Detlef Michelsson

Person

Wetzlar-Naunheim, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method for inspection and detection of defects on surfaces of disc-...
- Patent number 8,705,837
- Issue date Apr 22, 2014
- KLA-Tencor MIE GmbH
- Detlef Michelsson
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for processing the image data of the surface o...
- Patent number 8,264,534
- Issue date Sep 11, 2012
- Vistec Semiconductor Systems GmbH
- Detlef Michelsson
- G01 - MEASURING TESTING
Information Patent Grant
Method for the optical inspection and visualization of optical meas...
- Patent number 8,200,003
- Issue date Jun 12, 2012
- Vistec Semiconductor Systems GmbH
- Detlef Michelsson
- G01 - MEASURING TESTING
Information Patent Grant
Method for inspecting a surface of a wafer with regions of differen...
- Patent number 8,200,004
- Issue date Jun 12, 2012
- Vistec Semiconductor Systems GmbH
- Detlef Michelsson
- G01 - MEASURING TESTING
Information Patent Grant
Method for determining the position of the edge bead removal line o...
- Patent number 7,973,931
- Issue date Jul 5, 2011
- Vistec Semiconductor Systems GmbH
- Detlef Michelsson
- G01 - MEASURING TESTING
Information Patent Grant
Detecting defects by three-way die-to-die comparison with false maj...
- Patent number 7,657,077
- Issue date Feb 2, 2010
- Vistec Semiconductor Systems GmbH
- Detlef Michelsson
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of detecting incomplete edge bead removal from a disk-like o...
- Patent number 7,477,370
- Issue date Jan 13, 2009
- Vistec Semiconductor Systems GmbH
- Detlef Michelsson
- G01 - MEASURING TESTING
Information Patent Grant
Method, device and software for the optical inspection of a semi-co...
- Patent number 7,417,719
- Issue date Aug 26, 2008
- Leica Microsystems Semiconductor GmbH
- Detlef Michelsson
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for inspection of a wafer
- Patent number 7,292,328
- Issue date Nov 6, 2007
- Vistec Semiconductor Systems GmbH
- Albert Kreh
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for scanning a semiconductor wafer
- Patent number 7,193,699
- Issue date Mar 20, 2007
- Vistec Semiconductor Systems GmbH
- Detlef Michelsson
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Method for Inspection and Detection of Defects on Surfaces of Disc-...
- Publication number 20120163698
- Publication date Jun 28, 2012
- KLA-TENCOR MIE GMBH
- Detlef Michelsson
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method for inspecting a surface of a wafer with regions of differen...
- Publication number 20090161942
- Publication date Jun 25, 2009
- Vistec Semiconductor Systems GmbH
- Detlef Michelsson
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for processing the image of the surface of a w...
- Publication number 20090153657
- Publication date Jun 18, 2009
- Vistec Semiconductor Systems GmbH
- Detlef Michelsson
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method for determining the position of the edge bead removal line o...
- Publication number 20090130784
- Publication date May 21, 2009
- Vistec Semiconductor Systems GmbH
- Detlef Michelsson
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method for the optical inspection and visualization of optical meas...
- Publication number 20090052766
- Publication date Feb 26, 2009
- Vistec Semiconductor Systems GmbH
- Detlef Michelsson
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR DETECTING DEFECTS ON THE BACK SIDE OF A SEMICONDUCTOR WAFER
- Publication number 20080249728
- Publication date Oct 9, 2008
- Vistec Semiconductor Systems GmbH
- Detlef Michelsson
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method of optically inspecting and visualizing optical measuring va...
- Publication number 20080062415
- Publication date Mar 13, 2008
- Vistec Semiconductor Systems GmbH
- Detlef Michelsson
- G01 - MEASURING TESTING
Information Patent Application
Method of detecting incomplete edge bead removal from a disk-like o...
- Publication number 20070076194
- Publication date Apr 5, 2007
- Vistec Semiconductor Systems GmbH
- Detlef Michelsson
- G01 - MEASURING TESTING
Information Patent Application
Method for evaluating reproduced images of wafers
- Publication number 20060240580
- Publication date Oct 26, 2006
- Detlef Michelsson
- G01 - MEASURING TESTING
Information Patent Application
Method for detecting defects in images
- Publication number 20060204109
- Publication date Sep 14, 2006
- Leica Microsystems Semiconductor GmbH
- Detlef Michelsson
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method, device and software for the optical inspection of a semi-co...
- Publication number 20060176476
- Publication date Aug 10, 2006
- Detlef Michelsson
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method for inspecting a wafer
- Publication number 20060103838
- Publication date May 18, 2006
- Leica Microsystems Semiconductor GmbH
- Joerg Richter
- G01 - MEASURING TESTING
Information Patent Application
Method for inspection of a wafer
- Publication number 20050134839
- Publication date Jun 23, 2005
- LEICA MICROSYSTEMS SEMICONDUCTOR GmbH
- Albert Kreh
- G01 - MEASURING TESTING
Information Patent Application
Method for defect segmentation in features on semiconductor substrates
- Publication number 20050008217
- Publication date Jan 13, 2005
- LEICA MICROSYSTEMS SEMICONDUCTOR GmbH
- Thin Van Luu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and apparatus for scanning a semiconductor wafer
- Publication number 20050002022
- Publication date Jan 6, 2005
- Leica Microsystems Semiconductor GmbH
- Detlef Michelsson
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for examining semiconductor wafers in a contex...
- Publication number 20040165764
- Publication date Aug 26, 2004
- Leica Microsystems Semiconductor GmbH
- Detlef Michelsson
- G01 - MEASURING TESTING

Detlef Michelsson

Person

Patents Grantslast 30 patents

Method for inspection and detection of defects on surfaces of disc-...

Method and apparatus for processing the image data of the surface o...

Method for the optical inspection and visualization of optical meas...

Method for inspecting a surface of a wafer with regions of differen...

Method for determining the position of the edge bead removal line o...

Detecting defects by three-way die-to-die comparison with false maj...

Method of detecting incomplete edge bead removal from a disk-like o...

Method, device and software for the optical inspection of a semi-co...

Method for inspection of a wafer

Method and apparatus for scanning a semiconductor wafer

Patents Applicationslast 30 patents

Method for Inspection and Detection of Defects on Surfaces of Disc-...

Method for inspecting a surface of a wafer with regions of differen...

Method and apparatus for processing the image of the surface of a w...

Method for determining the position of the edge bead removal line o...

Method for the optical inspection and visualization of optical meas...

METHOD FOR DETECTING DEFECTS ON THE BACK SIDE OF A SEMICONDUCTOR WAFER

Method of optically inspecting and visualizing optical measuring va...

Method of detecting incomplete edge bead removal from a disk-like o...

Method for evaluating reproduced images of wafers

Method for detecting defects in images

Method, device and software for the optical inspection of a semi-co...

Method for inspecting a wafer

Method for inspection of a wafer

Method for defect segmentation in features on semiconductor substrates

Method and apparatus for scanning a semiconductor wafer

Method and apparatus for examining semiconductor wafers in a contex...