Emanuel I. Cooper

Person

Scarsdale, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Aqueous and semi-aqueous cleaners for the removal of post-etch resi...
- Patent number 11,978,622
- Issue date May 7, 2024
- Entegris, Inc.
- Lingyan Song
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Method for removing hard masks
- Patent number 11,788,007
- Issue date Oct 17, 2023
- Entegris, Inc.
- Hsing-Chen Wu
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Silicon nitride etching composition and method
- Patent number 11,697,767
- Issue date Jul 11, 2023
- Entegris, Inc.
- Steven Michael Bilodeau
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Compositions and methods for selectively etching silicon nitride films
- Patent number 11,530,356
- Issue date Dec 20, 2022
- Entegris, Inc.
- Steven M. Bilodeau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and composition for etching molybdenum
- Patent number 11,492,709
- Issue date Nov 8, 2022
- Entegris, Inc.
- Atanu K. Das
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wet etching composition and method
- Patent number 11,365,351
- Issue date Jun 21, 2022
- Entegris, Inc.
- YoungMin Kim
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Ruthenium etching composition and method
- Patent number 11,346,008
- Issue date May 31, 2022
- Entegris, Inc.
- Steven Lippy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions and methods for removing ceria particles from a surface
- Patent number 11,164,738
- Issue date Nov 2, 2021
- Entegris, Inc.
- Daniela White
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon nitride etching composition and method
- Patent number 11,053,440
- Issue date Jul 6, 2021
- Entegris, Inc.
- Steven M. Bilodeau
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Composition and process for selectively etching p-doped polysilicon...
- Patent number 10,991,809
- Issue date Apr 27, 2021
- Entegris, Inc.
- Steven Bilodeau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Formulations to selectively etch silicon germanium relative to germ...
- Patent number 10,957,547
- Issue date Mar 23, 2021
- Entegris, Inc.
- Steven Bilodeau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compositions and methods for selectively etching titanium nitride
- Patent number 10,920,141
- Issue date Feb 16, 2021
- Entegris, Inc.
- Li-Min Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Post-etch residue removal for advanced node beol processing
- Patent number 10,790,187
- Issue date Sep 29, 2020
- Entegris, Inc.
- Emanuel I. Cooper
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Compositions and methods for etching silicon nitride-containing sub...
- Patent number 10,651,045
- Issue date May 12, 2020
- Entegris, Inc.
- Emanuel Cooper
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning compositions for removing post etch residue
- Patent number 10,577,567
- Issue date Mar 3, 2020
- Entegris, Inc.
- Makonnen Payne
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Formulations to selectively etch silicon and germanium
- Patent number 10,475,658
- Issue date Nov 12, 2019
- Entegris, Inc.
- Steven Bilodeau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compositions and methods for selectively etching titanium nitride
- Patent number 10,472,567
- Issue date Nov 12, 2019
- Entegris, Inc.
- Li-Min Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Anti-reflective coating cleaning and post-etch residue removal comp...
- Patent number 10,460,954
- Issue date Oct 29, 2019
- Entegris, Inc.
- Emanuel I. Cooper
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Formulations for the removal of particles generated by cerium-conta...
- Patent number 10,446,389
- Issue date Oct 15, 2019
- Entegris, Inc.
- Emanuel I. Cooper
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compositions and methods for selectively etching titanium nitride
- Patent number 10,428,271
- Issue date Oct 1, 2019
- Entegris, Inc.
- Emanuel I. Cooper
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Compositions and methods for selectively etching titanium nitride
- Patent number 10,392,560
- Issue date Aug 27, 2019
- Entegris, Inc.
- Jeffrey A. Barnes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Use of non-oxidizing strong acids for the removal of ion-implanted...
- Patent number 10,347,504
- Issue date Jul 9, 2019
- Entegris, Inc.
- Steven Bilodeau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Ni:NiGe:Ge selective etch formulations and method of using same
- Patent number 10,340,150
- Issue date Jul 2, 2019
- Entegris, Inc.
- Steven Bilodeau
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Passivation of germanium surfaces
- Patent number 10,290,505
- Issue date May 14, 2019
- Entegris, Inc.
- Steven Bilodeau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Post-CMP removal using compositions and method of use
- Patent number 10,176,979
- Issue date Jan 8, 2019
- Entegris, Inc.
- Jun Liu
- B08 - CLEANING
Information Patent Grant
Aqueous formulations for removing metal hard mask and post-etch res...
- Patent number 10,138,117
- Issue date Nov 27, 2018
- Entegris, Inc.
- Li-Min Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dopant precursors for mono-layer doping
- Patent number 9,929,014
- Issue date Mar 27, 2018
- Entegris, Inc.
- Thomas M. Cameron
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Composition and process for selectively etching metal nitrides
- Patent number 9,831,088
- Issue date Nov 28, 2017
- Entegris, Inc.
- Tianniu Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Compositions for cleaning III-V semiconductor materials and methods...
- Patent number 9,765,288
- Issue date Sep 19, 2017
- Entegris, Inc.
- Emanuel I. Cooper
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Compositions and methods for the selective removal of silicon nitride
- Patent number 9,691,629
- Issue date Jun 27, 2017
- Entegris, Inc.
- Emanuel I. Cooper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SILICON NITRIDE ETCHING COMPOSITION AND METHOD
- Publication number 20230295502
- Publication date Sep 21, 2023
- Entegris, Inc.
- Steven Michael BILODEAU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND COMPOSITION FOR ETCHING MOLYBDENUM
- Publication number 20230030323
- Publication date Feb 2, 2023
- Entegris, Inc.
- Atanu K. Das
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING COMPOSITION
- Publication number 20220336210
- Publication date Oct 20, 2022
- Entegris, Inc.
- Jun Liu
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
WET ETCHING COMPOSITION AND METHOD
- Publication number 20220275276
- Publication date Sep 1, 2022
- Entegris, Inc.
- YoungMin KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING SILICON NITRIDE FILMS
- Publication number 20220033710
- Publication date Feb 3, 2022
- Entegris, Inc.
- Steven M. BILODEAU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR REMOVING HARD MASKS
- Publication number 20220033709
- Publication date Feb 3, 2022
- Entegris, Inc.
- Hsing-Chen WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND COMPOSITION FOR ETCHING MOLYBDENUM
- Publication number 20210324525
- Publication date Oct 21, 2021
- Entegris, Inc.
- Atanu K. DAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON NITRIDE ETCHING COMPOSITION AND METHOD
- Publication number 20210296136
- Publication date Sep 23, 2021
- Entegris, Inc.
- Steven Michael BILODEAU
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
WET ETCHING COMPOSITION AND METHOD
- Publication number 20210108140
- Publication date Apr 15, 2021
- Entegris, Inc.
- YoungMin KIM
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
RUTHENIUM ETCHING COMPOSITION AND METHOD
- Publication number 20200190673
- Publication date Jun 18, 2020
- Entegris, Inc.
- Steven LIPPY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON NITRIDE ETCHING COMPOSITION AND METHOD
- Publication number 20200157423
- Publication date May 21, 2020
- Entegris, Inc.
- Steven M. BILODEAU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITIONS AND METHODS FOR ETCHING SILICON NITRIDE-CONTAINING SUB...
- Publication number 20190074188
- Publication date Mar 7, 2019
- Entegris, Inc.
- Emanuel Cooper
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Composition and Process for Selectively Etching P-Doped Polysilicon...
- Publication number 20180337253
- Publication date Nov 22, 2018
- Entegris, Inc.
- Steven Bilodeau
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
PASSIVATION OF GERMANIUM SURFACES
- Publication number 20180240674
- Publication date Aug 23, 2018
- Steven Bilodeau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
USE OF NON-OXIDIZING STRONG ACIDS FOR THE REMOVAL OF ION-IMPLANTED...
- Publication number 20180240680
- Publication date Aug 23, 2018
- Entegris, Inc.
- Steven Bilodeau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POST-ETCH RESIDUE REMOVAL FOR ADVANCED NODE BEOL PROCESSING
- Publication number 20180204764
- Publication date Jul 19, 2018
- Entegris, Inc.
- Emanuel I. Cooper
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMULATIONS TO SELECTIVELY ETCH SILICON GERMANIUM RELATIVE TO GERM...
- Publication number 20180197746
- Publication date Jul 12, 2018
- Entegris, Inc.
- Steven Bilodeau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMULATIONS FOR THE REMOVAL OF PARTICLES GENERATED BY CERIUM-CONTA...
- Publication number 20170338104
- Publication date Nov 23, 2017
- Entegris, Inc.
- Emanuel I. Cooper
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING TITANIUM NITRIDE
- Publication number 20170260449
- Publication date Sep 14, 2017
- Entegris, Inc.
- Jeffrey A. BARNES
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANTI-REFLECTIVE COATING CLEANING AND POST-ETCH RESIDUE REMOVAL COMP...
- Publication number 20170200619
- Publication date Jul 13, 2017
- Entegris, Inc.
- Emanuel I. COOPER
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
AQUEOUS AND SEMI-AQUEOUS CLEANERS FOR THE REMOVAL OF POST-ETCH RESI...
- Publication number 20170200601
- Publication date Jul 13, 2017
- Entegris, Inc.
- Lingyan SONG
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
NEW ANTIOXIDANTS FOR POST-CMP CLEANING FORMULATIONS
- Publication number 20170096624
- Publication date Apr 6, 2017
- Advanced Technology Materials, Inc.
- David Angst
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
FORMULATIONS TO SELECTIVELY ETCH SILICON AND GERMANIUM
- Publication number 20160343576
- Publication date Nov 24, 2016
- Entegris, Inc.
- Steven BILODEAU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
USE OF NON-OXIDIZING STRONG ACIDS FOR THE REMOVAL OF ION-IMPLANTED...
- Publication number 20160322232
- Publication date Nov 3, 2016
- Entegris, Inc.
- Steven BILODEAU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NI:NIGE:GE SELECTIVE ETCH FORMULATIONS AND METHOD OF USING SAME
- Publication number 20160314990
- Publication date Oct 27, 2016
- Entegris, Inc.
- Steven BILODEAU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DOPANT PRECURSORS FOR MONO-LAYER DOPING
- Publication number 20160276155
- Publication date Sep 22, 2016
- Entegris, Inc.
- Thomas M. Cameron
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING TITANIUM NITRIDE
- Publication number 20160130500
- Publication date May 12, 2016
- Advanced Technology Materials, Inc.
- Li-Min CHEN
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
COMPOSITIONS AND METHODS FOR THE SELECTIVE REMOVAL OF SILICON NITRIDE
- Publication number 20160035580
- Publication date Feb 4, 2016
- Advanced Technology Materials, Inc.
- Emanuel I. COOPER
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING TITANIUM NITRIDE
- Publication number 20160032186
- Publication date Feb 4, 2016
- Advanced Technology Materials, Inc.
- Li-Min CHEN
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
POST-CMP REMOVAL USING COMPOSITIONS AND METHOD OF USE
- Publication number 20160020087
- Publication date Jan 21, 2016
- Entegris, Inc.
- Jun LIU
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...

Emanuel I. Cooper

Person

Patents Grantslast 30 patents

Aqueous and semi-aqueous cleaners for the removal of post-etch resi...

Method for removing hard masks

Silicon nitride etching composition and method

Compositions and methods for selectively etching silicon nitride films

Method and composition for etching molybdenum

Wet etching composition and method

Ruthenium etching composition and method

Compositions and methods for removing ceria particles from a surface

Silicon nitride etching composition and method

Composition and process for selectively etching p-doped polysilicon...

Formulations to selectively etch silicon germanium relative to germ...

Compositions and methods for selectively etching titanium nitride

Post-etch residue removal for advanced node beol processing

Compositions and methods for etching silicon nitride-containing sub...

Cleaning compositions for removing post etch residue

Formulations to selectively etch silicon and germanium

Compositions and methods for selectively etching titanium nitride

Anti-reflective coating cleaning and post-etch residue removal comp...

Formulations for the removal of particles generated by cerium-conta...

Compositions and methods for selectively etching titanium nitride

Compositions and methods for selectively etching titanium nitride

Use of non-oxidizing strong acids for the removal of ion-implanted...

Ni:NiGe:Ge selective etch formulations and method of using same

Passivation of germanium surfaces

Post-CMP removal using compositions and method of use

Aqueous formulations for removing metal hard mask and post-etch res...

Dopant precursors for mono-layer doping

Composition and process for selectively etching metal nitrides

Compositions for cleaning III-V semiconductor materials and methods...

Compositions and methods for the selective removal of silicon nitride

Patents Applicationslast 30 patents

SILICON NITRIDE ETCHING COMPOSITION AND METHOD

METHOD AND COMPOSITION FOR ETCHING MOLYBDENUM

CLEANING COMPOSITION

WET ETCHING COMPOSITION AND METHOD

COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING SILICON NITRIDE FILMS

METHOD FOR REMOVING HARD MASKS

METHOD AND COMPOSITION FOR ETCHING MOLYBDENUM

SILICON NITRIDE ETCHING COMPOSITION AND METHOD

WET ETCHING COMPOSITION AND METHOD

RUTHENIUM ETCHING COMPOSITION AND METHOD

SILICON NITRIDE ETCHING COMPOSITION AND METHOD

COMPOSITIONS AND METHODS FOR ETCHING SILICON NITRIDE-CONTAINING SUB...

Composition and Process for Selectively Etching P-Doped Polysilicon...

PASSIVATION OF GERMANIUM SURFACES

USE OF NON-OXIDIZING STRONG ACIDS FOR THE REMOVAL OF ION-IMPLANTED...

POST-ETCH RESIDUE REMOVAL FOR ADVANCED NODE BEOL PROCESSING

FORMULATIONS TO SELECTIVELY ETCH SILICON GERMANIUM RELATIVE TO GERM...

FORMULATIONS FOR THE REMOVAL OF PARTICLES GENERATED BY CERIUM-CONTA...

COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING TITANIUM NITRIDE

ANTI-REFLECTIVE COATING CLEANING AND POST-ETCH RESIDUE REMOVAL COMP...

AQUEOUS AND SEMI-AQUEOUS CLEANERS FOR THE REMOVAL OF POST-ETCH RESI...

NEW ANTIOXIDANTS FOR POST-CMP CLEANING FORMULATIONS

FORMULATIONS TO SELECTIVELY ETCH SILICON AND GERMANIUM

USE OF NON-OXIDIZING STRONG ACIDS FOR THE REMOVAL OF ION-IMPLANTED...

NI:NIGE:GE SELECTIVE ETCH FORMULATIONS AND METHOD OF USING SAME

DOPANT PRECURSORS FOR MONO-LAYER DOPING

COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING TITANIUM NITRIDE

COMPOSITIONS AND METHODS FOR THE SELECTIVE REMOVAL OF SILICON NITRIDE

COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING TITANIUM NITRIDE

POST-CMP REMOVAL USING COMPOSITIONS AND METHOD OF USE