Easwar Srinivasan

Person

Beaverton, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Progressive heating of components of substrate processing systems u...
- Patent number 12,062,554
- Issue date Aug 13, 2024
- Lam Research Corporation
- Ramesh Chandrasekharan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pad raising mechanism in wafer positioning pedestal for semiconduct...
- Patent number 11,955,366
- Issue date Apr 9, 2024
- Lam Research Corporation
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pad raising mechanism in wafer positioning pedestal for semiconduct...
- Patent number 11,387,136
- Issue date Jul 12, 2022
- Lam Research Corporation
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Progressive heating of components of substrate processing systems u...
- Patent number 11,183,400
- Issue date Nov 23, 2021
- Lam Research Corporation
- Ramesh Chandrasekharan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer positioning pedestal for semiconductor processing
- Patent number 11,056,380
- Issue date Jul 6, 2021
- Lam Research Corporation
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Controlling showerhead heating via resistive thermal measurements
- Patent number 10,872,747
- Issue date Dec 22, 2020
- Lam Research Corporation
- Nick Ray Linebarger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Moment cancelling pad raising mechanism in wafer positioning pedest...
- Patent number 10,870,922
- Issue date Dec 22, 2020
- Lam Research Corporation
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer positioning pedestal for semiconductor processing
- Patent number 10,699,937
- Issue date Jun 30, 2020
- Lam Research Corporation
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature controlled showerhead
- Patent number 10,584,415
- Issue date Mar 10, 2020
- Novellus Systems, Inc.
- Henner Meinhold
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Moment cancelling pad raising mechanism in wafer positioning pedest...
- Patent number 10,570,515
- Issue date Feb 25, 2020
- Lam Research Corporation
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pad raising mechanism in wafer positioning pedestal for semiconduct...
- Patent number 10,573,549
- Issue date Feb 25, 2020
- Lam Research Corporation
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer positioning pedestal for semiconductor processing
- Patent number 10,354,909
- Issue date Jul 16, 2019
- Lam Research Corporation
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature controlled showerhead
- Patent number 10,221,484
- Issue date Mar 5, 2019
- Novellus Systems, Inc.
- Henner W. Meinhold
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Moment cancelling pad raising mechanism in wafer positioning pedest...
- Patent number 10,121,689
- Issue date Nov 6, 2018
- Lam Research Corporation
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer positioning pedestal for semiconductor processing
- Patent number 10,020,220
- Issue date Jul 10, 2018
- Lam Research Corporation
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Moment cancelling pad raising mechanism in wafer positioning pedest...
- Patent number 9,960,068
- Issue date May 1, 2018
- Lam Research Corporation
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer positioning pedestal for semiconductor processing
- Patent number 9,892,956
- Issue date Feb 13, 2018
- Lam Research Corporation
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing a chlorine-free conformal SiN film
- Patent number 9,670,579
- Issue date Jun 6, 2017
- Novellus Systems, Inc.
- Dennis Hausmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature controlled showerhead
- Patent number 9,476,120
- Issue date Oct 25, 2016
- Novellus Systems, Inc.
- Henner Meinhold
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma activated conformal film deposition
- Patent number 9,230,800
- Issue date Jan 5, 2016
- Novellus Systems, Inc.
- Adrien LaVoie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing a chlorine-free conformal sin film
- Patent number 9,070,555
- Issue date Jun 30, 2015
- Novellus Systems, Inc.
- Dennis Hausmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma activated conformal film deposition
- Patent number 8,728,956
- Issue date May 20, 2014
- Novellus Systems, Inc.
- Adrien LaVoie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method to improve mechanical strength of low-K dielectric film usin...
- Patent number 8,715,788
- Issue date May 6, 2014
- Novellus Systems, Inc.
- Ananda K. Bandyopadhyay
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature controlled showerhead
- Patent number 8,673,080
- Issue date Mar 18, 2014
- Novellus Systems, Inc.
- Henner Meinhold
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing a chlorine-free conformal sin film
- Patent number 8,592,328
- Issue date Nov 26, 2013
- Novellus Systems, Inc.
- Dennis Hausmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature controlled showerhead
- Patent number 8,137,467
- Issue date Mar 20, 2012
- Novellus Systems, Inc.
- Henner Meinhold
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method to improve mechanical strength of low-K dielectric film usin...
- Patent number 8,043,667
- Issue date Oct 25, 2011
- Novellus Systems, Inc.
- Ananda K. Bandyopadhyay
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
PECVD methods for producing ultra low-k dielectric films using UV t...
- Patent number 7,906,174
- Issue date Mar 15, 2011
- Novellus Systems, Inc.
- Qingguo Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for producing low-stress carbon-doped oxide films with impr...
- Patent number 7,695,765
- Issue date Apr 13, 2010
- Novellus Systems, Inc.
- Keith Fox
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for improving mechanical properties of low dielectric consta...
- Patent number 7,622,400
- Issue date Nov 24, 2009
- Novellus Systems, Inc.
- Keith Fox
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PROGRESSIVE HEATING OF COMPONENTS OF SUBSTRATE PROCESSING SYSTEMS U...
- Publication number 20240395569
- Publication date Nov 28, 2024
- LAM RESEARCH CORPORATION
- Ramesh CHANDRASEKHARAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REMOTE PLASMA DEPOSITION WITH ELECTROSTATIC CLAMPING
- Publication number 20240387226
- Publication date Nov 21, 2024
- LAM RESEARCH CORPORATION
- Aaron Blake MILLER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GRAPHENE-CAPPED COPPER IN DUAL DAMASCENE INTERCONNECT
- Publication number 20240213159
- Publication date Jun 27, 2024
- LAM RESEARCH CORPORATION
- Asish Parbatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONCENTRATION CONTROL USING A BUBBLER
- Publication number 20230257878
- Publication date Aug 17, 2023
- LAM RESEARCH CORPORATION
- Ramesh Chandrasekharan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PAD RAISING MECHANISM IN WAFER POSITIONING PEDESTAL FOR SEMICONDUCT...
- Publication number 20220352004
- Publication date Nov 3, 2022
- LAM RESEARCH CORPORATION
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER POSITIONING PEDESTAL FOR SEMICONDUCTOR PROCESSING
- Publication number 20200312703
- Publication date Oct 1, 2020
- LAM RESEARCH CORPORATION
- Paul Konkola
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOMENT CANCELLING PAD RAISING MECHANISM IN WAFER POSITIONING PEDEST...
- Publication number 20200173016
- Publication date Jun 4, 2020
- LAM RESEARCH CORPORATION
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PAD RAISING MECHANISM IN WAFER POSITIONING PEDESTAL FOR SEMICONDUCT...
- Publication number 20200176301
- Publication date Jun 4, 2020
- LAM RESEARCH CORPORATION
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROLLING SHOWERHEAD HEATING VIA RESISTIVE THERMAL MEASUREMENTS
- Publication number 20200051789
- Publication date Feb 13, 2020
- LAM RESEARCH CORPORATION
- Nick Ray LINEBARGER
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PROGRESSIVE HEATING OF COMPONENTS OF SUBSTRATE PROCESSING SYSTEMS U...
- Publication number 20200051834
- Publication date Feb 13, 2020
- LAM RESEARCH CORPORATION
- Ramesh CHANDRASEKHARAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER POSITIONING PEDESTAL FOR SEMICONDUCTOR PROCESSING
- Publication number 20190341292
- Publication date Nov 7, 2019
- LAM RESEARCH CORPORATION
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE CONTROLLED SHOWERHEAD
- Publication number 20190256977
- Publication date Aug 22, 2019
- Novellus Systems, Inc.
- Henner Meinhold
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOMENT CANCELLING PAD RAISING MECHANISM IN WAFER POSITIONING PEDEST...
- Publication number 20190067071
- Publication date Feb 28, 2019
- LAM RESEARCH CORPORATION
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER POSITIONING PEDESTAL FOR SEMICONDUCTOR PROCESSING
- Publication number 20180323098
- Publication date Nov 8, 2018
- LAM RESEARCH CORPORATION
- Paul Konkola
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOMENT CANCELLING PAD RAISING MECHANISM IN WAFER POSITIONING PEDEST...
- Publication number 20180211862
- Publication date Jul 26, 2018
- LAM RESEARCH CORPORATION
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PAD RAISING MECHANISM IN WAFER POSITIONING PEDESTAL FOR SEMICONDUCT...
- Publication number 20180158716
- Publication date Jun 7, 2018
- LAM RESEARCH CORPORATION
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER POSITIONING PEDESTAL FOR SEMICONDUCTOR PROCESSING
- Publication number 20180130696
- Publication date May 10, 2018
- LAM RESEARCH CORPORATION
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE CONTROLLED SHOWERHEAD
- Publication number 20170009344
- Publication date Jan 12, 2017
- Novellus Systems, Inc.
- Henner W. Meinhold
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING A CHLORINE-FREE CONFORMAL SIN FILM
- Publication number 20150259791
- Publication date Sep 17, 2015
- Novellus Systems, Inc.
- Dennis Hausmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA ACTIVATED CONFORMAL FILM DEPOSITION
- Publication number 20140209562
- Publication date Jul 31, 2014
- Novellus Systems, Inc.
- Adrien LaVoie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE CONTROLLED SHOWERHEAD
- Publication number 20140158792
- Publication date Jun 12, 2014
- Novellus Systems, Inc.
- Henner Meinhold
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING A CHLORINE-FREE CONFORMAL SIN FILM
- Publication number 20140141626
- Publication date May 22, 2014
- Dennis Hausmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING A CHLORINE-FREE CONFORMAL SIN FILM
- Publication number 20130189854
- Publication date Jul 25, 2013
- Dennis Hausmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA ACTIVATED CONFORMAL FILM DEPOSITION
- Publication number 20110256726
- Publication date Oct 20, 2011
- Adrien LaVoie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Temperature controlled showerhead
- Publication number 20090095218
- Publication date Apr 16, 2009
- Novellus Systems, Inc.
- Henner Meinhold
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Temperature controlled showerhead
- Publication number 20090095219
- Publication date Apr 16, 2009
- Novellus Systems, Inc.
- Henner Meinhold
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE CONTROLLED SHOWERHEAD
- Publication number 20090095220
- Publication date Apr 16, 2009
- NOVELLUS SYSTEMS INC.
- Henner Meinhold
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Easwar Srinivasan

Person

Patents Grantslast 30 patents

Progressive heating of components of substrate processing systems u...

Pad raising mechanism in wafer positioning pedestal for semiconduct...

Pad raising mechanism in wafer positioning pedestal for semiconduct...

Progressive heating of components of substrate processing systems u...

Wafer positioning pedestal for semiconductor processing

Controlling showerhead heating via resistive thermal measurements

Moment cancelling pad raising mechanism in wafer positioning pedest...

Wafer positioning pedestal for semiconductor processing

Temperature controlled showerhead

Moment cancelling pad raising mechanism in wafer positioning pedest...

Pad raising mechanism in wafer positioning pedestal for semiconduct...

Wafer positioning pedestal for semiconductor processing

Temperature controlled showerhead

Moment cancelling pad raising mechanism in wafer positioning pedest...

Wafer positioning pedestal for semiconductor processing

Moment cancelling pad raising mechanism in wafer positioning pedest...

Wafer positioning pedestal for semiconductor processing

Method for depositing a chlorine-free conformal SiN film

Temperature controlled showerhead

Plasma activated conformal film deposition

Method for depositing a chlorine-free conformal sin film

Plasma activated conformal film deposition

Method to improve mechanical strength of low-K dielectric film usin...

Temperature controlled showerhead

Method for depositing a chlorine-free conformal sin film

Temperature controlled showerhead

Method to improve mechanical strength of low-K dielectric film usin...

PECVD methods for producing ultra low-k dielectric films using UV t...

Methods for producing low-stress carbon-doped oxide films with impr...

Method for improving mechanical properties of low dielectric consta...

Patents Applicationslast 30 patents

PROGRESSIVE HEATING OF COMPONENTS OF SUBSTRATE PROCESSING SYSTEMS U...

REMOTE PLASMA DEPOSITION WITH ELECTROSTATIC CLAMPING

GRAPHENE-CAPPED COPPER IN DUAL DAMASCENE INTERCONNECT

CONCENTRATION CONTROL USING A BUBBLER

PAD RAISING MECHANISM IN WAFER POSITIONING PEDESTAL FOR SEMICONDUCT...

WAFER POSITIONING PEDESTAL FOR SEMICONDUCTOR PROCESSING

MOMENT CANCELLING PAD RAISING MECHANISM IN WAFER POSITIONING PEDEST...

PAD RAISING MECHANISM IN WAFER POSITIONING PEDESTAL FOR SEMICONDUCT...

CONTROLLING SHOWERHEAD HEATING VIA RESISTIVE THERMAL MEASUREMENTS

PROGRESSIVE HEATING OF COMPONENTS OF SUBSTRATE PROCESSING SYSTEMS U...

WAFER POSITIONING PEDESTAL FOR SEMICONDUCTOR PROCESSING

TEMPERATURE CONTROLLED SHOWERHEAD

MOMENT CANCELLING PAD RAISING MECHANISM IN WAFER POSITIONING PEDEST...

WAFER POSITIONING PEDESTAL FOR SEMICONDUCTOR PROCESSING

MOMENT CANCELLING PAD RAISING MECHANISM IN WAFER POSITIONING PEDEST...

PAD RAISING MECHANISM IN WAFER POSITIONING PEDESTAL FOR SEMICONDUCT...

WAFER POSITIONING PEDESTAL FOR SEMICONDUCTOR PROCESSING

TEMPERATURE CONTROLLED SHOWERHEAD

METHOD FOR DEPOSITING A CHLORINE-FREE CONFORMAL SIN FILM

PLASMA ACTIVATED CONFORMAL FILM DEPOSITION

TEMPERATURE CONTROLLED SHOWERHEAD

METHOD FOR DEPOSITING A CHLORINE-FREE CONFORMAL SIN FILM

METHOD FOR DEPOSITING A CHLORINE-FREE CONFORMAL SIN FILM

PLASMA ACTIVATED CONFORMAL FILM DEPOSITION

Temperature controlled showerhead

Temperature controlled showerhead

TEMPERATURE CONTROLLED SHOWERHEAD