Dirk Zeidler

Person

Oberkochen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Multi-beam particle beam system and method for operating same
- Patent number 12,255,040
- Issue date Mar 18, 2025
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system for azimuthal deflection of individual particl...
- Patent number 12,249,478
- Issue date Mar 11, 2025
- Carl Zeiss MultiSEM GmbH
- Hans Fritz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system and the use thereof for flexibly setting the c...
- Patent number 12,119,204
- Issue date Oct 15, 2024
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for operating a multi-beam particle beam microscope
- Patent number 12,094,683
- Issue date Sep 17, 2024
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System comprising a multi-beam particle microscope and method for o...
- Patent number 11,935,721
- Issue date Mar 19, 2024
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for operating a multi-beam particle beam microscope
- Patent number 11,735,393
- Issue date Aug 22, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of recording an image using a particle microscope
- Patent number 11,728,130
- Issue date Aug 15, 2023
- Carl Zeiss SMT GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system and method for the particle-optical examinatio...
- Patent number 11,657,999
- Issue date May 23, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for detector equalization during the imaging of objects with...
- Patent number 11,645,740
- Issue date May 9, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Particle beam system for adjusting the current of individual partic...
- Patent number 11,562,880
- Issue date Jan 24, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system
- Patent number 11,562,881
- Issue date Jan 24, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of imaging a 2D sample with a multi-beam particle microscope
- Patent number 11,521,827
- Issue date Dec 6, 2022
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system and method
- Patent number 11,239,053
- Issue date Feb 1, 2022
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system
- Patent number 11,164,715
- Issue date Nov 2, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam particle microscope
- Patent number 11,158,482
- Issue date Oct 26, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System combination of a particle beam system and a light-optical sy...
- Patent number 11,087,955
- Issue date Aug 10, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam charged particle system
- Patent number 11,087,948
- Issue date Aug 10, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of imaging a 3D sample with a multi-beam particle microscope
- Patent number 11,069,508
- Issue date Jul 20, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system and method for the particle-optical examinatio...
- Patent number 11,049,686
- Issue date Jun 29, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system and method
- Patent number 10,896,800
- Issue date Jan 19, 2021
- Carl Zeiss MultiSEM GmbH
- Christoph Riedesel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system
- Patent number 10,811,215
- Issue date Oct 20, 2020
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam charged particle system
- Patent number 10,741,355
- Issue date Aug 11, 2020
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system
- Patent number 10,600,613
- Issue date Mar 24, 2020
- Carl Zeiss Microscopy GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system and method for the particle-optical examinatio...
- Patent number 10,535,494
- Issue date Jan 14, 2020
- Carl Zeiss Microscopy GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for operating a multi-beam particle microscope
- Patent number 10,388,487
- Issue date Aug 20, 2019
- Carl Zeiss Microscopy GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system and method for the particle-optical examinatio...
- Patent number 10,163,603
- Issue date Dec 25, 2018
- Carl Zeiss Microscopy GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system
- Patent number 10,147,582
- Issue date Dec 4, 2018
- Carl Zeiss Microscopy GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and devices for charge compensation
- Patent number 10,115,558
- Issue date Oct 30, 2018
- Carl Zeiss Microscopy GmbH
- Andreas Schmaunz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system and method for operating a particle optical unit
- Patent number 9,991,089
- Issue date Jun 5, 2018
- Carl Zeiss Microscopy GmbH
- Ingo Mueller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system and method for operating a particle optical unit
- Patent number 9,799,485
- Issue date Oct 24, 2017
- Carl Zeiss Microscopy GmbH
- Ingo Mueller
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR DETERMINING A DISTORTION-CORRECTED POSITION OF A FEATURE...
- Publication number 20250006459
- Publication date Jan 2, 2025
- Carl Zeiss MultiSEM GmbH
- Daniel Weiss
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM MICROSCOPE
- Publication number 20240312759
- Publication date Sep 19, 2024
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM PARTICLE BEAM SYSTEM
- Publication number 20240234080
- Publication date Jul 11, 2024
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM COMPRISING A MULTI-BEAM PARTICLE MICROSCOPE AND METHOD FOR O...
- Publication number 20240212977
- Publication date Jun 27, 2024
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM GENERATING UNIT WITH INCREASED FOCUSING POWER
- Publication number 20240170252
- Publication date May 23, 2024
- Carl Zeiss MultiSEM GmbH
- Yanko Sarov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM PARTICLE BEAM SYSTEM
- Publication number 20240136146
- Publication date Apr 25, 2024
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM CHARGED PARTICLE BEAM SYSTEM WITH ANISOTROPIC FILTERING...
- Publication number 20240128051
- Publication date Apr 18, 2024
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISTORTION OPTIMIZED MULTI-BEAM SCANNING SYSTEM
- Publication number 20240096587
- Publication date Mar 21, 2024
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM CHARGED PARTICLE SYSTEM AND METHOD OF CONTROLLING THE WO...
- Publication number 20240079207
- Publication date Mar 7, 2024
- Carl Zeiss MultiSEM GmbH
- Michael Behnke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE PARTICLE BEAM MICROSCOPE AND ASSOCIATED METHOD WITH FAST A...
- Publication number 20230245852
- Publication date Aug 3, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM MICROSCOPE
- Publication number 20230215686
- Publication date Jul 6, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM WITH MULTI-SOURCE SYSTEM AND MULTI-BEAM PARTIC...
- Publication number 20230065475
- Publication date Mar 2, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH THROUGHPUT MULTI-BEAM CHARGED PARTICLE INSPECTION SYSTEM WITH...
- Publication number 20230043036
- Publication date Feb 9, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR AREA-WISE INSPECTING A SAMPLE VIA A MULTI-BEAM PARTICLE...
- Publication number 20230005708
- Publication date Jan 5, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERTAIN IMPROVEMENTS OF MULTI-BEAM GENERATING AND MULTI-BEAM DEFLEC...
- Publication number 20220392734
- Publication date Dec 8, 2022
- Carl Zeiss MultiSEM GmbH
- Yanko Sarov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM INCLUDING A MULTI-BEAM DEFLECTION DEVICE AND A...
- Publication number 20220277927
- Publication date Sep 1, 2022
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR VOLTAGE CONTRAST IMAGING WITH A CORPUSCULAR MULTI-BEAM M...
- Publication number 20220254600
- Publication date Aug 11, 2022
- Carl Zeiss MultiSEM GmbH
- Gregor Frank Dellemann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE PARTICLE BEAM MICROSCOPE AND ASSOCIATED METHOD WITH AN IMP...
- Publication number 20220246388
- Publication date Aug 4, 2022
- Carl Zeiss MultiSEM GmbH
- Nicole Rauwolf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM AND THE USE THEREOF FOR FLEXIBLY SETTING THE C...
- Publication number 20220139665
- Publication date May 5, 2022
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam System
- Publication number 20220108864
- Publication date Apr 7, 2022
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM FOR AZIMUTHAL DEFLECTION OF INDIVIDUAL PARTICL...
- Publication number 20220102104
- Publication date Mar 31, 2022
- Carl Zeiss MultiSEM GmbH
- Hans Fritz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF IMAGING A 2D SAMPLE WITH A MULTI-BEAM PARTICLE MICROSCOPE
- Publication number 20210351001
- Publication date Nov 11, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM COMPRISING A MULTI-BEAM PARTICLE MICROSCOPE AND METHOD FOR O...
- Publication number 20210343499
- Publication date Nov 4, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...
- Publication number 20210313137
- Publication date Oct 7, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF RECORDING AN IMAGE USING A PARTICLE MICROSCOPE
- Publication number 20210296089
- Publication date Sep 23, 2021
- Carl Zeiss SMT GMBH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING SAME
- Publication number 20210217577
- Publication date Jul 15, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM FOR ADJUSTING THE CURRENT OF INDIVIDUAL PARTIC...
- Publication number 20210210303
- Publication date Jul 8, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM MICROSCOPE
- Publication number 20210210306
- Publication date Jul 8, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DETECTOR EQUALIZATION DURING THE IMGAGING OF OBJECTS WIT...
- Publication number 20210192700
- Publication date Jun 24, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Particle Beam System
- Publication number 20210142980
- Publication date May 13, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS

Dirk Zeidler

Person

Patents Grantslast 30 patents

Multi-beam particle beam system and method for operating same

Particle beam system for azimuthal deflection of individual particl...

Particle beam system and the use thereof for flexibly setting the c...

Method for operating a multi-beam particle beam microscope

System comprising a multi-beam particle microscope and method for o...

Method for operating a multi-beam particle beam microscope

Method of recording an image using a particle microscope

Particle beam system and method for the particle-optical examinatio...

Method for detector equalization during the imaging of objects with...

Particle beam system for adjusting the current of individual partic...

Charged particle beam system

Method of imaging a 2D sample with a multi-beam particle microscope

Charged particle beam system and method

Charged particle beam system

Multi-beam particle microscope

System combination of a particle beam system and a light-optical sy...

Multi-beam charged particle system

Method of imaging a 3D sample with a multi-beam particle microscope

Particle beam system and method for the particle-optical examinatio...

Charged particle beam system and method

Charged particle beam system

Multi-beam charged particle system

Particle beam system

Particle beam system and method for the particle-optical examinatio...

Method for operating a multi-beam particle microscope

Particle beam system and method for the particle-optical examinatio...

Particle beam system

Methods and devices for charge compensation

Particle beam system and method for operating a particle optical unit

Particle beam system and method for operating a particle optical unit

Patents Applicationslast 30 patents

METHOD FOR DETERMINING A DISTORTION-CORRECTED POSITION OF A FEATURE...

METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM MICROSCOPE

MULTI-BEAM PARTICLE BEAM SYSTEM

SYSTEM COMPRISING A MULTI-BEAM PARTICLE MICROSCOPE AND METHOD FOR O...

MULTI-BEAM GENERATING UNIT WITH INCREASED FOCUSING POWER

MULTI-BEAM PARTICLE BEAM SYSTEM

MULTI-BEAM CHARGED PARTICLE BEAM SYSTEM WITH ANISOTROPIC FILTERING...

DISTORTION OPTIMIZED MULTI-BEAM SCANNING SYSTEM

MULTI-BEAM CHARGED PARTICLE SYSTEM AND METHOD OF CONTROLLING THE WO...

MULTIPLE PARTICLE BEAM MICROSCOPE AND ASSOCIATED METHOD WITH FAST A...

METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM MICROSCOPE

PARTICLE BEAM SYSTEM WITH MULTI-SOURCE SYSTEM AND MULTI-BEAM PARTIC...

HIGH THROUGHPUT MULTI-BEAM CHARGED PARTICLE INSPECTION SYSTEM WITH...

METHOD FOR AREA-WISE INSPECTING A SAMPLE VIA A MULTI-BEAM PARTICLE...

CERTAIN IMPROVEMENTS OF MULTI-BEAM GENERATING AND MULTI-BEAM DEFLEC...

PARTICLE BEAM SYSTEM INCLUDING A MULTI-BEAM DEFLECTION DEVICE AND A...

METHOD FOR VOLTAGE CONTRAST IMAGING WITH A CORPUSCULAR MULTI-BEAM M...

MULTIPLE PARTICLE BEAM MICROSCOPE AND ASSOCIATED METHOD WITH AN IMP...

PARTICLE BEAM SYSTEM AND THE USE THEREOF FOR FLEXIBLY SETTING THE C...

Charged Particle Beam System

PARTICLE BEAM SYSTEM FOR AZIMUTHAL DEFLECTION OF INDIVIDUAL PARTICL...

METHOD OF IMAGING A 2D SAMPLE WITH A MULTI-BEAM PARTICLE MICROSCOPE

SYSTEM COMPRISING A MULTI-BEAM PARTICLE MICROSCOPE AND METHOD FOR O...

PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...

METHOD OF RECORDING AN IMAGE USING A PARTICLE MICROSCOPE

MULTI-BEAM PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING SAME

PARTICLE BEAM SYSTEM FOR ADJUSTING THE CURRENT OF INDIVIDUAL PARTIC...

METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM MICROSCOPE

METHOD FOR DETECTOR EQUALIZATION DURING THE IMGAGING OF OBJECTS WIT...

Particle Beam System