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Dirk-Jan Bijvoet
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Eindhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus having a chuck with a visco-elastic damping...
Patent number
8,928,860
Issue date
Jan 6, 2015
ASML Netherlands B.V.
Peter Paul Hempenius
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Servo control system, lithographic apparatus and control method
Patent number
8,830,442
Issue date
Sep 9, 2014
AMSL Netherlands B.V.
Youssef Karel Maria De Vos
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus having a substrate support with open cell pl...
Patent number
8,400,617
Issue date
Mar 19, 2013
ASML Netherlands B.V.
Engelbertus Antonius Fransiscus Van Der Pasch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, stage apparatus and device manufacturing me...
Patent number
8,384,881
Issue date
Feb 26, 2013
ASML Netherlands B.V.
Joost Jeroen Ottens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and methods for compensating substrate unfla...
Patent number
8,345,265
Issue date
Jan 1, 2013
ASML Netherlands B.V.
Dirk-Jan Bijvoet
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method and position co...
Patent number
8,330,940
Issue date
Dec 11, 2012
ASML Netherlands B.V.
Dirk-Jan Bijvoet
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Device manufacturing method, method for holding a patterning device...
Patent number
7,933,000
Issue date
Apr 26, 2011
ASML Netherlands B.V.
Johannes Onvlee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,884,919
Issue date
Feb 8, 2011
ASML Netherlands B.V.
Peter Hempenius
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,733,463
Issue date
Jun 8, 2010
ASML Netherlands B.V.
Marcel Koenraad Marie Baggen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,675,607
Issue date
Mar 9, 2010
ASML Netherlands B.V.
Andre Bernardus Jeunink
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,633,600
Issue date
Dec 15, 2009
ASML Netherlands B.V.
Johannes Onvlee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and exposure method
Patent number
7,525,636
Issue date
Apr 28, 2009
ASML Netherlands B.V.
Dirk-Jan Bijvoet
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Stage apparatus, lithographic apparatus and device manufacturing me...
Patent number
7,459,701
Issue date
Dec 2, 2008
ASML Netherlands B.V.
Marcel Koenraad Marie Baggen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,408,615
Issue date
Aug 5, 2008
ASML Netherlands B.V.
Jan Jaap Kuit
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,372,549
Issue date
May 13, 2008
ASML Netherlands B.V.
Dirk-Jan Bijvoet
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System and method for an improved illumination system in a lithogra...
Patent number
7,355,677
Issue date
Apr 8, 2008
ASML Netherlands B.V.
Dirk-Jan Bijvoet
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,349,067
Issue date
Mar 25, 2008
ASML Netherlands B.V.
Jan Jaap Kuit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,345,736
Issue date
Mar 18, 2008
ASML Netherlands B.V.
Jan Jaap Kuit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment system, alignment method, and lithographic apparatus
Patent number
7,151,591
Issue date
Dec 19, 2006
ASML Netherlands B.V.
Dirk-Jan Bijvoet
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,106,420
Issue date
Sep 12, 2006
ASML Netherlands B.V.
Jan Jaap Kuit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHIC APPARATUS HAVING A SUBSTRATE SUPPORT WITH OPEN CELL PL...
Publication number
20100271611
Publication date
Oct 28, 2010
ASML NETHERLANDS B.V.
Engelbertus, Antonius, Fransiscus Van Der Pasch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHODS FOR COMPENSATING SUBSTRATE UNFLA...
Publication number
20100129741
Publication date
May 27, 2010
ASML NETHERLANDS B.V.
Dirk-Jan Bijvoet
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND POSITION CO...
Publication number
20100102413
Publication date
Apr 29, 2010
ASML NETHERLANDS B.V.
Dirk-Jan Bijvoet
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS HAVING A CHUCK WITH A VISCO-ELASTIC DAMPING...
Publication number
20090231567
Publication date
Sep 17, 2009
ASML NETHERLANDS B.V.
Peter Paul HEMPENIUS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Servo Control System, Lithographic Apparatus and Control Method
Publication number
20090147236
Publication date
Jun 11, 2009
ASML NETHERLANDS B.V.
Youssef Karel Maria De Vos
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, STAGE APPARATUS AND DEVICE MANUFACTURING ME...
Publication number
20090086180
Publication date
Apr 2, 2009
ASML NETHERLANDS B.V.
Joost Jeroen OTTENS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND EXPOSURE METHOD
Publication number
20090073402
Publication date
Mar 19, 2009
ASML NETHERLANDS B.V.
Dirk-Jan Bijvoet
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20080117391
Publication date
May 22, 2008
ASML NETHERLANDS B.V.
Johannes Onvlee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20080013068
Publication date
Jan 17, 2008
ASML NETHERLANDS B.V.
Andre Bernardus Jeunink
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20070258081
Publication date
Nov 8, 2007
ASML NETHERLANDS B.V.
Marcel Koenraad Marie Baggen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus, Support, Device Manufacturing Method, and a...
Publication number
20070228295
Publication date
Oct 4, 2007
ASML NETHERLANDS B.V.
Dirk-Jan Bijvoet
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20070182947
Publication date
Aug 9, 2007
ASML NETHERLANDS B.V.
Peter Hempenius
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20070099099
Publication date
May 3, 2007
ASML NETHERLANDS B.V.
Johannes Onvlee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060290915
Publication date
Dec 28, 2006
ASML NETHERLANDS B.V.
Dirk Jan Bijvoet
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Stage apparatus, lithographic apparatus and device manufacturing me...
Publication number
20060279721
Publication date
Dec 14, 2006
ASML NETHERLANDS B.V.
Marcel Koenraad Marie Baggen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060126047
Publication date
Jun 15, 2006
ASML NETHERLANDS B.V.
Dirk-Jan Bijvoet
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060066833
Publication date
Mar 30, 2006
ASML NETHERLANDS B.V.
Jan Jaap Kuit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Alignment system, alignment method, and lithographic apparatus
Publication number
20060066827
Publication date
Mar 30, 2006
ASML NETHERLANDS B.V.
Dirk-Jan Bijvoet
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050280788
Publication date
Dec 22, 2005
ASML NETHERLANDS B.V.
Jan Jaap Kuit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050280797
Publication date
Dec 22, 2005
ASML NETHERLANDS B.V.
Jan Jaap Kuit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050280798
Publication date
Dec 22, 2005
ASML NETHERLANDS B.V.
Jan Jaap Kuit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY