Ellie Yieh

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Metal oxide resist patterning with electrical field guided post-exp...
- Patent number 12,204,246
- Issue date Jan 21, 2025
- Applied Materials, Inc.
- Huixiong Dai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber and methods of treating a substrate after exposure to radia...
- Patent number 12,181,801
- Issue date Dec 31, 2024
- Applied Materials, Inc.
- Dmitry Lubomirsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photoresist patterning process
- Patent number 12,085,858
- Issue date Sep 10, 2024
- Applied Materials, Inc.
- Huixiong Dai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for processing a substrate
- Patent number 11,955,333
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Jethro Tannos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lithography process window enhancement for photoresist patterning
- Patent number 11,914,299
- Issue date Feb 27, 2024
- Applied Materials, Inc.
- Huixiong Dai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High pressure annealing process for metal containing materials
- Patent number 11,881,411
- Issue date Jan 23, 2024
- Applied Materials, Inc.
- Kaushal K. Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film structure for electric field guided photoresist patterning pro...
- Patent number 11,880,137
- Issue date Jan 23, 2024
- Applied Materials, Inc.
- Huixiong Dai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Directional selective deposition
- Patent number 11,862,458
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Bhargav S. Citla
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Additive patterning of semiconductor film stacks
- Patent number 11,798,606
- Issue date Oct 24, 2023
- Applied Materials, Inc.
- John O. Dukovic
- G11 - INFORMATION STORAGE
Information Patent Grant
Three-color 3D DRAM stack and methods of making
- Patent number 11,764,058
- Issue date Sep 19, 2023
- Applied Materials, Inc.
- Arvind Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cluster processing system for forming a transition metal material
- Patent number 11,756,828
- Issue date Sep 12, 2023
- Applied Materials, Inc.
- Keith Tatseun Wong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas delivery system for high pressure processing chamber
- Patent number 11,756,803
- Issue date Sep 12, 2023
- Applied Materials, Inc.
- Qiwei Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tungsten defluorination by high pressure treatment
- Patent number 11,705,337
- Issue date Jul 18, 2023
- Applied Materials, Inc.
- Keith Tatseun Wong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of improving graphene deposition for processes using microw...
- Patent number 11,682,556
- Issue date Jun 20, 2023
- Applied Materials, Inc.
- Jie Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film structure for electric field guided photoresist patterning pro...
- Patent number 11,650,506
- Issue date May 16, 2023
- Applied Materials Inc.
- Huixiong Dai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods for depositing dielectric material
- Patent number 11,631,591
- Issue date Apr 18, 2023
- Applied Materials, Inc.
- Bhargav S. Citla
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon carbonitride gapfill with tunable carbon content
- Patent number 11,566,325
- Issue date Jan 31, 2023
- Applied Materials, Inc.
- Mei-Yee Shek
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Gas delivery system for high pressure processing chamber
- Patent number 11,527,421
- Issue date Dec 13, 2022
- Micromaterials, LLC
- Qiwei Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lithography process window enhancement for photoresist patterning
- Patent number 11,429,026
- Issue date Aug 30, 2022
- Applied Materials, Inc.
- Huixiong Dai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process chamber for etching low k and other dielectric films
- Patent number 11,410,860
- Issue date Aug 9, 2022
- Applied Materials, Inc.
- Dmitry Lubomirsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-source ion beam etch system
- Patent number 11,387,071
- Issue date Jul 12, 2022
- Applied Materials, Inc.
- Qiwei Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate vacuum transport and storage apparatus
- Patent number 11,302,549
- Issue date Apr 12, 2022
- Applied Materials, Inc.
- Sriskantharajah Thirunavukarasu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for graphene formation using microwave surface-wave plasma...
- Patent number 11,289,331
- Issue date Mar 29, 2022
- Applied Materials, Inc.
- Jie Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical transistor fabrication for memory applications
- Patent number 11,264,460
- Issue date Mar 1, 2022
- Applied Materials, Inc.
- Arvind Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatuses for forming interconnection structures
- Patent number 11,205,589
- Issue date Dec 21, 2021
- Applied Materials, Inc.
- He Ren
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for etching a structure for MRAM applications
- Patent number 11,145,808
- Issue date Oct 12, 2021
- Applied Materials, Inc.
- Jong Mun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for depositing and reflow of a high quality etch resistant g...
- Patent number 11,114,333
- Issue date Sep 7, 2021
- Micromaterials, LLC
- Srinivas D. Nemani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing dielectric material
- Patent number 11,114,306
- Issue date Sep 7, 2021
- Applied Materials, Inc.
- Bhargav Citla
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Additive patterning of semiconductor film stacks
- Patent number 11,049,537
- Issue date Jun 29, 2021
- Applied Materials, Inc.
- John O. Dukovic
- G11 - INFORMATION STORAGE
Information Patent Grant
High pressure annealing process for metal containing materials
- Patent number 10,998,200
- Issue date May 4, 2021
- Applied Materials, Inc.
- Kaushal K. Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
DIRECTIONAL SELECTIVE FILL OF SILICON OXIDE MATERIALS
- Publication number 20250022704
- Publication date Jan 16, 2025
- Applied Materials, Inc.
- Qiang Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHOTORESIST PATTERNING PROCESS
- Publication number 20240393695
- Publication date Nov 28, 2024
- Applied Materials, Inc.
- Huixiong DAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ULTRA HIGH-K HAFNIUM OXIDE AND HAFNIUM ZIRCONIUM OXIDE FILMS
- Publication number 20240301552
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Harshil Kashyap
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR REDUCING MICRO AND MACRO SCALLOPING ON SEMICONDUCTOR DE...
- Publication number 20240249936
- Publication date Jul 25, 2024
- Applied Materials, Inc.
- Mang-Mang LING
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIRECTIONAL SELECTIVE FILL USING HIGH DENSITY PLASMA
- Publication number 20240234131
- Publication date Jul 11, 2024
- Applied Materials, Inc.
- Purvam Dineshbhai Modi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OXIDATION ENHANCED DOPING
- Publication number 20240145246
- Publication date May 2, 2024
- Applied Materials, Inc.
- Yi Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIELECTRIC ON DIELECTRIC SELECTIVE DEPOSITION USING ANILINE PASSIVA...
- Publication number 20240120195
- Publication date Apr 11, 2024
- Applied Materials, Inc.
- Keith T. Wong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM BAKE FOR EUV LITHOGRAPHY
- Publication number 20240085810
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Huixiong DAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FORMING FILMS WITH IMPROVED FILM QUALITY
- Publication number 20240038527
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Bhargav S. Citla
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW TEMPERATURE SILICON OXIDE GAP FILL
- Publication number 20230386829
- Publication date Nov 30, 2023
- Applied Materials, Inc.
- Soham Asrani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIRECTIONAL SELECTIVE DEPOSITION
- Publication number 20230377875
- Publication date Nov 23, 2023
- Applied Materials, Inc.
- Bhargav S. Citla
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLUSTER PROCESSING SYSTEM FOR FORMING A METAL CONTAINING MATERIAL
- Publication number 20230377958
- Publication date Nov 23, 2023
- Applied Materials, Inc.
- Keith Tatseun WONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MONOLITHIC COMPLEMENTARY FIELD-EFFECT TRANSISTORS HAVING CARBON-DOP...
- Publication number 20230326925
- Publication date Oct 12, 2023
- Applied Materials, Inc.
- Andrew Anthony Cockburn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNGSTEN DEFLUORINATION BY HIGH PRESSURE TREATMENT
- Publication number 20230298893
- Publication date Sep 21, 2023
- Applied Materials, Inc.
- Keith Tatseun Wong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM STRUCTURE FOR ELECTRIC FIELD GUIDED PHOTORESIST PATTERNING PRO...
- Publication number 20230229089
- Publication date Jul 20, 2023
- Applied Materials, Inc.
- Huixiong DAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CHAMBER AND METHODS OF COOLING A SUBSTRATE AFTER BAKING
- Publication number 20230161260
- Publication date May 25, 2023
- Applied Materials, Inc.
- Dmitry LUBOMIRSKY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THREE-COLOR 3D DRAM STACK AND METHODS OF MAKING
- Publication number 20230102558
- Publication date Mar 30, 2023
- Applied Materials, Inc.
- Arvind Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS DELIVERY SYSTEM FOR HIGH PRESSURE PROCESSING CHAMBER
- Publication number 20230093374
- Publication date Mar 23, 2023
- Micromaterials, LLC.
- Qiwei LIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIRECTIONAL SELECTIVE DEPOSITION
- Publication number 20230071366
- Publication date Mar 9, 2023
- Applied Materials, Inc.
- Bhargav S. Citla
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON CARBONITRIDE GAPFILL WITH TUNABLE CARBON CONTENT
- Publication number 20230066497
- Publication date Mar 2, 2023
- Applied Materials, Inc.
- Mei-Yee Shek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LITHOGRAPHY PROCESS WINDOW ENHANCEMENT FOR PHOTORESIST PATTERNING
- Publication number 20220413387
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- Huixiong Dai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METAL OXIDE RESIST PATTERNING WITH ELECTRICAL FIELD GUIDED POST-EXP...
- Publication number 20220390847
- Publication date Dec 8, 2022
- Applied Materials, Inc.
- Huixiong DAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER AND METHODS OF TREATING A SUBSTRATE AFTER EXPOSURE TO RADIA...
- Publication number 20220350251
- Publication date Nov 3, 2022
- Applied Materials, Inc.
- Dmitry LUBOMIRSKY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM ARCHITECTURE OF MANUFACTURING OF SEMICONDUCTOR WAFERS
- Publication number 20220326618
- Publication date Oct 13, 2022
- Applied Materials, Inc.
- Dmitry LUBOMIRSKY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INTEGRATED PLATFORM FOR TIN PVD AND HIGH-K ALD FOR BEOL MIM CAPACITOR
- Publication number 20220310776
- Publication date Sep 29, 2022
- Applied Materials, Inc.
- Keith Tatseun WONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20220298636
- Publication date Sep 22, 2022
- Soham Sunjay ASRANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20220301867
- Publication date Sep 22, 2022
- Applied Materials, Inc.
- Jethro TANNOS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20220230887
- Publication date Jul 21, 2022
- Meiyee SHEK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods For Graphene Formation
- Publication number 20220172948
- Publication date Jun 2, 2022
- Applied Materials, Inc.
- Jie Zhou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM STRUCTURE FOR ELECTRIC FIELD ASSISTED BAKE PROCESS
- Publication number 20220091513
- Publication date Mar 24, 2022
- Applied Materials, Inc.
- Mangesh Ashok BANGAR
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Metal oxide resist patterning with electrical field guided post-exp...

Chamber and methods of treating a substrate after exposure to radia...

Photoresist patterning process

Methods and apparatus for processing a substrate

Lithography process window enhancement for photoresist patterning

High pressure annealing process for metal containing materials

Film structure for electric field guided photoresist patterning pro...

Directional selective deposition

Additive patterning of semiconductor film stacks

Three-color 3D DRAM stack and methods of making

Cluster processing system for forming a transition metal material

Gas delivery system for high pressure processing chamber

Tungsten defluorination by high pressure treatment

Methods of improving graphene deposition for processes using microw...

Film structure for electric field guided photoresist patterning pro...

Methods for depositing dielectric material

Silicon carbonitride gapfill with tunable carbon content

Gas delivery system for high pressure processing chamber

Lithography process window enhancement for photoresist patterning

Process chamber for etching low k and other dielectric films

Multi-source ion beam etch system

Substrate vacuum transport and storage apparatus

Methods for graphene formation using microwave surface-wave plasma...

Vertical transistor fabrication for memory applications

Methods and apparatuses for forming interconnection structures

Methods for etching a structure for MRAM applications

Method for depositing and reflow of a high quality etch resistant g...

Methods for depositing dielectric material

Additive patterning of semiconductor film stacks

High pressure annealing process for metal containing materials

Patents Applicationslast 30 patents

DIRECTIONAL SELECTIVE FILL OF SILICON OXIDE MATERIALS

PHOTORESIST PATTERNING PROCESS

ULTRA HIGH-K HAFNIUM OXIDE AND HAFNIUM ZIRCONIUM OXIDE FILMS

METHODS FOR REDUCING MICRO AND MACRO SCALLOPING ON SEMICONDUCTOR DE...

DIRECTIONAL SELECTIVE FILL USING HIGH DENSITY PLASMA

OXIDATION ENHANCED DOPING

DIELECTRIC ON DIELECTRIC SELECTIVE DEPOSITION USING ANILINE PASSIVA...

VACUUM BAKE FOR EUV LITHOGRAPHY

FORMING FILMS WITH IMPROVED FILM QUALITY

LOW TEMPERATURE SILICON OXIDE GAP FILL

DIRECTIONAL SELECTIVE DEPOSITION

CLUSTER PROCESSING SYSTEM FOR FORMING A METAL CONTAINING MATERIAL

MONOLITHIC COMPLEMENTARY FIELD-EFFECT TRANSISTORS HAVING CARBON-DOP...

TUNGSTEN DEFLUORINATION BY HIGH PRESSURE TREATMENT

FILM STRUCTURE FOR ELECTRIC FIELD GUIDED PHOTORESIST PATTERNING PRO...

CHAMBER AND METHODS OF COOLING A SUBSTRATE AFTER BAKING

THREE-COLOR 3D DRAM STACK AND METHODS OF MAKING

GAS DELIVERY SYSTEM FOR HIGH PRESSURE PROCESSING CHAMBER

DIRECTIONAL SELECTIVE DEPOSITION

SILICON CARBONITRIDE GAPFILL WITH TUNABLE CARBON CONTENT

LITHOGRAPHY PROCESS WINDOW ENHANCEMENT FOR PHOTORESIST PATTERNING

METAL OXIDE RESIST PATTERNING WITH ELECTRICAL FIELD GUIDED POST-EXP...

CHAMBER AND METHODS OF TREATING A SUBSTRATE AFTER EXPOSURE TO RADIA...

SYSTEM ARCHITECTURE OF MANUFACTURING OF SEMICONDUCTOR WAFERS

INTEGRATED PLATFORM FOR TIN PVD AND HIGH-K ALD FOR BEOL MIM CAPACITOR

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

Methods For Graphene Formation

FILM STRUCTURE FOR ELECTRIC FIELD ASSISTED BAKE PROCESS