Dmitry KLOCHKOV

Person

Schwaebisch Gmuend, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and evaluation devices for analyzing three-dimensional data...
- Patent number 12,148,139
- Issue date Nov 19, 2024
- Carl Zeiss SMT GmbH
- Ramani Pichumani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Wafer-tilt determination for slice-and-image process
- Patent number 12,056,865
- Issue date Aug 6, 2024
- Carl Zeiss SMT GmbH
- Dmitry Klochkov
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for measuring a sample and microscope implementing the method
- Patent number 11,915,908
- Issue date Feb 27, 2024
- Carl Zeiss SMT GmbH
- Eugen Foca
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for measuring a sample and microscope implementing the method
- Patent number 11,848,172
- Issue date Dec 19, 2023
- Carl Zeiss SMT GmbH
- Dmitry Klochkov
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DUAL BEAM SYSTEMS AND METHODS FOR DECOUPLING THE WORKING DISTANCE O...
- Publication number 20250069958
- Publication date Feb 27, 2025
- Carl Zeiss SMT GMBH
- Alex Buxbaum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREASED THROUGH...
- Publication number 20250022680
- Publication date Jan 16, 2025
- Carl Zeiss SMT GMBH
- Dmitry Klochkov
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF 3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREAS...
- Publication number 20240328970
- Publication date Oct 3, 2024
- Carl Zeiss SMT GMBH
- Dmitry Klochkov
- G01 - MEASURING TESTING
Information Patent Application
3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREASED ACCURACY
- Publication number 20240331179
- Publication date Oct 3, 2024
- Carl Zeiss SMT GMBH
- Dmitry Klochkov
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MEASUREMENT METHOD AND APPARATUS FOR SEMICONDUCTOR FEATURES WITH IN...
- Publication number 20240311698
- Publication date Sep 19, 2024
- Carl Zeiss SMT GMBH
- Alexander Freytag
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
3D VOLUME INSPECTION METHOD AND METHOD OF CONFIGURING OF A 3D VOLUM...
- Publication number 20240281952
- Publication date Aug 22, 2024
- Carl Zeiss SMT GMBH
- Thomas Korb
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEGMENTATION OR CROSS SECTIONS OF HIGH ASPECT RATIO STRUCTURES
- Publication number 20240087134
- Publication date Mar 14, 2024
- Carl Zeiss SMT GMBH
- Dmitry Klochkov
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PARAMETERIZING X-RAY SCATTERING MEASUREMENT USING SLICE-AND-IMAGE T...
- Publication number 20230343619
- Publication date Oct 26, 2023
- Carl Zeiss SMT GMBH
- Hans-Michael Stiepan
- G01 - MEASURING TESTING
Information Patent Application
TRANSFERRING ALIGNMENT INFORMATION IN 3D TOMOGRAPHY FROM A FIRST SE...
- Publication number 20230267627
- Publication date Aug 24, 2023
- Carl Zeiss SMT GMBH
- Thomas Korb
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MEASUREMENT METHOD AND APPARATUS FOR SEMICONDUCTOR FEATURES WITH IN...
- Publication number 20230196189
- Publication date Jun 22, 2023
- Carl Zeiss SMT GMBH
- Alexander Freytag
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS AND EVALUATION DEVICES FOR ANALYZING THREE-DIMENSIONAL DATA...
- Publication number 20230169636
- Publication date Jun 1, 2023
- Carl Zeiss SMT GMBH
- Ramani Pichumani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR MEASURING A SAMPLE AND MICROSCOPE IMPLEMENTING THE METHOD
- Publication number 20230145897
- Publication date May 11, 2023
- Carl Zeiss SMT GMBH
- Dmitry Klochkov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MEASURING A SAMPLE AND MICROSCOPE IMPLEMENTING THE METHOD
- Publication number 20230120847
- Publication date Apr 20, 2023
- Carl Zeiss SMT GMBH
- Eugen Foca
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER-TILT DETERMINATION FOR SLICE-AND-IMAGE PROCESS
- Publication number 20230115376
- Publication date Apr 13, 2023
- Carl Zeiss SMT GMBH
- Dmitry Klochkov
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS OF CROSS-SECTION IMAGING OF AN INSPECTION VOLUME IN A WAFER
- Publication number 20220392793
- Publication date Dec 8, 2022
- Carl Zeiss SMT GMBH
- Alex Buxbaum
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR ANALYZING AN IMAGE OF A MICROLITHOGRAPHIC...
- Publication number 20220383485
- Publication date Dec 1, 2022
- Carl Zeiss SMT GMBH
- Mario Laengle
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CONTACT AREA SIZE DETERMINATION BETWEEN 3D STRUCTURES IN AN INTEGRA...
- Publication number 20220230899
- Publication date Jul 21, 2022
- Carl Zeiss SMT GMBH
- Alex Buxbaum
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
FIB-SEM 3D Tomography for measuring shape deviations of HAR structures
- Publication number 20220223445
- Publication date Jul 14, 2022
- Carl Zeiss SMT GMBH
- Amir Avishai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CROSS SECTION IMAGING WITH IMPROVED 3D VOLUME IMAGE RECONSTRUCTION...
- Publication number 20220138973
- Publication date May 5, 2022
- Carl Zeiss SMT GMBH
- Thomas Korb
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR CHARACTERISING AT LEAST ONE OPTICAL COMPONENT OF A PROJE...
- Publication number 20200218160
- Publication date Jul 9, 2020
- Carl Zeiss SMT GMBH
- Wilbert KRUITHOF
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Dmitry KLOCHKOV

Person

Patents Grantslast 30 patents

Methods and evaluation devices for analyzing three-dimensional data...

Wafer-tilt determination for slice-and-image process

Method for measuring a sample and microscope implementing the method

Method for measuring a sample and microscope implementing the method

Patents Applicationslast 30 patents

DUAL BEAM SYSTEMS AND METHODS FOR DECOUPLING THE WORKING DISTANCE O...

3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREASED THROUGH...

METHOD OF 3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREAS...

3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREASED ACCURACY

MEASUREMENT METHOD AND APPARATUS FOR SEMICONDUCTOR FEATURES WITH IN...

3D VOLUME INSPECTION METHOD AND METHOD OF CONFIGURING OF A 3D VOLUM...

SEGMENTATION OR CROSS SECTIONS OF HIGH ASPECT RATIO STRUCTURES

PARAMETERIZING X-RAY SCATTERING MEASUREMENT USING SLICE-AND-IMAGE T...

TRANSFERRING ALIGNMENT INFORMATION IN 3D TOMOGRAPHY FROM A FIRST SE...

MEASUREMENT METHOD AND APPARATUS FOR SEMICONDUCTOR FEATURES WITH IN...

METHODS AND EVALUATION DEVICES FOR ANALYZING THREE-DIMENSIONAL DATA...

METHOD FOR MEASURING A SAMPLE AND MICROSCOPE IMPLEMENTING THE METHOD

METHOD FOR MEASURING A SAMPLE AND MICROSCOPE IMPLEMENTING THE METHOD

WAFER-TILT DETERMINATION FOR SLICE-AND-IMAGE PROCESS

METHODS OF CROSS-SECTION IMAGING OF AN INSPECTION VOLUME IN A WAFER

METHOD AND APPARATUS FOR ANALYZING AN IMAGE OF A MICROLITHOGRAPHIC...

CONTACT AREA SIZE DETERMINATION BETWEEN 3D STRUCTURES IN AN INTEGRA...

FIB-SEM 3D Tomography for measuring shape deviations of HAR structures

CROSS SECTION IMAGING WITH IMPROVED 3D VOLUME IMAGE RECONSTRUCTION...

METHOD FOR CHARACTERISING AT LEAST ONE OPTICAL COMPONENT OF A PROJE...