-
Heat treatment apparatus
-
Patent number RE40052
-
Issue date Feb 12, 2008
-
Tokyo Electron Limited
-
Eiichi Shirakawa
-
219 - Electric heating
-
-
-
Heat processing apparatus
-
Patent number 6,744,020
-
Issue date Jun 1, 2004
-
Tokyo Electron Limited
-
Eiichi Shirakawa
-
F28 - HEAT EXCHANGE IN GENERAL
-
-
-
Heat treatment apparatus
-
Patent number 6,450,803
-
Issue date Sep 17, 2002
-
Tokyo Electron Limited
-
Eiichi Shirakawa
-
H01 - BASIC ELECTRIC ELEMENTS
-
-
-
Heat treatment apparatus
-
Patent number 6,229,116
-
Issue date May 8, 2001
-
Tokyo Electron Limited
-
Eiichi Shirakawa
-
F27 - FURNACES KILNS OVENS RETORTS
-
Heat processing apparatus
-
Patent number 6,228,171
-
Issue date May 8, 2001
-
Tokyo Electron Ltd.
-
Eiichi Shirakawa
-
H01 - BASIC ELECTRIC ELEMENTS
-
Heat treatment apparatus
-
Patent number 6,222,161
-
Issue date Apr 24, 2001
-
Tokyo Electron Limited
-
Eiichi Shirakawa
-
H01 - BASIC ELECTRIC ELEMENTS
-
Heat treating apparatus
-
Patent number 6,191,394
-
Issue date Feb 20, 2001
-
Tokyo Electron Ltd.
-
Eiichi Shirakawa
-
H01 - BASIC ELECTRIC ELEMENTS
-
-
Heat process device
-
Patent number 5,225,663
-
Issue date Jul 6, 1993
-
Tel Kyushu Limited
-
Kimiharu Matsumura
-
H01 - BASIC ELECTRIC ELEMENTS
-
Coating apparatus
-
Patent number 5,070,813
-
Issue date Dec 10, 1991
-
Tokyo Electron Limited
-
Hiroyuki Sakai
-
G05 - CONTROLLING REGULATING
-