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THIN CAPPING FOR MEMS DEVICES
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Publication number 20160207758
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Publication date Jul 21, 2016
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Silex Microsystems AB
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Edvard KALVESTEN
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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INSULATION OF MICRO STRUCTURES
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Publication number 20140378804
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Publication date Dec 25, 2014
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Silex Microsystems AB
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Edvard Kalvesten
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G01 - MEASURING TESTING
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VIA STRUCTURE AND METHOD THEREOF
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Publication number 20140063580
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Publication date Mar 6, 2014
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Silex Microsystems AB
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Thorbjörn Ebefors
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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GLASS MICRO FLUIDIC DEVICE
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Publication number 20120288422
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Publication date Nov 15, 2012
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Silex Microsystems AB
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Edvard KALVESTEN
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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Functional Capping
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Publication number 20120267773
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Publication date Oct 25, 2012
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Silex Microsystems AB
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Thorbjorn Ebefors
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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VIA STRUCTURE AND METHOD THEREOF
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Publication number 20120018852
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Publication date Jan 26, 2012
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Silex Microsystems AB
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Thorbjörn Ebefors
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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VIA STRUCTURE AND METHOD THEREOF
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Publication number 20120018898
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Publication date Jan 26, 2012
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Silex Microsystems AB
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Thorbjörn Ebefors
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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VIA STRUCTURE AND METHOD THEREOF
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Publication number 20120019886
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Publication date Jan 26, 2012
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Silex Microsystems AB
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Thorbjörn Ebefors
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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MICROPACKAGING METHOD AND DEVICES
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Publication number 20100053922
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Publication date Mar 4, 2010
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Silex Microsystems AB
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Thorbjorn Ebefors
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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PRESSURE SENSOR
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Publication number 20060032039
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Publication date Feb 16, 2006
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Silex Microsystems AB
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Pelle Rangsten
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G01 - MEASURING TESTING
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Pressure sensor
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Publication number 20040237285
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Publication date Dec 2, 2004
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Pelle Rangsten
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G01 - MEASURING TESTING
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