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E. Henry Stevens
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Colorado Springs, CO, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method for low temperature annealing of metallization micro-structu...
Patent number
7,462,269
Issue date
Dec 9, 2008
Semitool, Inc.
Thomas L. Ritzdorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for low-temperature annealing of metallization...
Patent number
7,001,471
Issue date
Feb 21, 2006
Semitool, Inc.
Thomas L. Ritzdorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for low temperature annealing of metallization...
Patent number
6,994,776
Issue date
Feb 7, 2006
Semitool Inc.
Thomas L. Ritzdorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process and manufacturing tool architecture for use in the manufact...
Patent number
6,887,789
Issue date
May 3, 2005
Semitool, Inc.
E. Henry Stevens
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for etching thin-film layers of a workpiece used to form mi...
Patent number
6,664,197
Issue date
Dec 16, 2003
Semitool, Inc.
E. Henry Stevens
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for low-temperature annealing of metallization microstruc...
Patent number
6,508,920
Issue date
Jan 21, 2003
Semitool, Inc.
Thomas L. Ritzdorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for application of chemical process to a workpiece
Patent number
6,451,114
Issue date
Sep 17, 2002
Quality Microcircuits Corporation
E. Henry Stevens
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process and manufacturing tool architecture for use in the manufact...
Patent number
6,376,374
Issue date
Apr 23, 2002
Semitool, Inc.
E. Henry Stevens
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Process for etching thin-film layers of a workpiece used to form mi...
Patent number
6,331,490
Issue date
Dec 18, 2001
Semitool, Inc.
E. Henry Stevens
B08 - CLEANING
Information
Patent Grant
Process and manufacturing tool architecture for use in the manufact...
Patent number
6,143,126
Issue date
Nov 7, 2000
Semitool, Inc.
E. Henry Stevens
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process architecture and manufacturing tool sets employing hard mas...
Patent number
6,120,641
Issue date
Sep 19, 2000
Semitool, Inc.
E. Henry Stevens
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming capacitors and interconnect lines
Patent number
5,741,721
Issue date
Apr 21, 1998
Quality Microcircuits Corporation
E. Henry Stevens
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for fabricating transistors using composite nitride structure
Patent number
5,610,099
Issue date
Mar 11, 1997
Ramtron International Corporation
E. Henry Stevens
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Capacitors and interconnect lines for use with integrated circuits
Patent number
5,508,881
Issue date
Apr 16, 1996
Quality Microcircuits Corporation
E. Henry Stevens
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sealed self aligned contact process
Patent number
5,385,634
Issue date
Jan 31, 1995
Ramtron International Corporation
Douglas Butler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reaction barrier for a multilayer structure in an integrated circuit
Patent number
5,170,242
Issue date
Dec 8, 1992
Ramtron Corporation
E. Henry Stevens
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for contacting and interconnecting semiconductor devices wi...
Patent number
5,070,036
Issue date
Dec 3, 1991
Quality Microcircuits Corporation
E. Henry Stevens
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Structure and process for contacting and interconnecting semiconduc...
Patent number
4,977,440
Issue date
Dec 11, 1990
E. Henry Stevens
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor contact silicide/nitride process with control for sil...
Patent number
4,784,973
Issue date
Nov 15, 1988
INMOS Corporation
E. Henry Stevens
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Process and manufacturing tool architecture for use in the manufact...
Publication number
20050247566
Publication date
Nov 10, 2005
E. Henry Stevens
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Process for etching thin-film layers of a workpiece used to form mi...
Publication number
20030027430
Publication date
Feb 6, 2003
E. Henry Stevens
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for application of a chemical process to a workpiece
Publication number
20030026892
Publication date
Feb 6, 2003
E. Henry Stevens
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Process and manufacturing tool architecture for use in the manufact...
Publication number
20020187599
Publication date
Dec 12, 2002
E. Henry Stevens
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Method and apparatus for low temperature annealing of metallization...
Publication number
20020074233
Publication date
Jun 20, 2002
Semitool, Inc.
Thomas L. Ritzdorf
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Method and apparatus for low temperature annealing of metallization...
Publication number
20020037641
Publication date
Mar 28, 2002
Thomas L. Ritzdorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR LOW-TEMPERATURE ANNEALING OF METALLIZATION...
Publication number
20020000271
Publication date
Jan 3, 2002
Semitool, Inc.
THOMAS RITZDORF
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR