide and silicon layers
    • Publication number 20050205010
    • Publication date Sep 22, 2005
    • Armand Ferro
    • C30 - CRYSTAL GROWTH
  • Information Patent Application

    In situ growth of oxide and silicon layers
    • Publication number 20040206297
    • Publication date Oct 21, 2004
    • Armand Ferro
    • C30 - CRYSTAL GROWTH
  • Information Patent Application

    Wafer support system
    • Publication number 20040198153
    • Publication date Oct 7, 2004
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Wafer support system
    • Publication number 20030075274
    • Publication date Apr 24, 2003
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    In situ growth of oxide and silicon layers
    • Publication number 20030073293
    • Publication date Apr 17, 2003
    • Armand Ferro
    • C30 - CRYSTAL GROWTH
  • Information Patent Application

    Process chamber with rectangular temperature compensation ring
    • Publication number 20020179586
    • Publication date Dec 5, 2002
    • John F. Wengert
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Wafer support system
    • Publication number 20010054390
    • Publication date Dec 27, 2001
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...