Edward Augustyniak

Person

Tualatin, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Combiner and distributor for adjusting impedances or power across m...
- Patent number 12,143,087
- Issue date Nov 12, 2024
- Lam Research Corporation
- Sunil Kapoor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mechanical suppression of parasitic plasma in substrate processing...
- Patent number 11,862,435
- Issue date Jan 2, 2024
- Lam Research Corporation
- Douglas Keil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Control of wafer bow in multiple stations
- Patent number 11,823,928
- Issue date Nov 21, 2023
- Lam Research Corporation
- Edward Augustyniak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Suppression of parasitic deposition in a substrate processing syste...
- Patent number 11,725,282
- Issue date Aug 15, 2023
- Novellus Systems, Inc.
- Chunguang Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mechanical suppression of parasitic plasma in substrate processing...
- Patent number 11,621,150
- Issue date Apr 4, 2023
- Lam Research Corporation
- Douglas Keil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for controlling plasma instability in semicondu...
- Patent number 11,393,729
- Issue date Jul 19, 2022
- Lam Research Corporation
- Yukinori Sakiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Combiner and distributor for adjusting impedances or power across m...
- Patent number 11,258,421
- Issue date Feb 22, 2022
- Lam Research Corporation
- Sunil Kapoor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Control of wafer bow in multiple stations
- Patent number 11,183,406
- Issue date Nov 23, 2021
- Lam Research Corporation
- Edward Augustyniak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for suppressing parasitic plasma and reducing w...
- Patent number 11,127,567
- Issue date Sep 21, 2021
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Suppression of parasitic deposition in a substrate processing syste...
- Patent number 11,111,581
- Issue date Sep 7, 2021
- Lam Research Corporation
- Chunguang Xia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for determining film thickness using DC self-bi...
- Patent number 10,876,209
- Issue date Dec 29, 2020
- Novellus Systems, Inc.
- Edward J. Augustyniak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for suppressing parasitic plasma and reducing w...
- Patent number 10,665,429
- Issue date May 26, 2020
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Combiner and distributor for adjusting impedances or power across m...
- Patent number 10,622,962
- Issue date Apr 14, 2020
- Lam Research Corporation
- Sunil Kapoor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hollow cathode discharge (HCD) suppressing capacitively coupled pla...
- Patent number 10,619,245
- Issue date Apr 14, 2020
- Lam Research Corporation
- Jeremy Tucker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Control of water bow in multiple stations
- Patent number 10,553,465
- Issue date Feb 4, 2020
- Lam Research Corporation
- Edward Augustyniak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for controlling plasma instability in semicondu...
- Patent number 10,510,625
- Issue date Dec 17, 2019
- Lam Research Corporation
- Yukinori Sakiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low volume showerhead with faceplate holes for improved flow unifor...
- Patent number 10,378,107
- Issue date Aug 13, 2019
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diagnostic and control systems and methods for substrate processing...
- Patent number 10,378,109
- Issue date Aug 13, 2019
- Novellus Systems, Inc.
- Edward Augustyniak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Suppression of parasitic deposition in a substrate processing syste...
- Patent number 10,287,683
- Issue date May 14, 2019
- Lam Research Corporation
- Chunguang Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mechanical suppression of parasitic plasma in substrate processing...
- Patent number 10,224,182
- Issue date Mar 5, 2019
- Novellus Systems, Inc.
- Douglas Keil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Combiner and distributor for adjusting impedances or power across m...
- Patent number 10,187,032
- Issue date Jan 22, 2019
- Lam Research Corporation
- Sunil Kapoor
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Systems and methods for detection of plasma instability by electric...
- Patent number 10,128,160
- Issue date Nov 13, 2018
- Lam Research Corporation
- Yukinori Sakiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for detection of plasma instability by optical...
- Patent number 10,121,708
- Issue date Nov 6, 2018
- Lam Research Corporation
- Yukinori Sakiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Defect control in RF plasma substrate processing systems using DC b...
- Patent number 10,081,869
- Issue date Sep 25, 2018
- Lam Research Corporation
- Edward Augustyniak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hollow cathode discharge (HCD) suppressing capacitively coupled pla...
- Patent number 10,077,497
- Issue date Sep 18, 2018
- Lam Research Corporation
- Jeremy Tucker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for frequency modulation of radiofrequency powe...
- Patent number 9,997,422
- Issue date Jun 12, 2018
- Lam Research Corporation
- Ishtak Karim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Measuring individual layer thickness during multi-layer deposition...
- Patent number 9,953,887
- Issue date Apr 24, 2018
- Lam Research Corporation
- Boaz Kenane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for using electrical asymmetry effect to contro...
- Patent number 9,941,113
- Issue date Apr 10, 2018
- Lam Research Corporation
- Douglas Keil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metrology methods to detect plasma in wafer cavity and use of the m...
- Patent number 9,875,883
- Issue date Jan 23, 2018
- Lam Research Corporation
- Yukinori Sakiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for detection of plasma instability by electric...
- Patent number 9,824,941
- Issue date Nov 21, 2017
- Lam Research Corporation
- Yukinori Sakiyama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MECHANICAL SUPPRESSION OF PARASITIC PLASMA IN SUBSTRATE PROCESSING...
- Publication number 20240162013
- Publication date May 16, 2024
- LAM RESEARCH CORPORATION
- Douglas KEIL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROL OF WAFER BOW IN MULTIPLE STATIONS
- Publication number 20240055285
- Publication date Feb 15, 2024
- LAM RESEARCH CORPORATION
- Edward Augustyniak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR PROVIDING SHUNT CANCELLATION OF PARASITIC C...
- Publication number 20230246624
- Publication date Aug 3, 2023
- LAM RESEARCH CORPORATION
- Yaswanth Rangineni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MECHANICAL SUPPRESSION OF PARASITIC PLASMA IN SUBSTRATE PROCESSING...
- Publication number 20230238220
- Publication date Jul 27, 2023
- LAM RESEARCH CORPORATION
- Douglas KEIL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMBINER AND DISTRIBUTOR FOR ADJUSTING IMPEDANCES OR POWER ACROSS M...
- Publication number 20220158604
- Publication date May 19, 2022
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROL OF WAFER BOW IN MULTIPLE STATIONS
- Publication number 20220051919
- Publication date Feb 17, 2022
- LAM RESEARCH CORPORATION
- Edward Augustyniak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPRESSION OF PARASITIC DEPOSITION IN A SUBSTRATE PROCESSING SYSTE...
- Publication number 20210381106
- Publication date Dec 9, 2021
- Novellus Systems, Inc.
- Chunguang Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...
- Publication number 20200335304
- Publication date Oct 22, 2020
- LAM RESEARCH CORPORATION
- Hu Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMBINER AND DISTRIBUTOR FOR ADJUSTING IMPEDANCES OR POWER ACROSS M...
- Publication number 20200195216
- Publication date Jun 18, 2020
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROL OF WAFER BOW IN MULTIPLE STATIONS
- Publication number 20200118856
- Publication date Apr 16, 2020
- LAM RESEARCH CORPORATION
- Edward Augustyniak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Controlling Plasma Instability in Semicondu...
- Publication number 20200098651
- Publication date Mar 26, 2020
- LAM RESEARCH CORPORATION
- Yukinori Sakiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR DETERMINING FILM THICKNESS USING DC SELF-BI...
- Publication number 20190360101
- Publication date Nov 28, 2019
- Novellus Systems, Inc.
- Edward J. AUGUSTYNIAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUPPRESSION OF PARASITIC DEPOSITION IN A SUBSTRATE PROCESSING SYSTE...
- Publication number 20190271081
- Publication date Sep 5, 2019
- LAM RESEARCH CORPORATION
- Chunguang XIA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MECHANICAL SUPPRESSION OF PARASITIC PLASMA IN SUBSTRATE PROCESSING...
- Publication number 20190172684
- Publication date Jun 6, 2019
- LAM RESEARCH CORPORATION
- Douglas KEIL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMBINER AND DISTRIBUTOR FOR ADJUSTING IMPEDANCES OR POWER ACROSS M...
- Publication number 20190149119
- Publication date May 16, 2019
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HOLLOW CATHODE DISCHARGE (HCD) SUPPRESSING CAPACITIVELY COUPLED PLA...
- Publication number 20180371615
- Publication date Dec 27, 2018
- LAM RESEARCH CORPORATION
- Jeremy Tucker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR PROVIDING SHUNT CANCELLATION OF PARASITIC C...
- Publication number 20180175819
- Publication date Jun 21, 2018
- LAM RESEARCH CORPORATION
- Yaswanth Rangineni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for Detection of Plasma Instability by Electric...
- Publication number 20180076100
- Publication date Mar 15, 2018
- LAM RESEARCH CORPORATION
- Yukinori Sakiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...
- Publication number 20180068833
- Publication date Mar 8, 2018
- LAM RESEARCH CORPORATION
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROL OF WAFER BOW IN MULTIPLE STATIONS
- Publication number 20180025930
- Publication date Jan 25, 2018
- LAM RESEARCH CORPORATION
- Edward Augustyniak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMBINER AND DISTRIBUTOR FOR ADJUSTING IMPEDANCES OR POWER ACROSS M...
- Publication number 20170365907
- Publication date Dec 21, 2017
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Metrology Methods to Detect Plasma in Wafer Cavity and Use of the M...
- Publication number 20170338085
- Publication date Nov 23, 2017
- LAM RESEARCH CORPORATION
- Yukinori Sakiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for Using Electrical Asymmetry Effect to Contro...
- Publication number 20170330744
- Publication date Nov 16, 2017
- LAM RESEARCH CORPORATION
- Douglas Keil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for Controlling Plasma Instability in Semicondu...
- Publication number 20170140968
- Publication date May 18, 2017
- LAM RESEARCH CORPORATION
- Yukinori Sakiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for Detection of Plasma Instability by Optical...
- Publication number 20170141001
- Publication date May 18, 2017
- LAM RESEARCH CORPORATION
- Yukinori Sakiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for Detection of Plasma Instability by Electric...
- Publication number 20170141000
- Publication date May 18, 2017
- LAM RESEARCH CORPORATION
- Yukinori Sakiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Frequency Modulation of Radiofrequency Powe...
- Publication number 20170141002
- Publication date May 18, 2017
- LAM RESEARCH CORPORATION
- Ishtak Karim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Metrology Methods to Detect Plasma in Wafer Cavity and Use of the M...
- Publication number 20170076921
- Publication date Mar 16, 2017
- LAM RESEARCH CORPORATION
- Yukinori Sakiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW VOLUME SHOWERHEAD WITH FACEPLATE HOLES FOR IMPROVED FLOW UNIFOR...
- Publication number 20160340782
- Publication date Nov 24, 2016
- LAM RESEARCH CORPORATION
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIAGNOSTIC AND CONTROL SYSTEMS AND METHODS FOR SUBSTRATE PROCESSING...
- Publication number 20160326650
- Publication date Nov 10, 2016
- Novellus Systems, Inc.
- Edward Augustyniak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Edward Augustyniak

Person

Patents Grantslast 30 patents

Combiner and distributor for adjusting impedances or power across m...

Mechanical suppression of parasitic plasma in substrate processing...

Control of wafer bow in multiple stations

Suppression of parasitic deposition in a substrate processing syste...

Mechanical suppression of parasitic plasma in substrate processing...

Systems and methods for controlling plasma instability in semicondu...

Combiner and distributor for adjusting impedances or power across m...

Control of wafer bow in multiple stations

Systems and methods for suppressing parasitic plasma and reducing w...

Suppression of parasitic deposition in a substrate processing syste...

Systems and methods for determining film thickness using DC self-bi...

Systems and methods for suppressing parasitic plasma and reducing w...

Combiner and distributor for adjusting impedances or power across m...

Hollow cathode discharge (HCD) suppressing capacitively coupled pla...

Control of water bow in multiple stations

Systems and methods for controlling plasma instability in semicondu...

Low volume showerhead with faceplate holes for improved flow unifor...

Diagnostic and control systems and methods for substrate processing...

Suppression of parasitic deposition in a substrate processing syste...

Mechanical suppression of parasitic plasma in substrate processing...

Combiner and distributor for adjusting impedances or power across m...

Systems and methods for detection of plasma instability by electric...

Systems and methods for detection of plasma instability by optical...

Defect control in RF plasma substrate processing systems using DC b...

Hollow cathode discharge (HCD) suppressing capacitively coupled pla...

Systems and methods for frequency modulation of radiofrequency powe...

Measuring individual layer thickness during multi-layer deposition...

Systems and methods for using electrical asymmetry effect to contro...

Metrology methods to detect plasma in wafer cavity and use of the m...

Systems and methods for detection of plasma instability by electric...

Patents Applicationslast 30 patents

MECHANICAL SUPPRESSION OF PARASITIC PLASMA IN SUBSTRATE PROCESSING...

CONTROL OF WAFER BOW IN MULTIPLE STATIONS

SYSTEMS AND METHODS FOR PROVIDING SHUNT CANCELLATION OF PARASITIC C...

MECHANICAL SUPPRESSION OF PARASITIC PLASMA IN SUBSTRATE PROCESSING...

COMBINER AND DISTRIBUTOR FOR ADJUSTING IMPEDANCES OR POWER ACROSS M...

CONTROL OF WAFER BOW IN MULTIPLE STATIONS

SUPPRESSION OF PARASITIC DEPOSITION IN A SUBSTRATE PROCESSING SYSTE...

SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...

COMBINER AND DISTRIBUTOR FOR ADJUSTING IMPEDANCES OR POWER ACROSS M...

CONTROL OF WAFER BOW IN MULTIPLE STATIONS

Systems and Methods for Controlling Plasma Instability in Semicondu...

SYSTEMS AND METHODS FOR DETERMINING FILM THICKNESS USING DC SELF-BI...

SUPPRESSION OF PARASITIC DEPOSITION IN A SUBSTRATE PROCESSING SYSTE...

MECHANICAL SUPPRESSION OF PARASITIC PLASMA IN SUBSTRATE PROCESSING...

COMBINER AND DISTRIBUTOR FOR ADJUSTING IMPEDANCES OR POWER ACROSS M...

HOLLOW CATHODE DISCHARGE (HCD) SUPPRESSING CAPACITIVELY COUPLED PLA...

SYSTEMS AND METHODS FOR PROVIDING SHUNT CANCELLATION OF PARASITIC C...

Systems and Methods for Detection of Plasma Instability by Electric...

SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...

CONTROL OF WAFER BOW IN MULTIPLE STATIONS

COMBINER AND DISTRIBUTOR FOR ADJUSTING IMPEDANCES OR POWER ACROSS M...

Metrology Methods to Detect Plasma in Wafer Cavity and Use of the M...

Systems and Methods for Using Electrical Asymmetry Effect to Contro...

Systems and Methods for Controlling Plasma Instability in Semicondu...

Systems and Methods for Detection of Plasma Instability by Optical...

Systems and Methods for Detection of Plasma Instability by Electric...

Systems and Methods for Frequency Modulation of Radiofrequency Powe...

Metrology Methods to Detect Plasma in Wafer Cavity and Use of the M...

LOW VOLUME SHOWERHEAD WITH FACEPLATE HOLES FOR IMPROVED FLOW UNIFOR...

DIAGNOSTIC AND CONTROL SYSTEMS AND METHODS FOR SUBSTRATE PROCESSING...