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Magnetron sputter source
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Patent number 6,682,637
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Issue date Jan 27, 2004
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Unaxis Balzers Limited
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Bernd Heinz
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H01 - BASIC ELECTRIC ELEMENTS
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Optical data storage disk
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Patent number 6,645,352
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Issue date Nov 11, 2003
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Unaxis Balzers Aktiengesellschaft
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Helfried Weinzerl
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Vacuum treatment system
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Patent number 6,454,908
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Issue date Sep 24, 2002
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Unaxis Trading AG
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Roman Schertler
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H01 - BASIC ELECTRIC ELEMENTS
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Optical data storage disk
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Patent number 6,351,446
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Issue date Feb 26, 2002
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Unaxis Balzers Aktiengesellschaft
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Helfried Weinzerl
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Coating station
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Patent number 6,123,814
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Issue date Sep 26, 2000
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Balzers Aktiengesellschaft
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Martin Dubs
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Coating station
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Patent number 5,911,861
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Issue date Jun 15, 1999
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Balzers Aktiengesellschaft
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Martin Dubs
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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