Douglas Ray Sparks

Person

Kokomo, IN, US

People

Patents Grantslast 30 patents

Information Patent Grant
Surface mount package for a micromachined device
- Patent number 6,750,521
- Issue date Jun 15, 2004
- Delphi Technologies, Inc.
- Dan W. Chilcott
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multi-sensor module for communicating sensor information over a veh...
- Patent number 6,338,010
- Issue date Jan 8, 2002
- Delco Electronics Corporation
- Douglas Ray Sparks
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Process for bonding micromachined wafers using solder
- Patent number 6,062,461
- Issue date May 16, 2000
- Delphi Technologies, Inc.
- Douglas Ray Sparks
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Metal diaphragm sensor with polysilicon sensing elements and method...
- Patent number 6,022,756
- Issue date Feb 8, 2000
- Delco Electronics Corp.
- Douglas Ray Sparks
- G01 - MEASURING TESTING
Information Patent Grant
All-silicon capacitive pressure sensor
- Patent number 5,936,164
- Issue date Aug 10, 1999
- Delco Electronics Corporation
- Douglas Ray Sparks
- G01 - MEASURING TESTING
Information Patent Grant
Sensor with silicon strain gage
- Patent number 5,932,809
- Issue date Aug 3, 1999
- Delco Electronics Corporation
- Douglas Ray Sparks
- G01 - MEASURING TESTING
Information Patent Grant
Silicon force and displacement sensor
- Patent number 5,915,281
- Issue date Jun 22, 1999
- Delco Electronics Corporation
- Douglas Ray Sparks
- G01 - MEASURING TESTING
Information Patent Grant
Silicon micromachined motion sensor and method of making
- Patent number 5,831,162
- Issue date Nov 3, 1998
- Delco Electronics Corporation
- Douglas Ray Sparks
- G01 - MEASURING TESTING
Information Patent Grant
One-chip integrated sensor process
- Patent number 5,719,069
- Issue date Feb 17, 1998
- Delco Electronics Corporation
- Douglas Ray Sparks
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for making an all-silicon capacitive pressure sensor
- Patent number 5,706,565
- Issue date Jan 13, 1998
- Delco Electronics Corporation
- Douglas Ray Sparks
- G01 - MEASURING TESTING
Information Patent Grant
Silicon flow sensor
- Patent number 5,663,508
- Issue date Sep 2, 1997
- Delco Electronics Corporation
- Douglas Ray Sparks
- G01 - MEASURING TESTING
Information Patent Grant
Method for forming a micromachine motion sensor
- Patent number 5,547,093
- Issue date Aug 20, 1996
- Delco Electronics Corporation
- Douglas R. Sparks
- G01 - MEASURING TESTING
Information Patent Grant
Micromachined integrated pressure sensor with oxide polysilicon cav...
- Patent number 5,531,121
- Issue date Jul 2, 1996
- Delco Electronics Corporation
- Douglas R. Sparks
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of micromachining an integrated sensor on the surface of a s...
- Patent number 5,427,975
- Issue date Jun 27, 1995
- Delco Electronics Corporation
- Douglas R. Sparks
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for dielectrically isolating integrated circuits using doped...
- Patent number 5,250,461
- Issue date Oct 5, 1993
- Delco Electronics Corporation
- Douglas R. Sparks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for dielectrically isolating integrated circuits using doped...
- Patent number 5,250,837
- Issue date Oct 5, 1993
- Delco Electronics Corporation
- Douglas R. Sparks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of metal filled trench buried contacts
- Patent number 5,213,999
- Issue date May 25, 1993
- Delco Electronics Corporation
- Douglas R. Sparks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Removing metal precipitates from semiconductor devices
- Patent number 4,732,874
- Issue date Mar 22, 1988
- Delco Electronics Corporation
- Douglas R. Sparks
- H01 - BASIC ELECTRIC ELEMENTS

Douglas Ray Sparks

Person

Patents Grantslast 30 patents

Surface mount package for a micromachined device

Multi-sensor module for communicating sensor information over a veh...

Process for bonding micromachined wafers using solder

Metal diaphragm sensor with polysilicon sensing elements and method...

All-silicon capacitive pressure sensor

Sensor with silicon strain gage

Silicon force and displacement sensor

Silicon micromachined motion sensor and method of making

One-chip integrated sensor process

Method for making an all-silicon capacitive pressure sensor

Silicon flow sensor

Method for forming a micromachine motion sensor

Micromachined integrated pressure sensor with oxide polysilicon cav...

Method of micromachining an integrated sensor on the surface of a s...

Method for dielectrically isolating integrated circuits using doped...

Method for dielectrically isolating integrated circuits using doped...

Method of metal filled trench buried contacts

Removing metal precipitates from semiconductor devices