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Donald Polner
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Marblehead, MA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Airflow management for particle abatement in semiconductor manufact...
Patent number
8,500,382
Issue date
Aug 6, 2013
Axcelis Technologies. Inc.
James S. Castantini
F24 - HEATING RANGES VENTILATING
Information
Patent Grant
Ion beam angle calibration and emittance measurement system for rib...
Patent number
8,168,941
Issue date
May 1, 2012
Axcelis Technologies, Inc.
Marvin Farley
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Workpiece handling alignment system
Patent number
7,321,299
Issue date
Jan 22, 2008
Axcelis Technologies, Inc.
Kevin R. Verrier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Continuously variable aperture for high-energy ion implanter
Patent number
6,207,964
Issue date
Mar 27, 2001
Axcelis Technologies, Inc.
Edward K. McIntyre
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ION BEAM ANGLE CALIBRATION AND EMITTANCE MEASUREMENT SYSTEM FOR RIB...
Publication number
20100181470
Publication date
Jul 22, 2010
Axcelis Technologies, Inc.
Marvin Farley
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AIRFLOW MANAGEMENT FOR PARTICLE ABATEMENT IN SEMICONDUCTOR MANUFACT...
Publication number
20080292432
Publication date
Nov 27, 2008
James S. Castantini
F24 - HEATING RANGES VENTILATING
Information
Patent Application
Workpiece handling alignment system
Publication number
20070008105
Publication date
Jan 11, 2007
Axcelis Technologies, Inc.
Kevin R. Verrier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ceramic end effector for micro circuit manufacturing
Publication number
20050110292
Publication date
May 26, 2005
Axcelis Technologies, Inc.
Paul W. Baumann
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
Ceramic end effector for micro circuit manufacturing
Publication number
20040100110
Publication date
May 27, 2004
Axcelis Technologies, Inc.
Paul W. Baumann
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS