Douglas Keil

Person

West Linn, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Mechanical suppression of parasitic plasma in substrate processing...
- Patent number 11,862,435
- Issue date Jan 2, 2024
- Lam Research Corporation
- Douglas Keil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Suppression of parasitic deposition in a substrate processing syste...
- Patent number 11,725,282
- Issue date Aug 15, 2023
- Novellus Systems, Inc.
- Chunguang Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mechanical suppression of parasitic plasma in substrate processing...
- Patent number 11,621,150
- Issue date Apr 4, 2023
- Lam Research Corporation
- Douglas Keil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for controlling plasma instability in semicondu...
- Patent number 11,393,729
- Issue date Jul 19, 2022
- Lam Research Corporation
- Yukinori Sakiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for suppressing parasitic plasma and reducing w...
- Patent number 11,127,567
- Issue date Sep 21, 2021
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Suppression of parasitic deposition in a substrate processing syste...
- Patent number 11,111,581
- Issue date Sep 7, 2021
- Lam Research Corporation
- Chunguang Xia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for determining film thickness using DC self-bi...
- Patent number 10,876,209
- Issue date Dec 29, 2020
- Novellus Systems, Inc.
- Edward J. Augustyniak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for suppressing parasitic plasma and reducing w...
- Patent number 10,665,429
- Issue date May 26, 2020
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for controlling plasma instability in semicondu...
- Patent number 10,510,625
- Issue date Dec 17, 2019
- Lam Research Corporation
- Yukinori Sakiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Carrier ring wall for reduction of back-diffusion of reactive speci...
- Patent number 10,475,627
- Issue date Nov 12, 2019
- Lam Research Corporation
- Chengzhu Qi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diagnostic and control systems and methods for substrate processing...
- Patent number 10,378,109
- Issue date Aug 13, 2019
- Novellus Systems, Inc.
- Edward Augustyniak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Suppression of parasitic deposition in a substrate processing syste...
- Patent number 10,287,683
- Issue date May 14, 2019
- Lam Research Corporation
- Chunguang Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mechanical suppression of parasitic plasma in substrate processing...
- Patent number 10,224,182
- Issue date Mar 5, 2019
- Novellus Systems, Inc.
- Douglas Keil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for detection of plasma instability by electric...
- Patent number 10,128,160
- Issue date Nov 13, 2018
- Lam Research Corporation
- Yukinori Sakiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for detection of plasma instability by optical...
- Patent number 10,121,708
- Issue date Nov 6, 2018
- Lam Research Corporation
- Yukinori Sakiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for frequency modulation of radiofrequency powe...
- Patent number 9,997,422
- Issue date Jun 12, 2018
- Lam Research Corporation
- Ishtak Karim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for using electrical asymmetry effect to contro...
- Patent number 9,941,113
- Issue date Apr 10, 2018
- Lam Research Corporation
- Douglas Keil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metrology methods to detect plasma in wafer cavity and use of the m...
- Patent number 9,875,883
- Issue date Jan 23, 2018
- Lam Research Corporation
- Yukinori Sakiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for detection of plasma instability by electric...
- Patent number 9,824,941
- Issue date Nov 21, 2017
- Lam Research Corporation
- Yukinori Sakiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for suppressing parasitic plasma and reducing w...
- Patent number 9,793,096
- Issue date Oct 17, 2017
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metrology methods to detect plasma in wafer cavity and use of the m...
- Patent number 9,754,769
- Issue date Sep 5, 2017
- Lam Research Corporation
- Yukinori Sakiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for using electrical asymmetry effect to contro...
- Patent number 9,644,271
- Issue date May 9, 2017
- Lam Research Corporation
- Douglas Keil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ceramic showerhead with embedded RF electrode for capacitively coup...
- Patent number 9,449,795
- Issue date Sep 20, 2016
- Novellus Systems, Inc.
- Mohamed Sabri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diagnostic and control systems and methods for substrate processing...
- Patent number 9,404,183
- Issue date Aug 2, 2016
- Novellus Systems, Inc.
- Edward Augustyniak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Suppression of parasitic deposition in a substrate processing syste...
- Patent number 9,388,494
- Issue date Jul 12, 2016
- Novellus Systems, Inc.
- Chunguang Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Passive capacitively-coupled electrostatic (CCE) probe method for d...
- Patent number 9,153,421
- Issue date Oct 6, 2015
- Lam Research Corporation
- Jean-Paul Booth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing system for detecting in-situ arcing events during substr...
- Patent number 9,129,779
- Issue date Sep 8, 2015
- Lam Research Corporation
- Jean-Paul Booth
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Apparatus and method for controlling plasma potential
- Patent number 9,111,724
- Issue date Aug 18, 2015
- Lam Research Corporation
- Douglas Keil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for automatically characterizing a plasma
- Patent number 8,849,585
- Issue date Sep 30, 2014
- Lam Research Corporation
- Douglas Keil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitively-coupled electrostatic (CCE) probe arrangement for dete...
- Patent number 8,780,522
- Issue date Jul 15, 2014
- Lam Research Corporation
- Jean-Paul Booth
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MECHANICAL SUPPRESSION OF PARASITIC PLASMA IN SUBSTRATE PROCESSING...
- Publication number 20240162013
- Publication date May 16, 2024
- LAM RESEARCH CORPORATION
- Douglas KEIL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MECHANICAL SUPPRESSION OF PARASITIC PLASMA IN SUBSTRATE PROCESSING...
- Publication number 20230238220
- Publication date Jul 27, 2023
- LAM RESEARCH CORPORATION
- Douglas KEIL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTERMITTENT STAGNANT FLOW
- Publication number 20230230820
- Publication date Jul 20, 2023
- LAM RESEARCH CORPORATION
- Douglas L. KEIL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUPPRESSION OF PARASITIC DEPOSITION IN A SUBSTRATE PROCESSING SYSTE...
- Publication number 20210381106
- Publication date Dec 9, 2021
- Novellus Systems, Inc.
- Chunguang Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...
- Publication number 20200335304
- Publication date Oct 22, 2020
- LAM RESEARCH CORPORATION
- Hu Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Controlling Plasma Instability in Semicondu...
- Publication number 20200098651
- Publication date Mar 26, 2020
- LAM RESEARCH CORPORATION
- Yukinori Sakiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR DETERMINING FILM THICKNESS USING DC SELF-BI...
- Publication number 20190360101
- Publication date Nov 28, 2019
- Novellus Systems, Inc.
- Edward J. AUGUSTYNIAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUPPRESSION OF PARASITIC DEPOSITION IN A SUBSTRATE PROCESSING SYSTE...
- Publication number 20190271081
- Publication date Sep 5, 2019
- LAM RESEARCH CORPORATION
- Chunguang XIA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MECHANICAL SUPPRESSION OF PARASITIC PLASMA IN SUBSTRATE PROCESSING...
- Publication number 20190172684
- Publication date Jun 6, 2019
- LAM RESEARCH CORPORATION
- Douglas KEIL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Detection of Plasma Instability by Electric...
- Publication number 20180076100
- Publication date Mar 15, 2018
- LAM RESEARCH CORPORATION
- Yukinori Sakiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...
- Publication number 20180068833
- Publication date Mar 8, 2018
- LAM RESEARCH CORPORATION
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Metrology Methods to Detect Plasma in Wafer Cavity and Use of the M...
- Publication number 20170338085
- Publication date Nov 23, 2017
- LAM RESEARCH CORPORATION
- Yukinori Sakiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for Using Electrical Asymmetry Effect to Contro...
- Publication number 20170330744
- Publication date Nov 16, 2017
- LAM RESEARCH CORPORATION
- Douglas Keil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARRIER RING WALL FOR REDUCTION OF BACK-DIFFUSION OF REACTIVE SPECI...
- Publication number 20170278681
- Publication date Sep 28, 2017
- LAM RESEARCH CORPORATION
- Chengzhu Qi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for Controlling Plasma Instability in Semicondu...
- Publication number 20170140968
- Publication date May 18, 2017
- LAM RESEARCH CORPORATION
- Yukinori Sakiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for Detection of Plasma Instability by Optical...
- Publication number 20170141001
- Publication date May 18, 2017
- LAM RESEARCH CORPORATION
- Yukinori Sakiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for Detection of Plasma Instability by Electric...
- Publication number 20170141000
- Publication date May 18, 2017
- LAM RESEARCH CORPORATION
- Yukinori Sakiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Frequency Modulation of Radiofrequency Powe...
- Publication number 20170141002
- Publication date May 18, 2017
- LAM RESEARCH CORPORATION
- Ishtak Karim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Metrology Methods to Detect Plasma in Wafer Cavity and Use of the M...
- Publication number 20170076921
- Publication date Mar 16, 2017
- LAM RESEARCH CORPORATION
- Yukinori Sakiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIAGNOSTIC AND CONTROL SYSTEMS AND METHODS FOR SUBSTRATE PROCESSING...
- Publication number 20160326650
- Publication date Nov 10, 2016
- Novellus Systems, Inc.
- Edward Augustyniak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUPPRESSION OF PARASITIC DEPOSITION IN A SUBSTRATE PROCESSING SYSTE...
- Publication number 20160289832
- Publication date Oct 6, 2016
- Novellus Systems, Inc
- Chunguang Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for Suppressing Parasitic Plasma and Reducing W...
- Publication number 20160079036
- Publication date Mar 17, 2016
- LAM RESEARCH CORPORATION
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS FOR AUTOMATICALLY CHARACTERIZING A PLASMA
- Publication number 20140367042
- Publication date Dec 18, 2014
- Douglas Keil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC SHOWERHEAD WITH EMBEDDED RF ELECTRODE FOR CAPACITIVELY COUP...
- Publication number 20140238608
- Publication date Aug 28, 2014
- Novellus Systems, Inc.
- Mohamed Sabri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUPPRESSION OF PARASITIC DEPOSITION IN A SUBSTRATE PROCESSING SYSTE...
- Publication number 20130344245
- Publication date Dec 26, 2013
- Novellus Systems, Inc.
- CHUNGUANG XIA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIAGNOSTIC AND CONTROL SYSTEMS AND METHODS FOR SUBSTRATE PROCESSING...
- Publication number 20130327272
- Publication date Dec 12, 2013
- Edward Augustyniak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MECHANICAL SUPPRESSION OF PARASITIC PLASMA IN SUBSTRATE PROCESSING...
- Publication number 20130092086
- Publication date Apr 18, 2013
- Novellus Systems, Inc.
- Douglas Keil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PASSIVE CAPACITIVELY-COUPLED ELECTROSTATIC (CCE) PROBE METHOD FOR D...
- Publication number 20120316834
- Publication date Dec 13, 2012
- Jean-Paul Booth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING SYSTEM FOR DETECTING IN-SITU ARCING EVENTS DURING SUBSTR...
- Publication number 20120259562
- Publication date Oct 11, 2012
- Jean-Paul Booth
- G01 - MEASURING TESTING
Information Patent Application
Variable-Density Plasma Processing of Semiconductor Substrates
- Publication number 20120164834
- Publication date Jun 28, 2012
- Kevin Jennings
- H01 - BASIC ELECTRIC ELEMENTS

Douglas Keil

Person

Patents Grantslast 30 patents

Mechanical suppression of parasitic plasma in substrate processing...

Suppression of parasitic deposition in a substrate processing syste...

Mechanical suppression of parasitic plasma in substrate processing...

Systems and methods for controlling plasma instability in semicondu...

Systems and methods for suppressing parasitic plasma and reducing w...

Suppression of parasitic deposition in a substrate processing syste...

Systems and methods for determining film thickness using DC self-bi...

Systems and methods for suppressing parasitic plasma and reducing w...

Systems and methods for controlling plasma instability in semicondu...

Carrier ring wall for reduction of back-diffusion of reactive speci...

Diagnostic and control systems and methods for substrate processing...

Suppression of parasitic deposition in a substrate processing syste...

Mechanical suppression of parasitic plasma in substrate processing...

Systems and methods for detection of plasma instability by electric...

Systems and methods for detection of plasma instability by optical...

Systems and methods for frequency modulation of radiofrequency powe...

Systems and methods for using electrical asymmetry effect to contro...

Metrology methods to detect plasma in wafer cavity and use of the m...

Systems and methods for detection of plasma instability by electric...

Systems and methods for suppressing parasitic plasma and reducing w...

Metrology methods to detect plasma in wafer cavity and use of the m...

Systems and methods for using electrical asymmetry effect to contro...

Ceramic showerhead with embedded RF electrode for capacitively coup...

Diagnostic and control systems and methods for substrate processing...

Suppression of parasitic deposition in a substrate processing syste...

Passive capacitively-coupled electrostatic (CCE) probe method for d...

Processing system for detecting in-situ arcing events during substr...

Apparatus and method for controlling plasma potential

Methods for automatically characterizing a plasma

Capacitively-coupled electrostatic (CCE) probe arrangement for dete...

Patents Applicationslast 30 patents

MECHANICAL SUPPRESSION OF PARASITIC PLASMA IN SUBSTRATE PROCESSING...

MECHANICAL SUPPRESSION OF PARASITIC PLASMA IN SUBSTRATE PROCESSING...

INTERMITTENT STAGNANT FLOW

SUPPRESSION OF PARASITIC DEPOSITION IN A SUBSTRATE PROCESSING SYSTE...

SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...

Systems and Methods for Controlling Plasma Instability in Semicondu...

SYSTEMS AND METHODS FOR DETERMINING FILM THICKNESS USING DC SELF-BI...

SUPPRESSION OF PARASITIC DEPOSITION IN A SUBSTRATE PROCESSING SYSTE...

MECHANICAL SUPPRESSION OF PARASITIC PLASMA IN SUBSTRATE PROCESSING...

Systems and Methods for Detection of Plasma Instability by Electric...

SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...

Metrology Methods to Detect Plasma in Wafer Cavity and Use of the M...

Systems and Methods for Using Electrical Asymmetry Effect to Contro...

CARRIER RING WALL FOR REDUCTION OF BACK-DIFFUSION OF REACTIVE SPECI...

Systems and Methods for Controlling Plasma Instability in Semicondu...

Systems and Methods for Detection of Plasma Instability by Optical...

Systems and Methods for Detection of Plasma Instability by Electric...

Systems and Methods for Frequency Modulation of Radiofrequency Powe...

Metrology Methods to Detect Plasma in Wafer Cavity and Use of the M...

DIAGNOSTIC AND CONTROL SYSTEMS AND METHODS FOR SUBSTRATE PROCESSING...

SUPPRESSION OF PARASITIC DEPOSITION IN A SUBSTRATE PROCESSING SYSTE...

Systems and Methods for Suppressing Parasitic Plasma and Reducing W...

SYSTEMS FOR AUTOMATICALLY CHARACTERIZING A PLASMA

CERAMIC SHOWERHEAD WITH EMBEDDED RF ELECTRODE FOR CAPACITIVELY COUP...

SUPPRESSION OF PARASITIC DEPOSITION IN A SUBSTRATE PROCESSING SYSTE...

DIAGNOSTIC AND CONTROL SYSTEMS AND METHODS FOR SUBSTRATE PROCESSING...

MECHANICAL SUPPRESSION OF PARASITIC PLASMA IN SUBSTRATE PROCESSING...

PASSIVE CAPACITIVELY-COUPLED ELECTROSTATIC (CCE) PROBE METHOD FOR D...

PROCESSING SYSTEM FOR DETECTING IN-SITU ARCING EVENTS DURING SUBSTR...

Variable-Density Plasma Processing of Semiconductor Substrates