TREA

Douglas H. Warenback

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  • San Rafael, CA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Spatula for wafer transport
    • Patent number 4,984,954
    • Issue date Jan 15, 1991
    • Douglas H. Warenback
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Spatula for wafer transport
    • Patent number 4,867,631
    • Issue date Sep 19, 1989
    • Tegal Corporation
    • Douglas H. Warenback
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Non-uniform gas inlet for dry etching apparatus
    • Patent number 4,780,169
    • Issue date Oct 25, 1988
    • Tegal Corporation
    • Mark M. Stark
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma reactor chuck assembly
    • Patent number 4,547,247
    • Issue date Oct 15, 1985
    • Tegal Corporation
    • Douglas H. Warenback
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...