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Duane Lytle
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Vandalia, OH, US
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Patents Grants
last 30 patents
Information
Patent Grant
Anchoring inserts, electrode assemblies, and plasma processing cham...
Patent number
9,023,177
Issue date
May 5, 2015
Lam Research Corporation
Randall Hardin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Showerhead electrodes
Patent number
8,268,117
Issue date
Sep 18, 2012
Lam Research Corporation
Greg Bettencourt
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Anchoring inserts, electrode assemblies, and plasma processing cham...
Patent number
8,187,414
Issue date
May 29, 2012
Lam Research Corporation
Randall Hardin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Showerhead electrode assemblies and plasma processing chambers inco...
Patent number
8,152,954
Issue date
Apr 10, 2012
Lam Research Corporation
Greg Bettencourt
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Anchoring Inserts, Electrode Assemblies, and Plasma Processing Cham...
Publication number
20120193449
Publication date
Aug 2, 2012
LAM RESEARCH CORPORATION
Randall Hardin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SHOWERHEAD ELECTRODES
Publication number
20120160941
Publication date
Jun 28, 2012
LAM RESEARCH CORPORATION
Greg Bettencourt
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ANCHORING INSERTS, ELECTRODE ASSEMBLIES, AND PLASMA PROCESSING CHAM...
Publication number
20100038033
Publication date
Feb 18, 2010
LAM RESEARCH CORPORATION
Randall Hardin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SHOWERHEAD ELECTRODE ASSEMBLIES AND PLASMA PROCESSING CHAMBERS INCO...
Publication number
20090095424
Publication date
Apr 16, 2009
LAM RESEARCH CORPORATION
Greg Bettencourt
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...